Class information for:
Level 1: BIOMACHINING//MATRIX EXPOSURE//MASKLESS LITHOGRAPHY

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
8 4 POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY 1554940
397 3       JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//NANOSCIENCE & NANOTECHNOLOGY 32153
2484 2             TWO PHOTON POLYMERIZATION//MICROLENS ARRAY//MICROLENS 4177
29283 1                   BIOMACHINING//MATRIX EXPOSURE//MASKLESS LITHOGRAPHY 207

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 BIOMACHINING authKW 1755410 7% 82% 14
2 MATRIX EXPOSURE authKW 913532 3% 100% 6
3 MASKLESS LITHOGRAPHY authKW 845576 9% 29% 19
4 OPTICAL MASKLESS LITHOGRAPHY authKW 456766 1% 100% 3
5 RETICLELESS EXPOSURE authKW 456766 1% 100% 3
6 PROJECTION EXPOSURE authKW 380633 2% 50% 5
7 LIGHT VALVE DISPLAYS authKW 342573 1% 75% 3
8 CODE MARK authKW 304511 1% 100% 2
9 DEFORMABLE VISCOELASTIC LAYERS authKW 304511 1% 100% 2
10 MASKLESS DIRECT WRITE LITHOGRAPHY authKW 304511 1% 100% 2

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Optics 2249 43% 0% 90
2 Nanoscience & Nanotechnology 1388 29% 0% 59
3 Engineering, Electrical & Electronic 1007 42% 0% 86
4 Physics, Applied 549 34% 0% 71
5 Engineering, Manufacturing 174 5% 0% 11
6 Instruments & Instrumentation 116 8% 0% 17
7 COMPUTER APPLICATIONS & CYBERNETICS 56 0% 0% 1
8 Engineering, Mechanical 48 6% 0% 12
9 Materials Science, Multidisciplinary 43 14% 0% 28
10 GREEN & SUSTAINABLE SCIENCE & TECHNOLOGY 36 2% 0% 4

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ROBOT SYST ENGN 288476 3% 32% 6
2 AMSTA AR CCL EW 152255 0% 100% 1
3 CINDER CCT LA PLATA CONICET 152255 0% 100% 1
4 DEVICE HARDWARE 152255 0% 100% 1
5 GRP ECOL TELECOMM 152255 0% 100% 1
6 NACL SOLUC BIOMIMET DIAGNOST TER IA 152255 0% 100% 1
7 NONDESTRUCT TEST NAN CHANG 152255 0% 100% 1
8 PL MAT MASK BUSINESS GRP 152255 0% 100% 1
9 SUR E MOUNTING TECHNOL 152255 0% 100% 1
10 VIS SYST MACHINE INTELLIGENCE 152255 0% 100% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MICROELECTRONIC ENGINEERING 13239 14% 0% 30
2 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 12241 4% 1% 9
3 NTZ ARCHIV 6211 1% 2% 2
4 JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS 5633 1% 1% 3
5 DISPLAYS 3689 2% 0% 5
6 OPTICAL REVIEW 2580 3% 0% 6
7 JOURNAL OF THE OPTICAL SOCIETY OF KOREA 1751 1% 0% 3
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 1517 6% 0% 13
9 VYSOKOMOLEKULYARNYE SOEDINENIYA SERIYA A 1239 3% 0% 6
10 INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING 1145 2% 0% 4

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 BIOMACHINING 1755410 7% 82% 14 Search BIOMACHINING Search BIOMACHINING
2 MATRIX EXPOSURE 913532 3% 100% 6 Search MATRIX+EXPOSURE Search MATRIX+EXPOSURE
3 MASKLESS LITHOGRAPHY 845576 9% 29% 19 Search MASKLESS+LITHOGRAPHY Search MASKLESS+LITHOGRAPHY
4 OPTICAL MASKLESS LITHOGRAPHY 456766 1% 100% 3 Search OPTICAL+MASKLESS+LITHOGRAPHY Search OPTICAL+MASKLESS+LITHOGRAPHY
5 RETICLELESS EXPOSURE 456766 1% 100% 3 Search RETICLELESS+EXPOSURE Search RETICLELESS+EXPOSURE
6 PROJECTION EXPOSURE 380633 2% 50% 5 Search PROJECTION+EXPOSURE Search PROJECTION+EXPOSURE
7 LIGHT VALVE DISPLAYS 342573 1% 75% 3 Search LIGHT+VALVE+DISPLAYS Search LIGHT+VALVE+DISPLAYS
8 CODE MARK 304511 1% 100% 2 Search CODE+MARK Search CODE+MARK
9 DEFORMABLE VISCOELASTIC LAYERS 304511 1% 100% 2 Search DEFORMABLE+VISCOELASTIC+LAYERS Search DEFORMABLE+VISCOELASTIC+LAYERS
10 MASKLESS DIRECT WRITE LITHOGRAPHY 304511 1% 100% 2 Search MASKLESS+DIRECT+WRITE+LITHOGRAPHY Search MASKLESS+DIRECT+WRITE+LITHOGRAPHY

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 8212 MICROLENS ARRAY//MICROLENS//MICRO OPTICS
2 38516 VERTICAL DESCENT METHOD//BEREICH BIOMATERIALIEN//COMP SIBERIAN
3 5372 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//PROXIMITY EFFECT CORRECTION//ELECTRON BEAM LITHOGRAPHY
4 8822 OPTICAL LITHOGRAPHY//OPTICAL PROXIMITY CORRECTION//PHASE SHIFTING MASK
5 30750 ADAPTIVE OTSUS METHOD//ADV IMAGING METHODOL CONSULTAT//COHERENCE MODIFICATION
6 38450 ANGIOGENETIC RATIO//CHAIR CONSERVAT DENT PERIODONTOL//DILATION OF VESSELS
7 10740 SU 8//MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS//LIGA
8 33006 ADV SCI TECHNOL IND//HELICAL PATTERN//LASER SCAN LITHOGRAPHY
9 27054 DROPWISE CLUSTER//HETEROADAGULATION//RAS SIBERIAN BRANCH
10 30509 DIVINYLAROMATIC ETHERS//AKIMOV GELENDZHIK CLIMAT TESTS//ANISOTROPIC COMPOSITE RING

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