Class information for: |
Basic class information |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
| Cluster id | Level | Cluster label | #P |
|---|---|---|---|
| 1 | 4 | PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY | 2188495 |
| 13 | 3 | PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON | 136516 |
| 1628 | 2 | HFO2//HIGH K DIELECTRICS//HIGH K | 7266 |
| 9993 | 1 | TANTALUM OXIDE//TA2O5//TANTALUM PENTOXIDE | 1133 |
Terms with highest relevance score |
| rank | Category | termType | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|---|
| 1 | TANTALUM OXIDE | authKW | 596437 | 7% | 27% | 79 |
| 2 | TA2O5 | authKW | 518134 | 6% | 27% | 70 |
| 3 | TANTALUM PENTOXIDE | authKW | 511063 | 4% | 44% | 42 |
| 4 | TANTALUM PENTOXIDE TA2O5 | authKW | 240401 | 1% | 79% | 11 |
| 5 | TANTALUM OXIDE FILMS | authKW | 170368 | 1% | 88% | 7 |
| 6 | TA2O5 THIN FILMS | authKW | 136292 | 1% | 70% | 7 |
| 7 | HIGH K STACK | authKW | 125167 | 1% | 75% | 6 |
| 8 | TANTALUM ETHOXIDE | authKW | 125167 | 1% | 75% | 6 |
| 9 | TANTALUM OXYNITRIDE | authKW | 125155 | 1% | 38% | 12 |
| 10 | TA2O51 XTIO2X | authKW | 111262 | 0% | 100% | 4 |
Web of Science journal categories |
| chi_square_rank | Category | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | Materials Science, Coatings & Films | 8603 | 20% | 0% | 227 |
| 2 | Physics, Applied | 8006 | 54% | 0% | 609 |
| 3 | Materials Science, Multidisciplinary | 1862 | 30% | 0% | 344 |
| 4 | Physics, Condensed Matter | 1647 | 21% | 0% | 242 |
| 5 | Engineering, Electrical & Electronic | 765 | 17% | 0% | 197 |
| 6 | Electrochemistry | 727 | 7% | 0% | 84 |
| 7 | Nanoscience & Nanotechnology | 535 | 8% | 0% | 95 |
| 8 | Materials Science, Ceramics | 276 | 3% | 0% | 39 |
| 9 | Chemistry, Physical | 221 | 12% | 0% | 140 |
| 10 | Optics | 82 | 5% | 0% | 57 |
Address terms |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | MEDTRON ENERGY COMPONENTS | 55631 | 0% | 100% | 2 |
| 2 | SCI TECHNOL SYNTH GROWTH ANAL ELECT MAT | 41720 | 0% | 50% | 3 |
| 3 | ADV INTERCONNECTS SYST TECHNOL | 37086 | 0% | 67% | 2 |
| 4 | DPT MATIERE CONDENSEE MAT FONCT | 37086 | 0% | 67% | 2 |
| 5 | ADV PROC INTEGRAT NAKAHARA KU | 27816 | 0% | 100% | 1 |
| 6 | CVD BUSINESS UNIT | 27816 | 0% | 100% | 1 |
| 7 | DIELE ETCH ENGN GRP | 27816 | 0% | 100% | 1 |
| 8 | ELE ON DEVICES BUSINESS UNIT | 27816 | 0% | 100% | 1 |
| 9 | ELECT ENGN MYONGJI PHOTON ELECT EMBEDDED S | 27816 | 0% | 100% | 1 |
| 10 | ENSEEGSIM | 27816 | 0% | 100% | 1 |
Journals |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | THIN SOLID FILMS | 4408 | 7% | 0% | 77 |
| 2 | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 3394 | 5% | 0% | 62 |
| 3 | MICROELECTRONICS RELIABILITY | 2510 | 2% | 0% | 26 |
| 4 | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2162 | 4% | 0% | 50 |
| 5 | APPLIED SURFACE SCIENCE | 1830 | 4% | 0% | 50 |
| 6 | JOURNAL OF APPLIED PHYSICS | 1241 | 6% | 0% | 72 |
| 7 | IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART B-ADVANCED PACKAGING | 1154 | 0% | 1% | 4 |
| 8 | MICROELECTRONIC ENGINEERING | 1149 | 2% | 0% | 21 |
| 9 | ADVANCED MATERIALS FOR OPTICS AND ELECTRONICS | 1087 | 0% | 1% | 3 |
| 10 | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 934 | 1% | 0% | 11 |
Author Key Words |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass | LCSH search | Wikipedia search |
|---|---|---|---|---|---|---|---|
| 1 | TANTALUM OXIDE | 596437 | 7% | 27% | 79 | Search TANTALUM+OXIDE | Search TANTALUM+OXIDE |
| 2 | TA2O5 | 518134 | 6% | 27% | 70 | Search TA2O5 | Search TA2O5 |
| 3 | TANTALUM PENTOXIDE | 511063 | 4% | 44% | 42 | Search TANTALUM+PENTOXIDE | Search TANTALUM+PENTOXIDE |
| 4 | TANTALUM PENTOXIDE TA2O5 | 240401 | 1% | 79% | 11 | Search TANTALUM+PENTOXIDE+TA2O5 | Search TANTALUM+PENTOXIDE+TA2O5 |
| 5 | TANTALUM OXIDE FILMS | 170368 | 1% | 88% | 7 | Search TANTALUM+OXIDE+FILMS | Search TANTALUM+OXIDE+FILMS |
| 6 | TA2O5 THIN FILMS | 136292 | 1% | 70% | 7 | Search TA2O5+THIN+FILMS | Search TA2O5+THIN+FILMS |
| 7 | HIGH K STACK | 125167 | 1% | 75% | 6 | Search HIGH+K+STACK | Search HIGH+K+STACK |
| 8 | TANTALUM ETHOXIDE | 125167 | 1% | 75% | 6 | Search TANTALUM+ETHOXIDE | Search TANTALUM+ETHOXIDE |
| 9 | TANTALUM OXYNITRIDE | 125155 | 1% | 38% | 12 | Search TANTALUM+OXYNITRIDE | Search TANTALUM+OXYNITRIDE |
| 10 | TA2O51 XTIO2X | 111262 | 0% | 100% | 4 | Search TA2O51+XTIO2X | Search TA2O51+XTIO2X |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Classes with closest relation at Level 1 |