Class information for:
Level 1: SIMOX//CONTACTLESS I V METHOD//BURIED OXIDE LAYER

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1481 2             TRANSIENT ENHANCED DIFFUSION//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ION IMPLANTATION 7893
12852 1                   SIMOX//CONTACTLESS I V METHOD//BURIED OXIDE LAYER 907

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SIMOX authKW 502020 6% 28% 51
2 CONTACTLESS I V METHOD authKW 104241 0% 100% 3
3 BURIED OXIDE LAYER authKW 72384 1% 42% 5
4 ELECT COMMUN S ATSUGI S address 69494 0% 100% 2
5 INTERNAL THERMAL OXIDATION authKW 69494 0% 100% 2
6 SEPARATION BY IMPLANTED OXYGEN MATERIALS authKW 69494 0% 100% 2
7 SIMOX PROCESS authKW 69494 0% 100% 2
8 BURIED OXIDE authKW 66998 1% 21% 9
9 ELECTRON HOLE DROPLET authKW 46328 0% 67% 2
10 HF DEFECT authKW 46328 0% 67% 2

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 5217 49% 0% 443
2 Nuclear Science & Technology 4229 20% 0% 184
3 Instruments & Instrumentation 3280 19% 0% 176
4 Physics, Nuclear 3127 18% 0% 159
5 Physics, Atomic, Molecular & Chemical 1654 18% 0% 160
6 Materials Science, Coatings & Films 1350 9% 0% 83
7 Physics, Condensed Matter 1173 20% 0% 184
8 Engineering, Electrical & Electronic 734 19% 0% 170
9 Materials Science, Multidisciplinary 427 18% 0% 165
10 Electrochemistry 188 5% 0% 41

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ELECT COMMUN S ATSUGI S 69494 0% 100% 2
2 CHEM TECH ANALYT GETREIDEMKT 34747 0% 100% 1
3 CONSUMER SYST 34747 0% 100% 1
4 DTO FIS MAT CONDENSADA CRISTALOG MINERAL 34747 0% 100% 1
5 INTRO BEAM TECHNOL MAT MODIFICAT 34747 0% 100% 1
6 ION BEAM SYST 34747 0% 100% 1
7 IONSTRAHLPHYS MATERIALFOR 34747 0% 100% 1
8 MICROELE PROC 34747 0% 100% 1
9 RONTGENBEUGUNG ICHTSYSTEMEN 34747 0% 100% 1
10 SHANGHAI QINGPU BRANCH 34747 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 26453 17% 0% 156
2 MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY 8284 5% 1% 42
3 VACUUM 3169 3% 0% 30
4 GEC-JOURNAL OF SCIENCE & TECHNOLOGY 3157 0% 9% 1
5 IEEE CIRCUITS AND DEVICES MAGAZINE 2277 0% 2% 3
6 APPLIED PHYSICS LETTERS 2201 9% 0% 86
7 MICROELECTRONIC ENGINEERING 2058 3% 0% 25
8 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 1661 4% 0% 39
9 JOURNAL OF APPLIED PHYSICS 1539 8% 0% 71
10 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 1165 4% 0% 33

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 SIMOX 502020 6% 28% 51 Search SIMOX Search SIMOX
2 CONTACTLESS I V METHOD 104241 0% 100% 3 Search CONTACTLESS+I+V+METHOD Search CONTACTLESS+I+V+METHOD
3 BURIED OXIDE LAYER 72384 1% 42% 5 Search BURIED+OXIDE+LAYER Search BURIED+OXIDE+LAYER
4 INTERNAL THERMAL OXIDATION 69494 0% 100% 2 Search INTERNAL+THERMAL+OXIDATION Search INTERNAL+THERMAL+OXIDATION
5 SEPARATION BY IMPLANTED OXYGEN MATERIALS 69494 0% 100% 2 Search SEPARATION+BY+IMPLANTED+OXYGEN+MATERIALS Search SEPARATION+BY+IMPLANTED+OXYGEN+MATERIALS
6 SIMOX PROCESS 69494 0% 100% 2 Search SIMOX+PROCESS Search SIMOX+PROCESS
7 BURIED OXIDE 66998 1% 21% 9 Search BURIED+OXIDE Search BURIED+OXIDE
8 ELECTRON HOLE DROPLET 46328 0% 67% 2 Search ELECTRON+HOLE+DROPLET Search ELECTRON+HOLE+DROPLET
9 HF DEFECT 46328 0% 67% 2 Search HF+DEFECT Search HF+DEFECT
10 15 30 KEV 34747 0% 100% 1 Search 15+30+KEV Search 15+30+KEV

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 32896 ARBITRARY INITIAL DISTRIBUTION OF CONCENTRATION//ION BEAM HYDROGENATION//PATTERNED AND SELECTIVE AREA GROWTH
2 33871 ELECTRON BEAM ANNEALING//MAT MSD//RAFTER
3 11918 ION CUT//SMART CUT//GETTERING
4 1776 IEEE TRANSACTIONS ON NUCLEAR SCIENCE//TOTAL IONIZING DOSE//OXIDE TRAPPED CHARGE
5 11801 IBIEC//SOLID PHASE EPITAXIAL GROWTH//LATERAL SOLID PHASE EPITAXY
6 12506 ZONE MELTING RECRYSTALLIZATION//ARCHITECTURE TECH//ELECTRON DEVICE LETTERS
7 23288 EPITAXIAL AL2O3//AL2O3 ON SI//SI ON AL2O3
8 1246 OXYGEN PRECIPITATION//CZOCHRALSKI SILICON//THERMAL DONORS
9 10753 NANOOPT PROPERTY//PLASMA PHYS PLASMA SOURCES//NON UNIFORM THIN FILMS
10 37062 MATH MODELLING UKRAINIAN//THERMAL STRESSED STATE//PIDSTRYHACH PL PROBLEMS MECH MATH

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