Class information for:
Level 1: NANOSYST MFG//ION PROJECTION//NANOELECT PROC IL

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
8 4 POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY 1554940
397 3       JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//NANOSCIENCE & NANOTECHNOLOGY 32153
806 2             JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//CHEMICALLY AMPLIFIED RESIST//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 12229
29393 1                   NANOSYST MFG//ION PROJECTION//NANOELECT PROC IL 204

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 NANOSYST MFG address 926967 3% 100% 6
2 ION PROJECTION authKW 429147 2% 56% 5
3 NANOELECT PROC IL address 231739 1% 50% 3
4 MASKLESS IMPLANTATION authKW 205991 1% 67% 2
5 ION PROJECTION LITHOGRAPHY authKW 173803 1% 38% 3
6 CYCLOTRON SLOVAK REPUBL address 154494 0% 100% 1
7 DEEP PATTERN TRANSFER authKW 154494 0% 100% 1
8 E BEAM LITHOGRAPHY EEL authKW 154494 0% 100% 1
9 GE SB TE PHASE CHANGE ALLOYS authKW 154494 0% 100% 1
10 HALL EFFECT ANOMALOUS authKW 154494 0% 100% 1

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Nanoscience & Nanotechnology 5769 57% 0% 117
2 Physics, Applied 2609 71% 0% 145
3 Engineering, Electrical & Electronic 2506 64% 0% 131
4 Instruments & Instrumentation 569 17% 0% 35
5 Optics 529 22% 0% 45
6 Nuclear Science & Technology 357 13% 0% 26
7 Physics, Nuclear 108 7% 0% 15
8 Physics, Atomic, Molecular & Chemical 34 6% 0% 13
9 Telecommunications 22 3% 0% 7
10 Spectroscopy 9 2% 0% 5

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 NANOSYST MFG 926967 3% 100% 6
2 NANOELECT PROC IL 231739 1% 50% 3
3 CYCLOTRON SLOVAK REPUBL 154494 0% 100% 1
4 HL LITHO 154494 0% 100% 1
5 IONEN MIKROFABRIKAT SYST GMBH 154494 0% 100% 1
6 NANOMAGENT SYST 154494 0% 100% 1
7 UNIT B4 154494 0% 100% 1
8 PHYS MIT IONENSTRAHLEN 51497 0% 33% 1
9 PHYS IONENSTRAHLEN 47674 2% 6% 5
10 INTEGRATED NANO SYST 38622 0% 25% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 43963 34% 0% 69
2 MICROELECTRONIC ENGINEERING 22728 19% 0% 39
3 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH 2070 3% 0% 6
4 RADIOTEKHNIKA I ELEKTRONIKA 1725 3% 0% 7
5 KVANTOVAYA ELEKTRONIKA 1147 3% 0% 7
6 NUCLEAR INSTRUMENTS & METHODS 1057 1% 0% 3
7 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 680 6% 0% 12
8 AEU-ARCHIV FUR ELEKTRONIK UND UBERTRAGUNGSTECHNIK-INTERNATIONAL JOURNAL OF ELECTRONICS AND COMMUNICATIONS 426 0% 0% 1
9 TECHNICAL PHYSICS 234 1% 0% 3
10 IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA 183 1% 0% 2

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 ION PROJECTION 429147 2% 56% 5 Search ION+PROJECTION Search ION+PROJECTION
2 MASKLESS IMPLANTATION 205991 1% 67% 2 Search MASKLESS+IMPLANTATION Search MASKLESS+IMPLANTATION
3 ION PROJECTION LITHOGRAPHY 173803 1% 38% 3 Search ION+PROJECTION+LITHOGRAPHY Search ION+PROJECTION+LITHOGRAPHY
4 DEEP PATTERN TRANSFER 154494 0% 100% 1 Search DEEP+PATTERN+TRANSFER Search DEEP+PATTERN+TRANSFER
5 E BEAM LITHOGRAPHY EEL 154494 0% 100% 1 Search E+BEAM+LITHOGRAPHY+EEL Search E+BEAM+LITHOGRAPHY+EEL
6 GE SB TE PHASE CHANGE ALLOYS 154494 0% 100% 1 Search GE+SB+TE+PHASE+CHANGE+ALLOYS Search GE+SB+TE+PHASE+CHANGE+ALLOYS
7 HALL EFFECT ANOMALOUS 154494 0% 100% 1 Search HALL+EFFECT+ANOMALOUS Search HALL+EFFECT+ANOMALOUS
8 ION BEAM IMPRINTING 154494 0% 100% 1 Search ION+BEAM+IMPRINTING Search ION+BEAM+IMPRINTING
9 ION BEAM PROXIMITY LITHOGRAPHY IBL 154494 0% 100% 1 Search ION+BEAM+PROXIMITY+LITHOGRAPHY+IBL Search ION+BEAM+PROXIMITY+LITHOGRAPHY+IBL
10 PLASMA ASSISTED THIN FILM DEPOSITION 154494 0% 100% 1 Search PLASMA+ASSISTED+THIN+FILM+DEPOSITION Search PLASMA+ASSISTED+THIN+FILM+DEPOSITION

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 7908 LIQUID METAL ION SOURCE//ION BEAMS MAT//ALLOY LIQUID METAL ION SOURCES
2 26014 STENCIL LITHOGRAPHY//STRESS INDUCED DEFORMATION//RESIST SPRAY COATING
3 5372 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//PROXIMITY EFFECT CORRECTION//ELECTRON BEAM LITHOGRAPHY
4 18552 PROTON BEAM WRITING//ION BEAM PLICAT//PROBE FORMING SYSTEM
5 10655 X RAY MASK//X RAY LITHOGRAPHY//SR LITHOGRAPHY
6 37929 ZHURNAL TEKHNICHESKOI FIZIKI//RADIOTEKHNIKA I ELEKTRONIKA//TELECOMMUNICATIONS
7 21365 UPR 6412//PT CR CO MULTILAYER//COCRPT TERNARY ALLOY
8 30672 GAAS MMIC//POWER SENSOR//MICROWAVE POWER SENSOR
9 6314 NUCLEAR MICROPROBE//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//PROTON MICROPROBE
10 2517 LINE EDGE ROUGHNESS//CHEMICALLY AMPLIFIED RESIST//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

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