Class information for:
Level 1: DIMETHYLALUMINUM HYDRIDE//FREEFORM FABRICAT S//SELECTIVE AL CVD

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
396 3       LEAD FREE SOLDER//SOLDER//ELECTROMIGRATION 32184
1011 2             ATOMIC LAYER DEPOSITION//DIFFUSION BARRIER//CU METALLIZATION 10645
10067 1                   DIMETHYLALUMINUM HYDRIDE//FREEFORM FABRICAT S//SELECTIVE AL CVD 1125

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 DIMETHYLALUMINUM HYDRIDE authKW 263007 1% 72% 13
2 FREEFORM FABRICAT S address 199204 1% 89% 8
3 SELECTIVE AL CVD authKW 84040 0% 100% 3
4 DIMETHYLALUMINUMHYDRIDE DMAH authKW 63029 0% 75% 3
5 DMAH authKW 56027 0% 100% 2
6 ELECT ELE ENGN TENPA KU address 56027 0% 100% 2
7 ELEMENTARY REACTION SIMULATION authKW 56027 0% 100% 2
8 FULLY SELF ALIGNED METALLIZATION authKW 56027 0% 100% 2
9 GAS SATURATED POROUS MEDIA authKW 56027 0% 100% 2
10 METHYLPYRROLIDINE ALANE authKW 56027 0% 100% 2

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 7902 54% 0% 603
2 Materials Science, Coatings & Films 7172 18% 0% 207
3 Physics, Condensed Matter 1216 19% 0% 211
4 Chemistry, Physical 1199 24% 0% 268
5 Materials Science, Multidisciplinary 675 20% 0% 225
6 Engineering, Electrical & Electronic 142 9% 0% 104
7 Spectroscopy 112 3% 0% 38
8 Nanoscience & Nanotechnology 111 4% 0% 50
9 Physics, Atomic, Molecular & Chemical 98 5% 0% 56
10 Chemistry, Inorganic & Nuclear 92 4% 0% 48

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 FREEFORM FABRICAT S 199204 1% 89% 8
2 ELECT ELE ENGN TENPA KU 56027 0% 100% 2
3 NEMISIS TEAM 56027 0% 100% 2
4 CIRIMAT INPT 37350 0% 67% 2
5 ADV MAT NANOSYST GRP 28013 0% 100% 1
6 AGCY IND SCI TECHNOL IND PROD 28013 0% 100% 1
7 AKAD LAVRENTIV PROSPEKT 3 28013 0% 100% 1
8 CANADA CHAIR FREEFORM FABRICAT 28013 0% 100% 1
9 CHEM SOLID STATE SCI 28013 0% 100% 1
10 CHIM CHIM TECH 28013 0% 100% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 6765 5% 0% 59
2 APPLIED SURFACE SCIENCE 6394 8% 0% 92
3 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 2633 3% 0% 37
4 APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY 2539 1% 1% 12
5 PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS 2259 2% 0% 21
6 APPLIED PHYSICS LETTERS 2052 8% 0% 93
7 SOLID STATE TECHNOLOGY 1802 1% 1% 11
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 1657 3% 0% 32
9 JOURNAL OF APPLIED PHYSICS 1645 7% 0% 82
10 THIN SOLID FILMS 1413 4% 0% 44

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 DIMETHYLALUMINUM HYDRIDE 263007 1% 72% 13 Search DIMETHYLALUMINUM+HYDRIDE Search DIMETHYLALUMINUM+HYDRIDE
2 SELECTIVE AL CVD 84040 0% 100% 3 Search SELECTIVE+AL+CVD Search SELECTIVE+AL+CVD
3 DIMETHYLALUMINUMHYDRIDE DMAH 63029 0% 75% 3 Search DIMETHYLALUMINUMHYDRIDE+DMAH Search DIMETHYLALUMINUMHYDRIDE+DMAH
4 DMAH 56027 0% 100% 2 Search DMAH Search DMAH
5 ELEMENTARY REACTION SIMULATION 56027 0% 100% 2 Search ELEMENTARY+REACTION+SIMULATION Search ELEMENTARY+REACTION+SIMULATION
6 FULLY SELF ALIGNED METALLIZATION 56027 0% 100% 2 Search FULLY+SELF+ALIGNED+METALLIZATION Search FULLY+SELF+ALIGNED+METALLIZATION
7 GAS SATURATED POROUS MEDIA 56027 0% 100% 2 Search GAS+SATURATED+POROUS+MEDIA Search GAS+SATURATED+POROUS+MEDIA
8 METHYLPYRROLIDINE ALANE 56027 0% 100% 2 Search METHYLPYRROLIDINE+ALANE Search METHYLPYRROLIDINE+ALANE
9 SELECTIVE ALUMINUM CHEMICAL VAPOR DEPOSITION 56027 0% 100% 2 Search SELECTIVE+ALUMINUM+CHEMICAL+VAPOR+DEPOSITION Search SELECTIVE+ALUMINUM+CHEMICAL+VAPOR+DEPOSITION
10 LASER INDUCED CHEMICAL VAPOR DEPOSITION 44817 0% 40% 4 Search LASER+INDUCED+CHEMICAL+VAPOR+DEPOSITION Search LASER+INDUCED+CHEMICAL+VAPOR+DEPOSITION

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 26088 F 2 LASER//CHEMICAL WET TREATMENT//DIELECTRIC TANGENT
2 15952 ELECTROLESS METALLIZATION//LASER MICRO CLADDING//LASER INDUCED CHEMICAL LIQUID PHASE DEPOSITION
3 26716 SYNCHROTRON RADIATION STIMULATED ETCHING//VACUUM UV PHOTOSCI//SYNCHROTRON RADIATION EXCITED GROWTH
4 14190 CVD W//BLANKET TUNGSTEN//TUNGSTEN THIN FILMS
5 28395 PULSED LASER PHOTODEPOSITION//NANOMETER LAYERS//OPTICAL MICROELEMENTS
6 11897 PERFLUORINATED CARBOXYLATES//CU CVD//ZENTRUM MIKROTECHNOL
7 10218 METASTABLE ION DECAY//MULTIPHOTON IONIZATION DISSOCIATION//DICARBONYL CHELATES
8 35530 OPTICAL MOUSE//OPTICAL MOUSE SENSOR//PG PL ELECT
9 21611 IRIDIUM COATING//IR COATING//IRIDIUM THIN FILMS
10 12647 SURFACE PHOTOCHEMISTRY//RESONANCE ENHANCED MULTIPHOTON IONIZATION MASS SPECTROSCOPY REMPI MS//PHOTON STIMULATED DESORPTION PSD

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