Class information for:
Level 1: ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ION BEAM//FOCUSED ELECTRON BEAM INDUCED DEPOSITION

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
8 4 POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY 1554940
397 3       JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//NANOSCIENCE & NANOTECHNOLOGY 32153
806 2             JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//CHEMICALLY AMPLIFIED RESIST//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 12229
4286 1                   ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ION BEAM//FOCUSED ELECTRON BEAM INDUCED DEPOSITION 1846

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ELECTRON BEAM INDUCED DEPOSITION authKW 1019288 5% 70% 85
2 FOCUSED ION BEAM authKW 680398 12% 18% 216
3 FOCUSED ELECTRON BEAM INDUCED DEPOSITION authKW 550319 2% 92% 35
4 HIGH VOLTAGE ELE ON MICROSCOPY STN address 221693 2% 38% 34
5 HELIUM ION MICROSCOPE authKW 205557 1% 71% 17
6 FIB authKW 199489 4% 14% 82
7 FIB CVD authKW 187784 1% 100% 11
8 FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION FIB CVD authKW 158891 1% 85% 11
9 FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION authKW 153642 0% 100% 9
10 HELIUM ION MICROSCOPY authKW 153035 1% 39% 23

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Nanoscience & Nanotechnology 27714 42% 0% 777
2 Microscopy 21218 12% 1% 214
3 Physics, Applied 17180 61% 0% 1129
4 Engineering, Electrical & Electronic 3487 27% 0% 499
5 Materials Science, Multidisciplinary 3015 30% 0% 559
6 Materials Science, Coatings & Films 811 5% 0% 96
7 Instruments & Instrumentation 808 7% 0% 136
8 Optics 386 7% 0% 137
9 Physics, Condensed Matter 359 9% 0% 173
10 Nuclear Science & Technology 141 3% 0% 61

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 HIGH VOLTAGE ELE ON MICROSCOPY STN 221693 2% 38% 34
2 LASTI 83911 2% 17% 29
3 NANOMECH NANOPATTERNING GRP 68285 0% 100% 4
4 ELE ON MICROSCOPY NANOANAL 63194 1% 19% 20
5 CRANN ADV MICROSCOPY 53344 0% 63% 5
6 INNOVAT MFG SYST TECHNOL 45521 0% 67% 4
7 PRECIS ENGN NANOTECHNOL 45306 1% 15% 18
8 ALIS BUSINESS UNIT 39017 0% 57% 4
9 CARL ZEISS MICROSCOPY 38409 0% 75% 3
10 HIGH VOLTAGE ELECT MICROSCOPY STN 34844 0% 29% 7

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 89701 16% 2% 297
2 NANOTECHNOLOGY 22009 7% 1% 135
3 MICROELECTRONIC ENGINEERING 19830 6% 1% 110
4 MICROSCOPY AND MICROANALYSIS 16178 2% 2% 42
5 PRAKTISCHE METALLOGRAPHIE-PRACTICAL METALLOGRAPHY 13935 1% 4% 23
6 BEILSTEIN JOURNAL OF NANOTECHNOLOGY 9008 1% 2% 25
7 SCANNING 6713 1% 2% 26
8 JOURNAL OF ELECTRON MICROSCOPY 5712 1% 1% 25
9 ULTRAMICROSCOPY 3407 2% 1% 34
10 MICRON 3180 1% 1% 22

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 ELECTRON BEAM INDUCED DEPOSITION 1019288 5% 70% 85 Search ELECTRON+BEAM+INDUCED+DEPOSITION Search ELECTRON+BEAM+INDUCED+DEPOSITION
2 FOCUSED ION BEAM 680398 12% 18% 216 Search FOCUSED+ION+BEAM Search FOCUSED+ION+BEAM
3 FOCUSED ELECTRON BEAM INDUCED DEPOSITION 550319 2% 92% 35 Search FOCUSED+ELECTRON+BEAM+INDUCED+DEPOSITION Search FOCUSED+ELECTRON+BEAM+INDUCED+DEPOSITION
4 HELIUM ION MICROSCOPE 205557 1% 71% 17 Search HELIUM+ION+MICROSCOPE Search HELIUM+ION+MICROSCOPE
5 FIB 199489 4% 14% 82 Search FIB Search FIB
6 FIB CVD 187784 1% 100% 11 Search FIB+CVD Search FIB+CVD
7 FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION FIB CVD 158891 1% 85% 11 Search FOCUSED+ION+BEAM+CHEMICAL+VAPOR+DEPOSITION+FIB+CVD Search FOCUSED+ION+BEAM+CHEMICAL+VAPOR+DEPOSITION+FIB+CVD
8 FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION 153642 0% 100% 9 Search FOCUSED+ION+BEAM+CHEMICAL+VAPOR+DEPOSITION Search FOCUSED+ION+BEAM+CHEMICAL+VAPOR+DEPOSITION
9 HELIUM ION MICROSCOPY 153035 1% 39% 23 Search HELIUM+ION+MICROSCOPY Search HELIUM+ION+MICROSCOPY
10 EBID 147540 1% 79% 11 Search EBID Search EBID

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 7908 LIQUID METAL ION SOURCE//ION BEAMS MAT//ALLOY LIQUID METAL ION SOURCES
2 29894 LEHRSTUHL ADHAS INTERPHASEN POLYMEREN//UNITE MICROELECT OPTOELECT POLYMERE//UNITE MICROELECT OPTOELECT POLYME
3 25087 NANOSKIVING//ULTRAMICROTOMY//LOW ANGLE ION MILLING
4 17111 LIQUID CELL TEM//ENVIRONMENTAL TEM//ENVIRONMENTAL CELL
5 21343 ELECTRON TOMOGRAPHY//3D CHEMICAL ANALYSIS//3D MICROANALYSIS
6 22655 CARBON NANOTUBE TIPS//SPM TIP//CARBON NANOTUBE PROBES
7 28240 HSQ//HYDROGEN SILSESQUIOXANE//HYDROGEN SILSESQUIOXANE HSQ
8 7967 ION SPUTTERING//NANORIPPLES//RIPPLES
9 21365 UPR 6412//PT CR CO MULTILAYER//COCRPT TERNARY ALLOY
10 10511 LAMACOP//SECONDARY ELECTRON EMISSION//DOPANT CONTRAST

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