Class information for:
Level 1: X RAY MASK//X RAY LITHOGRAPHY//SR LITHOGRAPHY

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
8 4 POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY 1554940
397 3       JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//NANOSCIENCE & NANOTECHNOLOGY 32153
806 2             JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//CHEMICALLY AMPLIFIED RESIST//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 12229
10655 1                   X RAY MASK//X RAY LITHOGRAPHY//SR LITHOGRAPHY 1074

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 X RAY MASK authKW 1469177 6% 76% 66
2 X RAY LITHOGRAPHY authKW 1217464 9% 41% 100
3 SR LITHOGRAPHY authKW 432146 2% 82% 18
4 SUPER FINE SR LITHOG address 354218 1% 93% 13
5 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B journal 292068 38% 2% 408
6 MASK CONTRAST authKW 205406 1% 100% 7
7 MICROFABRICAT TECHNOL address 179728 1% 88% 7
8 DOSE MARGIN authKW 176062 1% 100% 6
9 X RAY MASK MEMBRANE authKW 146718 0% 100% 5
10 XRAY LITHOG address 140835 1% 40% 12

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Nanoscience & Nanotechnology 21234 48% 0% 517
2 Physics, Applied 16209 77% 0% 826
3 Engineering, Electrical & Electronic 9943 56% 0% 603
4 Optics 1842 18% 0% 196
5 Instruments & Instrumentation 308 6% 0% 66
6 Spectroscopy 234 5% 0% 50
7 Nuclear Science & Technology 67 3% 0% 33
8 Physics, Nuclear 47 3% 0% 29
9 Materials Science, Coatings & Films 34 2% 0% 19
10 Physics, Particles & Fields 30 3% 0% 29

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SUPER FINE SR LITHOG 354218 1% 93% 13
2 MICROFABRICAT TECHNOL 179728 1% 88% 7
3 XRAY LITHOG 140835 1% 40% 12
4 TELECOMMUN ENERGY S 97096 2% 14% 24
5 DEV OPERAT SEMICOND PROD 88031 0% 100% 3
6 POSTECH ADV LITHOG 78247 0% 67% 4
7 NANOTECHNOL ADV SYST S 46945 0% 40% 4
8 QUANTUM EQUIPMENT TECHNOL 43145 0% 29% 5
9 SYST ELECT S 40252 2% 8% 18
10 ASSOC SUPER ADV ELECT TECHNOL 33522 1% 14% 8

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 292068 38% 2% 408
2 MICROELECTRONIC ENGINEERING 25513 9% 1% 95
3 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 25028 15% 1% 163
4 NTT REVIEW 12011 1% 3% 13
5 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY 4173 1% 1% 13
6 SOLID STATE TECHNOLOGY 4009 1% 1% 16
7 BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING 3022 0% 2% 5
8 PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS 2369 2% 0% 21
9 IBM JOURNAL OF RESEARCH AND DEVELOPMENT 1179 1% 0% 9
10 NEC RESEARCH & DEVELOPMENT 1069 0% 1% 4

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 X RAY MASK 1469177 6% 76% 66 Search X+RAY+MASK Search X+RAY+MASK
2 X RAY LITHOGRAPHY 1217464 9% 41% 100 Search X+RAY+LITHOGRAPHY Search X+RAY+LITHOGRAPHY
3 SR LITHOGRAPHY 432146 2% 82% 18 Search SR+LITHOGRAPHY Search SR+LITHOGRAPHY
4 MASK CONTRAST 205406 1% 100% 7 Search MASK+CONTRAST Search MASK+CONTRAST
5 DOSE MARGIN 176062 1% 100% 6 Search DOSE+MARGIN Search DOSE+MARGIN
6 X RAY MASK MEMBRANE 146718 0% 100% 5 Search X+RAY+MASK+MEMBRANE Search X+RAY+MASK+MEMBRANE
7 X RAY STEPPER 117375 0% 100% 4 Search X+RAY+STEPPER Search X+RAY+STEPPER
8 EXPOSURE LATITUDE 96028 1% 55% 6 Search EXPOSURE+LATITUDE Search EXPOSURE+LATITUDE
9 LINEWIDTH CONTROL 93898 0% 80% 4 Search LINEWIDTH+CONTROL Search LINEWIDTH+CONTROL
10 PATTERN PLACEMENT ACCURACY 93898 0% 80% 4 Search PATTERN+PLACEMENT+ACCURACY Search PATTERN+PLACEMENT+ACCURACY

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 29393 NANOSYST MFG//ION PROJECTION//NANOELECT PROC IL
2 5372 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//PROXIMITY EFFECT CORRECTION//ELECTRON BEAM LITHOGRAPHY
3 7011 SOLID STATE TECHNOLOGY//DRY DEVELOPMENT//PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
4 10740 SU 8//MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS//LIGA
5 34920 KINEMATIC COUPLING//EXACT CONSTRAINT//MO EXPOSURE OPTICS
6 2517 LINE EDGE ROUGHNESS//CHEMICALLY AMPLIFIED RESIST//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
7 33006 ADV SCI TECHNOL IND//HELICAL PATTERN//LASER SCAN LITHOGRAPHY
8 8822 OPTICAL LITHOGRAPHY//OPTICAL PROXIMITY CORRECTION//PHASE SHIFTING MASK
9 29283 BIOMACHINING//MATRIX EXPOSURE//MASKLESS LITHOGRAPHY
10 32332 SEMIDERIVATIVE REAL FILTERS//VISUALIZATION OF PHASE OBJECTS//3 D MODELS FOR STRUCTURES AND FAULTS

Go to start page