Class information for:
Level 2: HFO2//HIGH K DIELECTRICS//HIGH K

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1628 2             HFO2//HIGH K DIELECTRICS//HIGH K 7266
116 1                   HFO2//HIGH K DIELECTRICS//HIGH K 4377
9993 1                   TANTALUM OXIDE//TA2O5//TANTALUM PENTOXIDE 1133
15246 1                   PRASEODYMIUM OXIDE//DIELECTRIC PHENOMENA//ELECT MAT DEVICES 749
19118 1                   METAL INSULATOR METAL MIM CAPACITOR//METAL INSULATOR METAL MIM//VOLTAGE COEFFICIENT OF CAPACITANCE VCC 543
24564 1                   GADOLINIA FILMS//GE TFTS//POTASSIUM YTTRIUM FLUORIDE 331
33806 1                   HIGHER RARE EARTH OXIDES//FLUORITE RELATED OXIDES//OXYGEN CENTRED TETRAHEDRA 133

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 HFO2 authKW 555028 4% 42% 302
2 HIGH K DIELECTRICS authKW 505737 4% 41% 284
3 HIGH K authKW 502051 4% 39% 295
4 HIGH K GATE DIELECTRICS authKW 314649 2% 55% 132
5 METAL GATE authKW 260798 2% 41% 147
6 HAFNIUM OXIDE authKW 199467 2% 38% 121
7 METAL INSULATOR METAL MIM CAPACITOR authKW 163809 1% 82% 46
8 HAFNIUM COMPOUNDS authKW 154542 1% 38% 95
9 HIGH KAPPA authKW 127359 1% 35% 84
10 GATE DIELECTRIC authKW 122711 1% 26% 107

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 67692 61% 0% 4446
2 Materials Science, Coatings & Films 34326 16% 1% 1156
3 Physics, Condensed Matter 10655 21% 0% 1558
4 Engineering, Electrical & Electronic 9681 23% 0% 1685
5 Materials Science, Multidisciplinary 7991 26% 0% 1860
6 Nanoscience & Nanotechnology 7236 12% 0% 848
7 Electrochemistry 1970 5% 0% 368
8 Optics 894 6% 0% 441
9 Materials Science, Ceramics 777 2% 0% 175
10 Chemistry, Physical 429 8% 0% 617

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SILICON NANO DEVICE 86842 1% 26% 76
2 EXPT PHYS TECHNOL 80045 1% 45% 41
3 ANHUI NANOMAT NANOSTRUCT 52129 1% 20% 59
4 RADIAT DETECT MAT DEVICES 48942 0% 47% 24
5 LONDON NANOTECHNOL ELECT ELECT ENGN 39021 0% 100% 9
6 MIRAI ASET 30829 0% 89% 8
7 ENERGY EFFICIENT SUSTAINABLE SEMICOND GRP 30541 0% 41% 17
8 MDM 28588 1% 13% 50
9 ADV PROC DEV TEAM 28368 0% 55% 12
10 TEL TECHNOL 27397 0% 45% 14

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MICROELECTRONIC ENGINEERING 49130 5% 3% 344
2 IEEE ELECTRON DEVICE LETTERS 31919 4% 3% 263
3 APPLIED PHYSICS LETTERS 31824 13% 1% 917
4 CHEMICAL VAPOR DEPOSITION 18307 1% 7% 65
5 THIN SOLID FILMS 16746 5% 1% 382
6 ELECTROCHEMICAL AND SOLID STATE LETTERS 12771 2% 3% 113
7 JOURNAL OF APPLIED PHYSICS 11235 7% 1% 544
8 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 10170 4% 1% 274
9 MICROELECTRONICS RELIABILITY 9578 2% 2% 129
10 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 8535 3% 1% 185

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 HFO2 555028 4% 42% 302 Search HFO2 Search HFO2
2 HIGH K DIELECTRICS 505737 4% 41% 284 Search HIGH+K+DIELECTRICS Search HIGH+K+DIELECTRICS
3 HIGH K 502051 4% 39% 295 Search HIGH+K Search HIGH+K
4 HIGH K GATE DIELECTRICS 314649 2% 55% 132 Search HIGH+K+GATE+DIELECTRICS Search HIGH+K+GATE+DIELECTRICS
5 METAL GATE 260798 2% 41% 147 Search METAL+GATE Search METAL+GATE
6 HAFNIUM OXIDE 199467 2% 38% 121 Search HAFNIUM+OXIDE Search HAFNIUM+OXIDE
7 METAL INSULATOR METAL MIM CAPACITOR 163809 1% 82% 46 Search METAL+INSULATOR+METAL+MIM+CAPACITOR Search METAL+INSULATOR+METAL+MIM+CAPACITOR
8 HAFNIUM COMPOUNDS 154542 1% 38% 95 Search HAFNIUM+COMPOUNDS Search HAFNIUM+COMPOUNDS
9 HIGH KAPPA 127359 1% 35% 84 Search HIGH+KAPPA Search HIGH+KAPPA
10 GATE DIELECTRIC 122711 1% 26% 107 Search GATE+DIELECTRIC Search GATE+DIELECTRIC

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 2


rank cluster_id2 link
1 1011 ATOMIC LAYER DEPOSITION//DIFFUSION BARRIER//CU METALLIZATION
2 197 IEEE TRANSACTIONS ON ELECTRON DEVICES//MOSFET//FLASH MEMORY
3 1841 ZIRCONIA//ZRO2//YTTRIA STABILIZED ZIRCONIA
4 1116 SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE
5 893 SIGE//STRAINED SI//GERMANIUM
6 2353 LASER INDUCED DAMAGE//OPTICAL COATINGS//LASER INDUCED DAMAGE THRESHOLD
7 1398 RESISTIVE SWITCHING//MEMRISTOR//RRAM
8 1092 GALLIUM ARSENIDE//GAAS//SURFACE SCIENCE
9 4165 ULTRASONIC EMISSION//NANOCRYSTALLINE POROUS SILICON//THERMOACOUSTIC EFFECT
10 3314 CLEANROOM//PHOTORESIST REMOVAL//MINIENVIRONMENT

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