Class information for:
Level 1: SIEMENS PROCESS//INORGAN CHEM GRP//EPITAXIAL REACTOR

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1116 2             SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE 10021
9128 1                   SIEMENS PROCESS//INORGAN CHEM GRP//EPITAXIAL REACTOR 1215

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SIEMENS PROCESS authKW 129691 0% 100% 5
2 INORGAN CHEM GRP address 82854 2% 15% 21
3 EPITAXIAL REACTOR authKW 77814 0% 100% 3
4 MOCVD REACTOR authKW 77814 0% 100% 3
5 PLANETARY REACTOR authKW 69166 0% 67% 4
6 JOURNAL OF CRYSTAL GROWTH journal 67139 23% 1% 285
7 CVD REACTOR authKW 66691 0% 43% 6
8 PARASITIC DEPOSITION authKW 58359 0% 75% 3
9 EPITAXIAL SILICON TECHNOL address 51876 0% 100% 2
10 INORGANIC RINGS AND CLUSTERS authKW 51876 0% 100% 2

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Crystallography 12004 27% 0% 326
2 Physics, Applied 5492 44% 0% 531
3 Materials Science, Coatings & Films 4784 15% 0% 177
4 Materials Science, Multidisciplinary 3207 37% 0% 454
5 Electrochemistry 1536 10% 0% 123
6 Engineering, Chemical 798 12% 0% 145
7 Physics, Condensed Matter 272 10% 0% 120
8 Thermodynamics 254 4% 0% 52
9 Engineering, Mechanical 145 4% 0% 54
10 Physics, Multidisciplinary 138 7% 0% 80

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 INORGAN CHEM GRP 82854 2% 15% 21
2 EPITAXIAL SILICON TECHNOL 51876 0% 100% 2
3 TOURISM DESIGN 51876 0% 100% 2
4 FUNDAMENTAL SCI DEF WIDE BAND G SE 34583 0% 67% 2
5 DIPARTIMENTO CHIM FIS PLICATA 31233 1% 12% 10
6 NANOELE SYST INFORMAT TECHNOL 29177 0% 38% 3
7 AUTOMOBILE HI TECH 25938 0% 100% 1
8 CANMET MET TECHNOL S 25938 0% 100% 1
9 CHEM OPTOELECT MAT CHEM 25938 0% 100% 1
10 CNRS URA 1109 LMGP 25938 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF CRYSTAL GROWTH 67139 23% 1% 285
2 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 9920 9% 0% 109
3 JOURNAL DE PHYSIQUE IV 5978 4% 0% 49
4 CRYSTAL RESEARCH AND TECHNOLOGY 2626 2% 0% 26
5 CHEMICAL VAPOR DEPOSITION 2590 1% 1% 10
6 KAGAKU KOGAKU RONBUNSHU 2517 2% 0% 21
7 REVUE INTERNATIONALE DES HAUTES TEMPERATURES ET DES REFRACTAIRES 1997 0% 2% 4
8 ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY 1741 1% 1% 10
9 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 1603 1% 1% 10
10 PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS 1436 0% 1% 6

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 SIEMENS PROCESS 129691 0% 100% 5 Search SIEMENS+PROCESS Search SIEMENS+PROCESS
2 EPITAXIAL REACTOR 77814 0% 100% 3 Search EPITAXIAL+REACTOR Search EPITAXIAL+REACTOR
3 MOCVD REACTOR 77814 0% 100% 3 Search MOCVD+REACTOR Search MOCVD+REACTOR
4 PLANETARY REACTOR 69166 0% 67% 4 Search PLANETARY+REACTOR Search PLANETARY+REACTOR
5 CVD REACTOR 66691 0% 43% 6 Search CVD+REACTOR Search CVD+REACTOR
6 PARASITIC DEPOSITION 58359 0% 75% 3 Search PARASITIC+DEPOSITION Search PARASITIC+DEPOSITION
7 INORGANIC RINGS AND CLUSTERS 51876 0% 100% 2 Search INORGANIC+RINGS+AND+CLUSTERS Search INORGANIC+RINGS+AND+CLUSTERS
8 LPCVD FURNACE 51876 0% 100% 2 Search LPCVD+FURNACE Search LPCVD+FURNACE
9 MULTIWAFER REACTOR 51876 0% 100% 2 Search MULTIWAFER+REACTOR Search MULTIWAFER+REACTOR
10 RING AND CLUSTER COMPOUNDS 51876 0% 100% 2 Search RING+AND+CLUSTER+COMPOUNDS Search RING+AND+CLUSTER+COMPOUNDS

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 2851 JOURNAL OF CRYSTAL GROWTH//TRIMETHYLINDIUM//MOLECULAR LAYER EPITAXY
2 9401 SELECTIVE EPITAXIAL GROWTH//ELEVATED SOURCE DRAIN//GERMANIUM SILICON COMPOUNDS
3 20412 POLYOXIDE//INTER POLY DIELECTRIC IPD//INTERPOLY DIELECTRIC
4 23596 RAPID THERMAL PROCESSING//RAPID THERMAL PROCESSING RTP//SILICON NANOELECT
5 15796 MIXED CONVECTION//INCLINED DUCT//COMBINED LAMINAR FLOW
6 23696 METHYLTRICHLOROSILANE//METHYLTRICHLOROSILANE MTS//SIC FILM
7 29260 MSOS O P STRUCTURE//SEMI INSULATING POLYCRYSTALLINE SILICON//SIPOS
8 7996 2 CHLOROETHENYLSILANE//DIVALENT STATE STABILIZATION ENERGY//PENTAMETHYLDISILANE
9 14190 CVD W//BLANKET TUNGSTEN//TUNGSTEN THIN FILMS
10 24158 ING ELECT SEES//SECC PUEBLA//MICROLUMINESCENCE

Go to start page