Class information for:
Level 1: SI OXIDATION//SIO2 SI INTERFACE//SILICON OXIDATION

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1116 2             SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE 10021
4355 1                   SI OXIDATION//SIO2 SI INTERFACE//SILICON OXIDATION 1832

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SI OXIDATION authKW 173449 1% 92% 11
2 SIO2 SI INTERFACE authKW 137901 1% 38% 21
3 SILICON OXIDATION authKW 135916 1% 44% 18
4 LAYER BY LAYER OXIDATION authKW 107175 0% 69% 9
5 INTERFACIAL SILICON EMISSION authKW 103211 0% 100% 6
6 SILICON OXIDE authKW 84779 4% 6% 76
7 TRANSLATIONAL KINETIC ENERGY authKW 55044 0% 80% 4
8 OXYGEN MOLECULAR BEAM authKW 51605 0% 100% 3
9 SI THERMAL OXIDATION authKW 51605 0% 100% 3
10 POINT DEFECT GENERATION authKW 38702 0% 75% 3

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 12691 19% 0% 351
2 Physics, Applied 12507 53% 0% 969
3 Physics, Condensed Matter 6380 32% 0% 581
4 Electrochemistry 1085 7% 0% 131
5 Chemistry, Physical 933 18% 0% 323
6 Materials Science, Multidisciplinary 526 15% 0% 277
7 Nanoscience & Nanotechnology 278 5% 0% 96
8 Engineering, Electrical & Electronic 234 9% 0% 170
9 Physics, Multidisciplinary 182 6% 0% 115
10 Microscopy 47 1% 0% 12

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 THEORIE PHENOMENES PHYS ITP 22934 0% 67% 2
2 PPH ECUBLENS 21344 0% 21% 6
3 SHIGA TECHNOL 19653 0% 29% 4
4 PLASMANT GRP 18967 0% 14% 8
5 AD T NANOSTRUCT NANODEVICES CRAN 17202 0% 100% 1
6 ADV ISI TECHNOL 17202 0% 100% 1
7 ADV SIMULAT THEORET NEUROSCI 17202 0% 100% 1
8 ANALYT COMPUTAT SCI S 17202 0% 100% 1
9 ATPJOINT ATOM TECHNOLNAIR 17202 0% 100% 1
10 CENTRUY COE 21 17202 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SURFACE SCIENCE 9801 7% 0% 125
2 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 8454 7% 0% 124
3 APPLIED SURFACE SCIENCE 5453 6% 0% 109
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 4846 3% 0% 64
5 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 4158 5% 0% 88
6 JOURNAL OF APPLIED PHYSICS 3367 8% 0% 149
7 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 3334 3% 0% 49
8 APPLIED PHYSICS LETTERS 3008 8% 0% 144
9 PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES 2803 1% 1% 23
10 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 2582 3% 0% 51

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 SI OXIDATION 173449 1% 92% 11 Search SI+OXIDATION Search SI+OXIDATION
2 SIO2 SI INTERFACE 137901 1% 38% 21 Search SIO2+SI+INTERFACE Search SIO2+SI+INTERFACE
3 SILICON OXIDATION 135916 1% 44% 18 Search SILICON+OXIDATION Search SILICON+OXIDATION
4 LAYER BY LAYER OXIDATION 107175 0% 69% 9 Search LAYER+BY+LAYER+OXIDATION Search LAYER+BY+LAYER+OXIDATION
5 INTERFACIAL SILICON EMISSION 103211 0% 100% 6 Search INTERFACIAL+SILICON+EMISSION Search INTERFACIAL+SILICON+EMISSION
6 SILICON OXIDE 84779 4% 6% 76 Search SILICON+OXIDE Search SILICON+OXIDE
7 TRANSLATIONAL KINETIC ENERGY 55044 0% 80% 4 Search TRANSLATIONAL+KINETIC+ENERGY Search TRANSLATIONAL+KINETIC+ENERGY
8 OXYGEN MOLECULAR BEAM 51605 0% 100% 3 Search OXYGEN+MOLECULAR+BEAM Search OXYGEN+MOLECULAR+BEAM
9 SI THERMAL OXIDATION 51605 0% 100% 3 Search SI+THERMAL+OXIDATION Search SI+THERMAL+OXIDATION
10 POINT DEFECT GENERATION 38702 0% 75% 3 Search POINT+DEFECT+GENERATION Search POINT+DEFECT+GENERATION

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 26607 LOW TEMPERATURE SILICON OXIDATION//ANODIC PLASMA OXIDATION//DIRECTIONAL OXIDATION
2 7741 HYDROGEN TERMINATION//NATIVE OXIDE//SHIZUOKA TORY
3 5396 BORON PENETRATION//NITRIDED OXIDE//SI OXYNITRIDE
4 18908 CHEMICAL AFFINITY TENSOR//GUIDED MODES OF ELECTRON WAVE//FILM EDGE
5 26411 J AN SCI TECHNOL ORG//DISPLAY TECHNOL DEV GRP//ACOUSTIC DLTS
6 38229 SI O SUPERLATTICE//OXYGEN ATOMIC LAYER//SIX TRANSISTOR 6T STATIC RAM SRAM
7 29260 MSOS O P STRUCTURE//SEMI INSULATING POLYCRYSTALLINE SILICON//SIPOS
8 23492 A SIOX IR SPECTROSCOPY//ADV GLASS RD CNT//ASTRONOMICAL TELESCOPE MIRROR
9 5291 GE100//CHEMISORPTION//SI100
10 22953 POLY SIGE//SIGE OXIDE//SILICON THIN FILM SOLAR CELL PROJECT

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