Class information for:
Level 1: TANTALUM OXIDE//TA2O5//TANTALUM PENTOXIDE

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1628 2             HFO2//HIGH K DIELECTRICS//HIGH K 7266
9993 1                   TANTALUM OXIDE//TA2O5//TANTALUM PENTOXIDE 1133

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 TANTALUM OXIDE authKW 596437 7% 27% 79
2 TA2O5 authKW 518134 6% 27% 70
3 TANTALUM PENTOXIDE authKW 511063 4% 44% 42
4 TANTALUM PENTOXIDE TA2O5 authKW 240401 1% 79% 11
5 TANTALUM OXIDE FILMS authKW 170368 1% 88% 7
6 TA2O5 THIN FILMS authKW 136292 1% 70% 7
7 HIGH K STACK authKW 125167 1% 75% 6
8 TANTALUM ETHOXIDE authKW 125167 1% 75% 6
9 TANTALUM OXYNITRIDE authKW 125155 1% 38% 12
10 TA2O51 XTIO2X authKW 111262 0% 100% 4

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 8603 20% 0% 227
2 Physics, Applied 8006 54% 0% 609
3 Materials Science, Multidisciplinary 1862 30% 0% 344
4 Physics, Condensed Matter 1647 21% 0% 242
5 Engineering, Electrical & Electronic 765 17% 0% 197
6 Electrochemistry 727 7% 0% 84
7 Nanoscience & Nanotechnology 535 8% 0% 95
8 Materials Science, Ceramics 276 3% 0% 39
9 Chemistry, Physical 221 12% 0% 140
10 Optics 82 5% 0% 57

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MEDTRON ENERGY COMPONENTS 55631 0% 100% 2
2 SCI TECHNOL SYNTH GROWTH ANAL ELECT MAT 41720 0% 50% 3
3 ADV INTERCONNECTS SYST TECHNOL 37086 0% 67% 2
4 DPT MATIERE CONDENSEE MAT FONCT 37086 0% 67% 2
5 ADV PROC INTEGRAT NAKAHARA KU 27816 0% 100% 1
6 CVD BUSINESS UNIT 27816 0% 100% 1
7 DIELE ETCH ENGN GRP 27816 0% 100% 1
8 ELE ON DEVICES BUSINESS UNIT 27816 0% 100% 1
9 ELECT ENGN MYONGJI PHOTON ELECT EMBEDDED S 27816 0% 100% 1
10 ENSEEGSIM 27816 0% 100% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 THIN SOLID FILMS 4408 7% 0% 77
2 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 3394 5% 0% 62
3 MICROELECTRONICS RELIABILITY 2510 2% 0% 26
4 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 2162 4% 0% 50
5 APPLIED SURFACE SCIENCE 1830 4% 0% 50
6 JOURNAL OF APPLIED PHYSICS 1241 6% 0% 72
7 IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART B-ADVANCED PACKAGING 1154 0% 1% 4
8 MICROELECTRONIC ENGINEERING 1149 2% 0% 21
9 ADVANCED MATERIALS FOR OPTICS AND ELECTRONICS 1087 0% 1% 3
10 MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 934 1% 0% 11

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 TANTALUM OXIDE 596437 7% 27% 79 Search TANTALUM+OXIDE Search TANTALUM+OXIDE
2 TA2O5 518134 6% 27% 70 Search TA2O5 Search TA2O5
3 TANTALUM PENTOXIDE 511063 4% 44% 42 Search TANTALUM+PENTOXIDE Search TANTALUM+PENTOXIDE
4 TANTALUM PENTOXIDE TA2O5 240401 1% 79% 11 Search TANTALUM+PENTOXIDE+TA2O5 Search TANTALUM+PENTOXIDE+TA2O5
5 TANTALUM OXIDE FILMS 170368 1% 88% 7 Search TANTALUM+OXIDE+FILMS Search TANTALUM+OXIDE+FILMS
6 TA2O5 THIN FILMS 136292 1% 70% 7 Search TA2O5+THIN+FILMS Search TA2O5+THIN+FILMS
7 HIGH K STACK 125167 1% 75% 6 Search HIGH+K+STACK Search HIGH+K+STACK
8 TANTALUM ETHOXIDE 125167 1% 75% 6 Search TANTALUM+ETHOXIDE Search TANTALUM+ETHOXIDE
9 TANTALUM OXYNITRIDE 125155 1% 38% 12 Search TANTALUM+OXYNITRIDE Search TANTALUM+OXYNITRIDE
10 TA2O51 XTIO2X 111262 0% 100% 4 Search TA2O51+XTIO2X Search TA2O51+XTIO2X

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 19118 METAL INSULATOR METAL MIM CAPACITOR//METAL INSULATOR METAL MIM//VOLTAGE COEFFICIENT OF CAPACITANCE VCC
2 116 HFO2//HIGH K DIELECTRICS//HIGH K
3 36376 AUTOCLONING//PHOTON LATTICE INC//TA2O5 SIO2
4 13372 NIOBIUM OXIDE//NB2O5//NIOBIUM PENTOXIDE
5 21470 PLASMA ION ASSISTED DEPOSITION//ECR ION BEAM PROCESSING//FAR UV REFLECTANCE
6 17999 RUTHENIUM FILMS//RUO2//RU
7 3456 DIFFUSION BARRIER//CU METALLIZATION//TANTALUM NITRIDE
8 15246 PRASEODYMIUM OXIDE//DIELECTRIC PHENOMENA//ELECT MAT DEVICES
9 32754 LAOF//RARE EARTH OXIDE FLUORIDES//EUOF
10 18174 REANODIZATION//BISMUTH OXIDE FILMS//METAL PASSIVITY

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