Class information for:
Level 2: PLASMA POLYMERIZATION//LOW K//PLASMA PROCESSES AND POLYMERS

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
8 4 POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY 1554940
314 3       POLYMER SCIENCE//POLYIMIDE//PLASMA POLYMERIZATION 39712
1393 2             PLASMA POLYMERIZATION//LOW K//PLASMA PROCESSES AND POLYMERS 8345
2222 1                   LOW K//LOW K DIELECTRICS//PLASMA PROC TECHNOL 2353
6565 1                   PLASMA POLYMERIZATION//PLASMA PROCESSES AND POLYMERS//PLASMA POLYMER 1498
7916 1                   HMDSO//HEXAMETHYLDISILOXANE//HEXAMETHYLDISILOXANE HMDSO 1338
18806 1                   PARYLENE C//PARYLENE//CHEMICAL VAPOR DEPOSITION POLYMERIZATION 559
21774 1                   LEHRSTUHL MAT VERBUNDE//C S AU FILM//HF DISSOCIATION 429
21866 1                   FLUORINATED AMORPHOUS CARBON//A C F//FLUORINATED AMORPHOUS CARBON FILMS 426
21878 1                   PLASMA POLYMERIZATION//GEORGE SUDARSHAN PHYS COMP SCI//SINTESIS CARACTERIZAC 425
24520 1                   INITIATED CHEMICAL VAPOR DEPOSITION//ICVD//INITIATED CHEMICAL VAPOR DEPOSITION ICVD 332
24699 1                   DEPOSITION POLYMERIZATION//VAPOR DEPOSITION POLYMERIZATION//SIMULTANEOUS EVAPORATION 327
27157 1                   TEMPORARY POLYMER NETWORKS//PLASMA INITIATED POLYMERIZATION//AMINO ACIDS UV IRRADIATION 256
29025 1                   HALL ACCELERATOR//EXTREMELY THIN FILM//NANOPERIOD MULTILAYER FILM 212
36555 1                   PLASMA POLYMERIZED PROPARGYL ALCOHOL//ATTENUATED TOTAL REFLECTANCE FTIR SPECTROSCOPY//EXPANDED POLYTETRAFLUOROETHYLENE ARTIFICIAL CORNEA 96
36704 1                   IONCONDUCTIVE MEMBRANE//DRILLING FLUID//PROTON TRANSPORT NUMBER 94

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PLASMA POLYMERIZATION authKW 1376804 8% 58% 626
2 LOW K authKW 402633 2% 54% 196
3 PLASMA PROCESSES AND POLYMERS journal 400460 5% 25% 422
4 PLASMA POLYMER authKW 366330 2% 64% 152
5 LOW K DIELECTRICS authKW 231639 1% 57% 108
6 LOW K MATERIALS authKW 159809 1% 63% 67
7 PLASMA PROC TECHNOL address 147902 1% 85% 46
8 PECVD authKW 138574 3% 17% 223
9 PLASMA POLYMERISATION authKW 138271 1% 62% 59
10 SIOC H FILMS authKW 128343 0% 100% 34

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 70067 21% 1% 1756
2 Physics, Applied 45717 48% 0% 3985
3 Polymer Science 19931 19% 0% 1597
4 Physics, Condensed Matter 10292 20% 0% 1658
5 Materials Science, Multidisciplinary 9052 25% 0% 2124
6 Physics, Fluids & Plasmas 6005 7% 0% 588
7 Nanoscience & Nanotechnology 5690 10% 0% 822
8 Electrochemistry 2181 5% 0% 416
9 Materials Science, Biomaterials 1440 2% 0% 205
10 Engineering, Electrical & Electronic 1067 9% 0% 775

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PLASMA PROC TECHNOL 147902 1% 85% 46
2 LOG TECHNOL DEV 82004 1% 43% 50
3 SUR E SCI PLASMA TECHNOL 77407 1% 42% 49
4 NANO THIN FILM MAT 72894 0% 74% 26
5 SUR E INTER E ANAL 37604 0% 59% 17
6 MAWSON 33183 1% 14% 65
7 NANOTHIN FILM MAT 32620 0% 79% 11
8 MECH ENERGY PROD ENGN 31157 0% 52% 16
9 XPEQT 30574 0% 90% 9
10 BRAIN KOREA PHYS 21 28079 0% 34% 22

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PLASMA PROCESSES AND POLYMERS 400460 5% 25% 422
2 THIN SOLID FILMS 36650 7% 2% 602
3 SURFACE & COATINGS TECHNOLOGY 25168 4% 2% 370
4 MICROELECTRONIC ENGINEERING 21160 3% 2% 243
5 CHEMICAL VAPOR DEPOSITION 20102 1% 7% 73
6 APPLIED POLYMER SYMPOSIA 16355 0% 27% 16
7 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 14876 3% 2% 240
8 PLASMAS AND POLYMERS 12925 0% 29% 12
9 PLASMA CHEMISTRY AND PLASMA PROCESSING 9310 1% 4% 61
10 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 7152 3% 1% 248

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 PLASMA POLYMERIZATION 1376804 8% 58% 626 Search PLASMA+POLYMERIZATION Search PLASMA+POLYMERIZATION
2 LOW K 402633 2% 54% 196 Search LOW+K Search LOW+K
3 PLASMA POLYMER 366330 2% 64% 152 Search PLASMA+POLYMER Search PLASMA+POLYMER
4 LOW K DIELECTRICS 231639 1% 57% 108 Search LOW+K+DIELECTRICS Search LOW+K+DIELECTRICS
5 LOW K MATERIALS 159809 1% 63% 67 Search LOW+K+MATERIALS Search LOW+K+MATERIALS
6 PECVD 138574 3% 17% 223 Search PECVD Search PECVD
7 PLASMA POLYMERISATION 138271 1% 62% 59 Search PLASMA+POLYMERISATION Search PLASMA+POLYMERISATION
8 SIOC H FILMS 128343 0% 100% 34 Search SIOC+H+FILMS Search SIOC+H+FILMS
9 HMDSO 126314 1% 71% 47 Search HMDSO Search HMDSO
10 LOW DIELECTRIC CONSTANT 118400 1% 39% 81 Search LOW+DIELECTRIC+CONSTANT Search LOW+DIELECTRIC+CONSTANT

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 2


rank cluster_id2 link
1 1745 RADIATION GRAFTING//ADHES ADHES//CARBYNE
2 1133 DIAMOND LIKE CARBON//CARBON NITRIDE//DIAMOND AND RELATED MATERIALS
3 2918 POLYIMIDE//PHOTOSENSITIVE POLYIMIDE//POLYAMIC ACID
4 1480 PLASMA ETCHING//ELECT DEVICES MAT TECHNOL//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
5 2186 SILVER NANOWIRES//TRANSPARENT ELECTRODE//BLISTER TEST
6 1116 SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE
7 3099 ELECTROMIGRATION//OPTICAL MOUSE//ELECTROMIGRATION EM
8 4123 LIQUID PHASE DEPOSITION//LIQUID PHASE CRYSTAL DEPOSITION//MITTEMEIJER
9 1011 ATOMIC LAYER DEPOSITION//DIFFUSION BARRIER//CU METALLIZATION
10 4216 POTENTIAL ENERGY PROFILE//GERMANIUM CARBON//CYCLOADDITIONAL REACTION

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