Class information for:
Level 1: EPITAXIAL AL2O3//AL2O3 ON SI//SI ON AL2O3

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1594 2             POLYCRYSTALLINE SILICON//POLY SI//THIN FILM TRANSISTORS 7411
23288 1                   EPITAXIAL AL2O3//AL2O3 ON SI//SI ON AL2O3 373

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 EPITAXIAL AL2O3 authKW 844947 3% 100% 10
2 AL2O3 ON SI authKW 190112 1% 75% 3
3 SI ON AL2O3 authKW 168989 1% 100% 2
4 035 MU M authKW 84495 0% 100% 1
5 A THIN FILM authKW 84495 0% 100% 1
6 AL PREDEPOSITION authKW 84495 0% 100% 1
7 AL PREDEPOSITION LAYER authKW 84495 0% 100% 1
8 AL PRELAYER authKW 84495 0% 100% 1
9 AL2O3 SI authKW 84495 0% 100% 1
10 BIAXIAL STRAIN MODEL authKW 84495 0% 100% 1

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 3000 57% 0% 213
2 Materials Science, Coatings & Films 776 11% 0% 40
3 Engineering, Electrical & Electronic 676 27% 0% 99
4 Crystallography 514 10% 0% 39
5 Physics, Condensed Matter 473 20% 0% 75
6 COMPUTER APPLICATIONS & CYBERNETICS 284 1% 0% 3
7 Materials Science, Multidisciplinary 258 21% 0% 79
8 Electrochemistry 102 5% 0% 19
9 Instruments & Instrumentation 77 5% 0% 20
10 Nuclear Science & Technology 40 4% 0% 14

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 HEAT SUR E TREATMENT 84495 0% 100% 1
2 INFRARED RADIAT STAND SECT 84495 0% 100% 1
3 NAT OURCE IL SUBMICRON STRUCT 84495 0% 100% 1
4 NOVEL SEMICONDUCTOR MAT 84495 0% 100% 1
5 NOVL SEMICOND MAT 84495 0% 100% 1
6 SEMICOND LSI 84495 0% 100% 1
7 TENPAKU CHO 84495 0% 100% 1
8 INTELLIGENT HUMAN SENSING SYST 42246 0% 50% 1
9 NANOTECHNOL LYONINLUMR5270 42246 0% 50% 1
10 S HIRST 42246 0% 50% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 RCA REVIEW 35629 2% 5% 9
2 JAPAN ANNUAL REVIEWS IN ELECTRONICS COMPUTERS & TELECOMMUNICATIONS 4315 1% 2% 3
3 IEEE TRANSACTIONS ON ELECTRON DEVICES 3333 7% 0% 25
4 REVUE DE PHYSIQUE APPLIQUEE 3132 2% 1% 7
5 SOLID STATE TECHNOLOGY 2893 2% 0% 8
6 JOURNAL OF CRYSTAL GROWTH 2891 9% 0% 33
7 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 865 5% 0% 18
8 APPLIED PHYSICS LETTERS 834 9% 0% 34
9 IEEE INTERNATIONAL SOLID STATE CIRCUITS CONFERENCE 803 0% 1% 1
10 SEMICONDUCTORS 765 2% 0% 8

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 EPITAXIAL AL2O3 844947 3% 100% 10 Search EPITAXIAL+AL2O3 Search EPITAXIAL+AL2O3
2 AL2O3 ON SI 190112 1% 75% 3 Search AL2O3+ON+SI Search AL2O3+ON+SI
3 SI ON AL2O3 168989 1% 100% 2 Search SI+ON+AL2O3 Search SI+ON+AL2O3
4 035 MU M 84495 0% 100% 1 Search 035+MU+M Search 035+MU+M
5 A THIN FILM 84495 0% 100% 1 Search A+THIN+FILM Search A+THIN+FILM
6 AL PREDEPOSITION 84495 0% 100% 1 Search AL+PREDEPOSITION Search AL+PREDEPOSITION
7 AL PREDEPOSITION LAYER 84495 0% 100% 1 Search AL+PREDEPOSITION+LAYER Search AL+PREDEPOSITION+LAYER
8 AL PRELAYER 84495 0% 100% 1 Search AL+PRELAYER Search AL+PRELAYER
9 AL2O3 SI 84495 0% 100% 1 Search AL2O3+SI Search AL2O3+SI
10 BIAXIAL STRAIN MODEL 84495 0% 100% 1 Search BIAXIAL+STRAIN+MODEL Search BIAXIAL+STRAIN+MODEL

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 12506 ZONE MELTING RECRYSTALLIZATION//ARCHITECTURE TECH//ELECTRON DEVICE LETTERS
2 13690 CAF2//METAL INSULATOR HETEROSTRUCTURE//SOLID STATE OPT
3 12852 SIMOX//CONTACTLESS I V METHOD//BURIED OXIDE LAYER
4 35921 APPLICATION LEVEL OPTIMIZATION//ELECTRONICS//ELECTRONIC DESIGN
5 17817 CEO2 FILM//CEO2 THIN FILM//CEO2
6 37300 FOOD SECURITY AND ENVIRONMENT//LINEAR HYPERINTENSITY OBJECTS//LONG TERM DYNAMICS OF AGRICULTURAL CHANGE
7 21959 SI001 SUBSTRATES//CRYSTALLINE OXIDE//S UNICAT
8 11980 AL CR2O 3//KAPPA AL2O3//ALUMINUM OXIDE
9 38229 SI O SUPERLATTICE//OXYGEN ATOMIC LAYER//SIX TRANSISTOR 6T STATIC RAM SRAM
10 20412 POLYOXIDE//INTER POLY DIELECTRIC IPD//INTERPOLY DIELECTRIC

Go to start page