Class information for:
Level 2: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS//SENSORS AND ACTUATORS A-PHYSICAL

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
390 3       SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS 32897
276 2             JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS//SENSORS AND ACTUATORS A-PHYSICAL 19184
1030 1                   OPTOMECHANICS//CAVITY OPTOMECHANICS//OPTOMECHANICAL SYSTEM 2923
2660 1                   MICROCANTILEVER//CANTILEVER//CANTILEVER SENSOR 2212
3694 1                   MICROMIRROR//JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//VARIABLE OPTICAL ATTENUATOR VOA 1964
4711 1                   MEMS GYROSCOPE//GYROSCOPE//ANGULAR RATE SENSOR 1764
5443 1                   BULGE TEST//STRIP BENDING TEST//SINGLE CRYSTAL SILICON 1654
6213 1                   PULL IN INSTABILITY//PULL IN//ELECTROSTATIC ACTUATION 1540
8623 1                   RF MEMS//DIELECTRIC CHARGING//RF MEMS SWITCH 1266
9903 1                   PRESSURE SENSOR//PIEZORESISTANCE//CAPACITIVE PRESSURE SENSOR 1142
11456 1                   THERMOELASTIC DAMPING//MEMS RESONATOR//MICROMECHANICAL RESONATORS 1008
12235 1                   ANISOTROPIC ETCHING//MICRONANOSYST ENGN//MEMS MICRO NANO SYST 951
12713 1                   MICROBOLOMETER//OPTICAL READOUT//THERMOPILE 916
22863 1                   RESONANT PRESSURE SENSOR//PHOTOTHERMAL VIBRATION//SMALL MOTOR 388
23402 1                   MICROPHONE//SILICON MICROPHONE//CONDENSER MICROPHONE 370
23891 1                   INERTIAL SWITCH//ACCELERATION SWITCH//INERTIAL MICROSWITCH 354
26699 1                   NANOELECTROMECHANICAL NEM MEMORY//NANOELECTROMECHANICAL SYSTEMS NEMS//NANOELECTROMECHANICAL SWITCH 268
30041 1                   DIRECT PHASE COMPUTATION//MACHINE DESIGN AUTOMOT ENGN//SAMARIUM TRIACETATE 191
30672 1                   GAAS MMIC//POWER SENSOR//MICROWAVE POWER SENSOR 180
36781 1                   UV LED LITHOGRAPHY//MICROSISTEMAS NANOTECNOL//AUTOCENTERED 93

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS journal 713886 6% 40% 1098
2 MEMS authKW 626108 7% 30% 1282
3 SENSORS AND ACTUATORS A-PHYSICAL journal 551570 10% 18% 1844
4 JOURNAL OF MICROMECHANICS AND MICROENGINEERING journal 549164 7% 24% 1381
5 MICROCANTILEVER authKW 298234 2% 58% 314
6 MICROELECTROMECHANICAL SYSTEMS MEMS authKW 258484 2% 44% 361
7 INSTRUMENTS & INSTRUMENTATION WoSSC 212792 33% 2% 6384
8 MICROMIRROR authKW 211737 1% 64% 202
9 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS journal 189592 3% 18% 658
10 RF MEMS authKW 171540 1% 62% 169

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Instruments & Instrumentation 212792 33% 2% 6384
2 Engineering, Electrical & Electronic 111953 45% 1% 8672
3 Nanoscience & Nanotechnology 101859 25% 1% 4889
4 Physics, Applied 71318 40% 1% 7667
5 Mechanics 21234 12% 1% 2377
6 Materials Science, Multidisciplinary 15127 22% 0% 4281
7 Optics 12053 12% 0% 2241
8 Electrochemistry 2658 4% 0% 733
9 Engineering, Mechanical 2511 5% 0% 883
10 Physics, Multidisciplinary 1545 6% 0% 1121

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MEMS 65094 1% 19% 208
2 B2 33472 0% 58% 35
3 STATE TRANSDUCER TECHNOL 33378 1% 13% 164
4 SCI TECHNOL MICRO NANO FABRICAT 27057 0% 24% 70
5 MECH ENGN 25466 12% 1% 2315
6 SCI TECHNOL MICROSYST 22209 0% 32% 42
7 MICROELECT 21781 3% 3% 497
8 MICROELECT MICROSENSORS 21115 0% 37% 35
9 THOMAS J WATSON SR PL PHYS 20515 0% 48% 26
10 CHAIR MICROMECH 16072 0% 70% 14

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 713886 6% 40% 1098
2 SENSORS AND ACTUATORS A-PHYSICAL 551570 10% 18% 1844
3 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 549164 7% 24% 1381
4 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 189592 3% 18% 658
5 IEEE SENSORS JOURNAL 27481 2% 5% 332
6 SENSORS AND MATERIALS 22773 1% 11% 125
7 SENSORS AND ACTUATORS 22208 0% 14% 95
8 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 20996 1% 11% 114
9 SENSORS 11198 2% 2% 288
10 MICRO & NANO LETTERS 10266 1% 6% 106

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 MEMS 626108 7% 30% 1282 Search MEMS Search MEMS
2 MICROCANTILEVER 298234 2% 58% 314 Search MICROCANTILEVER Search MICROCANTILEVER
3 MICROELECTROMECHANICAL SYSTEMS MEMS 258484 2% 44% 361 Search MICROELECTROMECHANICAL+SYSTEMS+MEMS Search MICROELECTROMECHANICAL+SYSTEMS+MEMS
4 MICROMIRROR 211737 1% 64% 202 Search MICROMIRROR Search MICROMIRROR
5 RF MEMS 171540 1% 62% 169 Search RF+MEMS Search RF+MEMS
6 ELECTROSTATIC ACTUATION 156034 1% 68% 140 Search ELECTROSTATIC+ACTUATION Search ELECTROSTATIC+ACTUATION
7 PULL IN 120555 0% 84% 87 Search PULL+IN Search PULL+IN
8 CANTILEVER 111559 1% 27% 252 Search CANTILEVER Search CANTILEVER
9 PULL IN VOLTAGE 110304 0% 82% 82 Search PULL+IN+VOLTAGE Search PULL+IN+VOLTAGE
10 PULL IN INSTABILITY 109366 0% 83% 80 Search PULL+IN+INSTABILITY Search PULL+IN+INSTABILITY

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 2


rank cluster_id2 link
1 3171 WAFER BONDING//ANODIC BONDING//DIRECT BONDING
2 3658 MICROHOTPLATE//MICROHEATER//THIN FILM THERMOCOUPLES
3 3138 ALUMINUM NITRIDE//FBAR//ALN FILM
4 3335 FINGERPRINT SENSOR//CAPACITIVE SENSOR//IEEE 1451
5 3013 FLUXGATE//MAGNETIC SENSORS//FLUXGATE SENSOR
6 3459 MAGNETIC FORCE MICROSCOPY//VIDEO STABILIZATION//DIGITAL IMAGE STABILIZATION
7 3254 POLARIZATION INTERFERENCE IMAGING SPECTROMETER//IMAGING SPECTROMETER//FOURIER TRANSFORM SPECTROMETER
8 1742 NONLOCAL ELASTICITY//STRAIN GRADIENT PLASTICITY//MODIFIED COUPLE STRESS THEORY
9 553 ATOMIC FORCE MICROSCOPY//NANOTRIBOLOGY//FORCE SPECTROSCOPY
10 2484 TWO PHOTON POLYMERIZATION//MICROLENS ARRAY//MICROLENS

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