Class information for:
Level 1: LOW K//LOW K DIELECTRICS//PLASMA PROC TECHNOL

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
8 4 POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY 1554940
314 3       POLYMER SCIENCE//POLYIMIDE//PLASMA POLYMERIZATION 39712
1393 2             PLASMA POLYMERIZATION//LOW K//PLASMA PROCESSES AND POLYMERS 8345
2222 1                   LOW K//LOW K DIELECTRICS//PLASMA PROC TECHNOL 2353

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 LOW K authKW 1342791 8% 53% 190
2 LOW K DIELECTRICS authKW 733251 4% 54% 102
3 PLASMA PROC TECHNOL address 524774 2% 85% 46
4 LOW K MATERIALS authKW 517456 3% 60% 64
5 SIOC H FILMS authKW 455345 1% 100% 34
6 LOG TECHNOL DEV address 291085 2% 43% 50
7 LOW DIELECTRIC CONSTANT authKW 279038 3% 32% 66
8 SIOF authKW 279002 1% 83% 25
9 NANO THIN FILM MAT address 258653 1% 74% 26
10 LOW K DIELECTRIC THIN FILMS authKW 232119 1% 67% 26

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 26086 66% 0% 1563
2 Materials Science, Coatings & Films 22974 23% 0% 533
3 Nanoscience & Nanotechnology 8420 21% 0% 497
4 Engineering, Electrical & Electronic 3620 25% 0% 581
5 Materials Science, Multidisciplinary 3089 28% 0% 649
6 Physics, Condensed Matter 2331 18% 0% 425
7 Electrochemistry 1972 8% 0% 197
8 Optics 1173 11% 0% 249
9 Materials Science, Ceramics 121 2% 0% 42
10 Chemistry, Physical 41 6% 0% 149

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PLASMA PROC TECHNOL 524774 2% 85% 46
2 LOG TECHNOL DEV 291085 2% 43% 50
3 NANO THIN FILM MAT 258653 1% 74% 26
4 NANOTHIN FILM MAT 115745 0% 79% 11
5 XPEQT 108478 0% 90% 9
6 MECH ENERGY PROD ENGN 84660 1% 45% 14
7 NANODEVICES SYST 67465 1% 15% 33
8 MAT CALCULAT 47828 0% 71% 5
9 OCOTILLO MAT 43825 0% 55% 6
10 SEMICOND MAT PROC 41907 1% 26% 12

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MICROELECTRONIC ENGINEERING 70712 10% 2% 234
2 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 15859 8% 1% 192
3 THIN SOLID FILMS 15007 9% 1% 204
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 12903 5% 1% 128
5 ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY 9837 1% 2% 33
6 SOLID STATE TECHNOLOGY 8757 1% 2% 35
7 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 7103 6% 0% 130
8 ELECTROCHEMICAL AND SOLID STATE LETTERS 6274 2% 1% 45
9 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 5891 3% 1% 80
10 JAPANESE JOURNAL OF APPLIED PHYSICS 3876 3% 0% 70

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 LOW K 1342791 8% 53% 190 Search LOW+K Search LOW+K
2 LOW K DIELECTRICS 733251 4% 54% 102 Search LOW+K+DIELECTRICS Search LOW+K+DIELECTRICS
3 LOW K MATERIALS 517456 3% 60% 64 Search LOW+K+MATERIALS Search LOW+K+MATERIALS
4 SIOC H FILMS 455345 1% 100% 34 Search SIOC+H+FILMS Search SIOC+H+FILMS
5 LOW DIELECTRIC CONSTANT 279038 3% 32% 66 Search LOW+DIELECTRIC+CONSTANT Search LOW+DIELECTRIC+CONSTANT
6 SIOF 279002 1% 83% 25 Search SIOF Search SIOF
7 LOW K DIELECTRIC THIN FILMS 232119 1% 67% 26 Search LOW+K+DIELECTRIC+THIN+FILMS Search LOW+K+DIELECTRIC+THIN+FILMS
8 POROUS LOW K 223202 1% 83% 20 Search POROUS+LOW+K Search POROUS+LOW+K
9 ORGANOSILICATE GLASS 161665 1% 93% 13 Search ORGANOSILICATE+GLASS Search ORGANOSILICATE+GLASS
10 SIOCH 154958 1% 64% 18 Search SIOCH Search SIOCH

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 21866 FLUORINATED AMORPHOUS CARBON//A C F//FLUORINATED AMORPHOUS CARBON FILMS
2 28240 HSQ//HYDROGEN SILSESQUIOXANE//HYDROGEN SILSESQUIOXANE HSQ
3 26719 BENZOCYCLOBUTENE//DOW CYCLOTENE//CYCLOTENE
4 7916 HMDSO//HEXAMETHYLDISILOXANE//HEXAMETHYLDISILOXANE HMDSO
5 19541 SILICON CARBONITRIDE//SICN//SILICON CARBON NITRIDE
6 15929 FLOW SHAPED STEP COVERAGE//FLOWING LIKE PROFILE//LPCVD SILICON NITRIDE
7 3456 DIFFUSION BARRIER//CU METALLIZATION//TANTALUM NITRIDE
8 18983 SELF FORMING BARRIER//CUMG ALLOY//CUTI ALLOY FILM
9 17105 ATOMIC LAYER ETCHING//GATE CHARGING//NEUTRAL BEAM ETCHING
10 35530 OPTICAL MOUSE//OPTICAL MOUSE SENSOR//PG PL ELECT

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