Class information for: |
Basic class information |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
| Cluster id | Level | Cluster label | #P |
|---|---|---|---|
| 1 | 4 | PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY | 2188495 |
| 390 | 3 | SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS | 32897 |
| 276 | 2 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS//SENSORS AND ACTUATORS A-PHYSICAL | 19184 |
| 36781 | 1 | UV LED LITHOGRAPHY//MICROSISTEMAS NANOTECNOL//AUTOCENTERED | 93 |
Terms with highest relevance score |
| rank | Category | termType | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|---|
| 1 | UV LED LITHOGRAPHY | authKW | 1016680 | 3% | 100% | 3 |
| 2 | MICROSISTEMAS NANOTECNOL | address | 451857 | 2% | 67% | 2 |
| 3 | AUTOCENTERED | authKW | 338893 | 1% | 100% | 1 |
| 4 | COMPUTER NUMERICAL CONTROL CNC LITHOGRAPHY | authKW | 338893 | 1% | 100% | 1 |
| 5 | ELECT COMP IIT | address | 338893 | 1% | 100% | 1 |
| 6 | ENGN SISTEMAS COMPUTADO MIRCOSISTEMAS | address | 338893 | 1% | 100% | 1 |
| 7 | HIGH KAPPA HFO2 | authKW | 338893 | 1% | 100% | 1 |
| 8 | INTEGRATED MAGNETIC DETECTION | authKW | 338893 | 1% | 100% | 1 |
| 9 | LIGHT MOTION SYNCHRONIZED | authKW | 338893 | 1% | 100% | 1 |
| 10 | LOW COST LITHOGRAPHY | authKW | 338893 | 1% | 100% | 1 |
Web of Science journal categories |
| chi_square_rank | Category | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | Physics, Applied | 1342 | 75% | 0% | 70 |
| 2 | Nanoscience & Nanotechnology | 1175 | 39% | 0% | 36 |
| 3 | Engineering, Electrical & Electronic | 514 | 44% | 0% | 41 |
| 4 | Optics | 204 | 20% | 0% | 19 |
| 5 | Instruments & Instrumentation | 196 | 15% | 0% | 14 |
| 6 | Materials Science, Multidisciplinary | 163 | 31% | 0% | 29 |
| 7 | Materials Science, Coatings & Films | 156 | 10% | 0% | 9 |
| 8 | Materials Science, Ceramics | 89 | 6% | 0% | 6 |
| 9 | Physics, Condensed Matter | 82 | 17% | 0% | 16 |
| 10 | Mechanics | 15 | 5% | 0% | 5 |
Address terms |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | MICROSISTEMAS NANOTECNOL | 451857 | 2% | 67% | 2 |
| 2 | ELECT COMP IIT | 338893 | 1% | 100% | 1 |
| 3 | ENGN SISTEMAS COMPUTADO MIRCOSISTEMAS | 338893 | 1% | 100% | 1 |
| 4 | ELECT COMP SYST ENGN DISCIPLINE | 169446 | 1% | 50% | 1 |
| 5 | MIRCROENGN IMT | 169446 | 1% | 50% | 1 |
| 6 | ENGN ADV ENGN PLATFORM | 42360 | 1% | 13% | 1 |
| 7 | ENGN SISTEMAS COMPUTADO | 30807 | 1% | 9% | 1 |
| 8 | GRP NANOMAT LICATS | 28239 | 1% | 8% | 1 |
| 9 | EA 2081 | 24205 | 1% | 7% | 1 |
| 10 | BIOENGN CHEM | 19933 | 1% | 6% | 1 |
Journals |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | MICROELECTRONIC ENGINEERING | 7370 | 16% | 0% | 15 |
| 2 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1952 | 4% | 0% | 4 |
| 3 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1482 | 5% | 0% | 5 |
| 4 | JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 1343 | 2% | 0% | 2 |
| 5 | JOURNAL OF NON-CRYSTALLINE SOLIDS | 521 | 6% | 0% | 6 |
| 6 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 498 | 5% | 0% | 5 |
| 7 | APPLIED PHYSICS LETTERS | 356 | 12% | 0% | 11 |
| 8 | THIN SOLID FILMS | 325 | 6% | 0% | 6 |
| 9 | VACUUM | 309 | 3% | 0% | 3 |
| 10 | BIOMICROFLUIDICS | 276 | 1% | 0% | 1 |
Author Key Words |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Classes with closest relation at Level 1 |