Class information for:
Level 1: CVD W//BLANKET TUNGSTEN//TUNGSTEN THIN FILMS

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
396 3       LEAD FREE SOLDER//SOLDER//ELECTROMIGRATION 32184
1011 2             ATOMIC LAYER DEPOSITION//DIFFUSION BARRIER//CU METALLIZATION 10645
14190 1                   CVD W//BLANKET TUNGSTEN//TUNGSTEN THIN FILMS 817

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 CVD W authKW 224431 1% 73% 8
2 BLANKET TUNGSTEN authKW 115725 0% 100% 3
3 TUNGSTEN THIN FILMS authKW 115725 0% 100% 3
4 CVD IRON authKW 77150 0% 100% 2
5 EFFECTIVE REACTIVITY MAP authKW 77150 0% 100% 2
6 FOCUS NEW YORK RENSSELAER INTERCONNECT GIGASC address 77150 0% 100% 2
7 REACTOR SCALE MODEL authKW 77150 0% 100% 2
8 SUBMICROMETER TRENCHES authKW 77150 0% 100% 2
9 FOCUS NEW YORK address 59057 1% 22% 7
10 BEREICH BAUELEMENTETECHNOL address 57859 0% 50% 3

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 25554 40% 0% 328
2 Physics, Applied 7679 61% 0% 502
3 Physics, Condensed Matter 2195 28% 0% 230
4 Electrochemistry 1932 14% 0% 111
5 Materials Science, Multidisciplinary 939 26% 0% 213
6 Engineering, Electrical & Electronic 580 18% 0% 145
7 Nanoscience & Nanotechnology 504 9% 0% 77
8 Chemistry, Physical 110 11% 0% 89
9 Metallurgy & Metallurgical Engineering 35 3% 0% 26
10 Engineering, Manufacturing 8 1% 0% 7

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 FOCUS NEW YORK RENSSELAER INTERCONNECT GIGASC 77150 0% 100% 2
2 FOCUS NEW YORK 59057 1% 22% 7
3 BEREICH BAUELEMENTETECHNOL 57859 0% 50% 3
4 GEN PHYS LASER SPECT 43393 0% 38% 3
5 ABT MA INENBAU HBEREICH INGN WISSEN 38575 0% 100% 1
6 ALLGEMEINE ELEKTROTECH QUANTENELEKT 38575 0% 100% 1
7 AUSTRALIAN KEY MICROSCOPY MICROANAAL 38575 0% 100% 1
8 CHEM REACTOR TECHNOL 38575 0% 100% 1
9 CNRSURA 0022 38575 0% 100% 1
10 CNS TCS 38575 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 12742 12% 0% 101
2 THIN SOLID FILMS 8272 11% 0% 89
3 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 6439 6% 0% 49
4 SOLID STATE TECHNOLOGY 5280 2% 1% 16
5 APPLIED SURFACE SCIENCE 4255 8% 0% 64
6 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 3621 5% 0% 40
7 CHEMICAL VAPOR DEPOSITION 3126 1% 1% 9
8 MICROELECTRONIC ENGINEERING 1314 2% 0% 19
9 JOURNAL OF THE INSTITUTE OF ENVIRONMENTAL SCIENCES 1167 0% 3% 1
10 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 928 3% 0% 28

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 CVD W 224431 1% 73% 8 Search CVD+W Search CVD+W
2 BLANKET TUNGSTEN 115725 0% 100% 3 Search BLANKET+TUNGSTEN Search BLANKET+TUNGSTEN
3 TUNGSTEN THIN FILMS 115725 0% 100% 3 Search TUNGSTEN+THIN+FILMS Search TUNGSTEN+THIN+FILMS
4 CVD IRON 77150 0% 100% 2 Search CVD+IRON Search CVD+IRON
5 EFFECTIVE REACTIVITY MAP 77150 0% 100% 2 Search EFFECTIVE+REACTIVITY+MAP Search EFFECTIVE+REACTIVITY+MAP
6 REACTOR SCALE MODEL 77150 0% 100% 2 Search REACTOR+SCALE+MODEL Search REACTOR+SCALE+MODEL
7 SUBMICROMETER TRENCHES 77150 0% 100% 2 Search SUBMICROMETER+TRENCHES Search SUBMICROMETER+TRENCHES
8 FEATURE SCALE 57859 0% 50% 3 Search FEATURE+SCALE Search FEATURE+SCALE
9 TUNGSTEN FILMS 57859 0% 50% 3 Search TUNGSTEN+FILMS Search TUNGSTEN+FILMS
10 SINGLE WAFER REACTOR 51432 0% 67% 2 Search SINGLE+WAFER+REACTOR Search SINGLE+WAFER+REACTOR

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 31618 W TI THIN FILMS//W TI ALLOY//W 10TI ALLOY
2 10067 DIMETHYLALUMINUM HYDRIDE//FREEFORM FABRICAT S//SELECTIVE AL CVD
3 30846 CROSS KELVIN RESISTOR CKR//CROSS BRIDGE KELVIN RESISTOR CBKR//POLYMETAL GATE
4 3456 DIFFUSION BARRIER//CU METALLIZATION//TANTALUM NITRIDE
5 15929 FLOW SHAPED STEP COVERAGE//FLOWING LIKE PROFILE//LPCVD SILICON NITRIDE
6 1258 TISI2//COSI2//SALICIDE
7 9128 SIEMENS PROCESS//INORGAN CHEM GRP//EPITAXIAL REACTOR
8 11897 PERFLUORINATED CARBOXYLATES//CU CVD//ZENTRUM MIKROTECHNOL
9 22888 ELECT ELECT MAT TECHNOL//PROTON HOPPING//CELL ADVANCING METHOD
10 20311 LONGITUDINAL MICROSTRUCTURE//VERY NARROW COPPER WIRE//8 INCH WAFER

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