Class information for:
Level 2: ATOMIC LAYER DEPOSITION//DIFFUSION BARRIER//CU METALLIZATION

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
396 3       LEAD FREE SOLDER//SOLDER//ELECTROMIGRATION 32184
1011 2             ATOMIC LAYER DEPOSITION//DIFFUSION BARRIER//CU METALLIZATION 10645
2907 1                   ATOMIC LAYER DEPOSITION//ALD//MOLECULAR LAYER DEPOSITION 2147
3456 1                   DIFFUSION BARRIER//CU METALLIZATION//TANTALUM NITRIDE 2011
10067 1                   DIMETHYLALUMINUM HYDRIDE//FREEFORM FABRICAT S//SELECTIVE AL CVD 1125
10235 1                   BETA DIKETONATE//BETA DIKETONATE CHELATES//CRYSTAL CHEMISTRY OF BETA DIKETONATES 1111
11897 1                   PERFLUORINATED CARBOXYLATES//CU CVD//ZENTRUM MIKROTECHNOL 974
14190 1                   CVD W//BLANKET TUNGSTEN//TUNGSTEN THIN FILMS 817
17999 1                   RUTHENIUM FILMS//RUO2//RU 598
18983 1                   SELF FORMING BARRIER//CUMG ALLOY//CUTI ALLOY FILM 550
21611 1                   IRIDIUM COATING//IR COATING//IRIDIUM THIN FILMS 436
25202 1                   NIPF34//BIS ETHYLCYCLOPENTADIENYL NICKEL//NICKEL CONTAINING FILMS 311
28395 1                   PULSED LASER PHOTODEPOSITION//NANOMETER LAYERS//OPTICAL MICROELEMENTS 226
30914 1                   CHROMIUM BASED COATINGS//ATMOSPHERIC DEPOSITION PROCESS//BISARENEVANADIUM PRECURSORS 175
31618 1                   W TI THIN FILMS//W TI ALLOY//W 10TI ALLOY 164

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ATOMIC LAYER DEPOSITION authKW 475779 6% 26% 614
2 DIFFUSION BARRIER authKW 343570 3% 37% 311
3 CU METALLIZATION authKW 160378 1% 73% 74
4 CHEMICAL VAPOR DEPOSITION journal 139827 2% 22% 217
5 TANTALUM NITRIDE authKW 125811 1% 55% 78
6 MATERIALS SCIENCE, COATINGS & FILMS WoSSC 116334 24% 2% 2548
7 ALD authKW 111491 1% 25% 149
8 TA SI N authKW 60859 0% 86% 24
9 COPPER METALLIZATION authKW 58490 0% 52% 38
10 MOLECULAR LAYER DEPOSITION authKW 55728 0% 61% 31

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 116334 24% 2% 2548
2 Physics, Applied 54003 46% 0% 4906
3 Materials Science, Multidisciplinary 17692 31% 0% 3248
4 Physics, Condensed Matter 11967 19% 0% 2031
5 Nanoscience & Nanotechnology 6987 10% 0% 1031
6 Electrochemistry 6525 7% 0% 773
7 Chemistry, Physical 5692 18% 0% 1913
8 Chemistry, Inorganic & Nuclear 3874 8% 0% 819
9 Engineering, Electrical & Electronic 1318 9% 0% 978
10 Crystallography 791 3% 0% 315

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ADV PROC C ACITOR 38659 0% 93% 14
2 FREEFORM FABRICAT S 21038 0% 89% 8
3 COCOON 19983 0% 48% 14
4 ZENTRUM MIKROTECHNOL 18506 0% 48% 13
5 ACT MATRIX LIQUID CRYSTAL DISPLAY 18121 0% 88% 7
6 NEW YORK STATE ADV THIN FILM TECHNOL 17112 0% 64% 9
7 NSF LOW POWER ELECT 16106 0% 78% 7
8 MEMORY DEV 15934 0% 20% 27
9 AV NIKOLAEV INORGAN CHEM 14017 1% 9% 55
10 INTERUNIV SEMICOND 12027 1% 7% 63

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 CHEMICAL VAPOR DEPOSITION 139827 2% 22% 217
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 40491 4% 3% 445
3 THIN SOLID FILMS 36288 6% 2% 678
4 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 23931 5% 2% 506
5 APPLIED SURFACE SCIENCE 15669 4% 1% 449
6 MICROELECTRONIC ENGINEERING 14228 2% 2% 226
7 ELECTROCHEMICAL AND SOLID STATE LETTERS 13921 1% 3% 143
8 CHEMISTRY OF MATERIALS 11643 3% 2% 273
9 JOURNAL OF STRUCTURAL CHEMISTRY 8773 1% 2% 137
10 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 8157 2% 1% 220

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 ATOMIC LAYER DEPOSITION 475779 6% 26% 614 Search ATOMIC+LAYER+DEPOSITION Search ATOMIC+LAYER+DEPOSITION
2 DIFFUSION BARRIER 343570 3% 37% 311 Search DIFFUSION+BARRIER Search DIFFUSION+BARRIER
3 CU METALLIZATION 160378 1% 73% 74 Search CU+METALLIZATION Search CU+METALLIZATION
4 TANTALUM NITRIDE 125811 1% 55% 78 Search TANTALUM+NITRIDE Search TANTALUM+NITRIDE
5 ALD 111491 1% 25% 149 Search ALD Search ALD
6 TA SI N 60859 0% 86% 24 Search TA+SI+N Search TA+SI+N
7 COPPER METALLIZATION 58490 0% 52% 38 Search COPPER+METALLIZATION Search COPPER+METALLIZATION
8 MOLECULAR LAYER DEPOSITION 55728 0% 61% 31 Search MOLECULAR+LAYER+DEPOSITION Search MOLECULAR+LAYER+DEPOSITION
9 BETA DIKETONATE 55220 1% 28% 66 Search BETA+DIKETONATE Search BETA+DIKETONATE
10 TUNGSTEN NITRIDE 55211 0% 43% 43 Search TUNGSTEN+NITRIDE Search TUNGSTEN+NITRIDE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 2


rank cluster_id2 link
1 1628 HFO2//HIGH K DIELECTRICS//HIGH K
2 3099 ELECTROMIGRATION//OPTICAL MOUSE//ELECTROMIGRATION EM
3 470 SURFACE & COATINGS TECHNOLOGY//PLASMA NITRIDING//MATERIALS SCIENCE, COATINGS & FILMS
4 685 BETA FESI2//SILICIDES//SERIES RESISTANCE
5 1206 COATED CONDUCTOR//YBCO//PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS
6 2467 HIPIMS//PNCA//HPPMS
7 2186 SILVER NANOWIRES//TRANSPARENT ELECTRODE//BLISTER TEST
8 1393 PLASMA POLYMERIZATION//LOW K//PLASMA PROCESSES AND POLYMERS
9 1116 SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE
10 1480 PLASMA ETCHING//ELECT DEVICES MAT TECHNOL//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

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