Class information for:
Level 1: LIQUID METAL ION SOURCE//ION BEAMS MAT//ALLOY LIQUID METAL ION SOURCES

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
8 4 POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY 1554940
397 3       JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//NANOSCIENCE & NANOTECHNOLOGY 32153
806 2             JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//CHEMICALLY AMPLIFIED RESIST//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 12229
7908 1                   LIQUID METAL ION SOURCE//ION BEAMS MAT//ALLOY LIQUID METAL ION SOURCES 1338

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 LIQUID METAL ION SOURCE authKW 504701 2% 71% 30
2 ION BEAMS MAT address 117768 0% 100% 5
3 ALLOY LIQUID METAL ION SOURCES authKW 94214 0% 100% 4
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B journal 93492 19% 2% 258
5 FOCUSED ION BEAM authKW 74793 5% 5% 61
6 NERIME PROCESS authKW 70661 0% 100% 3
7 SECT PL PHYS address 56065 1% 24% 10
8 FEEP authKW 53833 0% 57% 4
9 BOOSTER PRINCIPLE authKW 47107 0% 100% 2
10 LIQUID METAL CONE authKW 47107 0% 100% 2

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 14806 66% 0% 888
2 Nanoscience & Nanotechnology 7324 26% 0% 346
3 Engineering, Electrical & Electronic 3097 30% 0% 396
4 Instruments & Instrumentation 1793 12% 0% 163
5 Microscopy 1532 4% 0% 50
6 Nuclear Science & Technology 903 8% 0% 110
7 Materials Science, Coatings & Films 615 5% 0% 71
8 Physics, Nuclear 592 7% 0% 91
9 Optics 413 9% 0% 116
10 Physics, Atomic, Molecular & Chemical 245 7% 0% 88

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ION BEAMS MAT 117768 0% 100% 5
2 SECT PL PHYS 56065 1% 24% 10
3 MICROENGN NANOTECHNOL GRP 26494 0% 38% 3
4 CINAM UNITE PROPRE RECH 3118 23554 0% 100% 1
5 DAVE 104 23554 0% 100% 1
6 ELECT ENGN RADIO 23554 0% 100% 1
7 ENGN MAT PHYS EMP 23554 0% 100% 1
8 INTEGRATED DEVICES CIRCUITS IDC 23554 0% 100% 1
9 IONENSTRAHLPHYS MAT FORSH 23554 0% 100% 1
10 LEHRSTUHL ANGEW FESTKORPHYS 23554 0% 100% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 93492 19% 2% 258
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY 9610 2% 2% 22
3 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 6925 4% 0% 60
4 MICROELECTRONIC ENGINEERING 6806 4% 1% 55
5 JOURNAL DE PHYSIQUE 5410 4% 0% 47
6 VACUUM 4835 3% 0% 45
7 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 4267 6% 0% 77
8 PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS 3384 2% 1% 28
9 ULTRAMICROSCOPY 2969 2% 0% 27
10 JOURNAL OF PHYSICS D-APPLIED PHYSICS 2770 4% 0% 51

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 LIQUID METAL ION SOURCE 504701 2% 71% 30 Search LIQUID+METAL+ION+SOURCE Search LIQUID+METAL+ION+SOURCE
2 ALLOY LIQUID METAL ION SOURCES 94214 0% 100% 4 Search ALLOY+LIQUID+METAL+ION+SOURCES Search ALLOY+LIQUID+METAL+ION+SOURCES
3 FOCUSED ION BEAM 74793 5% 5% 61 Search FOCUSED+ION+BEAM Search FOCUSED+ION+BEAM
4 NERIME PROCESS 70661 0% 100% 3 Search NERIME+PROCESS Search NERIME+PROCESS
5 FEEP 53833 0% 57% 4 Search FEEP Search FEEP
6 BOOSTER PRINCIPLE 47107 0% 100% 2 Search BOOSTER+PRINCIPLE Search BOOSTER+PRINCIPLE
7 LIQUID METAL CONE 47107 0% 100% 2 Search LIQUID+METAL+CONE Search LIQUID+METAL+CONE
8 TIN LIQUID METAL ION SOURCE 47107 0% 100% 2 Search TIN+LIQUID+METAL+ION+SOURCE Search TIN+LIQUID+METAL+ION+SOURCE
9 WRITING IMPLANTATION 47107 0% 100% 2 Search WRITING+IMPLANTATION Search WRITING+IMPLANTATION
10 3 DIMENSIONAL DEVICES 23554 0% 100% 1 Search 3+DIMENSIONAL+DEVICES Search 3+DIMENSIONAL+DEVICES

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 29393 NANOSYST MFG//ION PROJECTION//NANOELECT PROC IL
2 4286 ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ION BEAM//FOCUSED ELECTRON BEAM INDUCED DEPOSITION
3 29894 LEHRSTUHL ADHAS INTERPHASEN POLYMEREN//UNITE MICROELECT OPTOELECT POLYMERE//UNITE MICROELECT OPTOELECT POLYME
4 20489 PROD DESIGN TECHNOL//MAGNETIC LENS//ELECTRON GUN
5 35843 EXCIMER LASER MODIFICATION//AL ANODIZING//AMBIENT GAS SENSITIVITY
6 18815 SINGLE ATOM TIP//SUR E MODIFICAT//FACETING
7 5372 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//PROXIMITY EFFECT CORRECTION//ELECTRON BEAM LITHOGRAPHY
8 16981 TECHNICAL PHYSICS//ELECTROCAPILLARY WAVES//MATERIAL MEDIUM
9 19639 SIMS MICROSCOPY//ION MICROSCOPY//ANALYTICAL ION MICROSCOPY
10 6185 ELECTROSPRAY//ELECTROHYDRODYNAMIC ATOMIZATION//ELECTROSTATIC ATOMIZATION

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