Class information for:
Level 1: TRANSIENT ENHANCED DIFFUSION//SWAMP//SHALLOW JUNCTION

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1481 2             TRANSIENT ENHANCED DIFFUSION//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ION IMPLANTATION 7893
736 1                   TRANSIENT ENHANCED DIFFUSION//SWAMP//SHALLOW JUNCTION 3144

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 TRANSIENT ENHANCED DIFFUSION authKW 606911 2% 83% 73
2 SWAMP address 199260 1% 76% 26
3 SHALLOW JUNCTION authKW 196370 2% 35% 56
4 ULTRA SHALLOW JUNCTION authKW 168431 1% 41% 41
5 PAIR DIFFUSION MODEL authKW 100226 0% 100% 10
6 IMETEM address 96546 1% 23% 42
7 ION IMPLANTAT GRP address 93535 0% 67% 14
8 MOLECULAR ION IMPLANTATION authKW 93284 0% 85% 11
9 311 DEFECTS authKW 81181 0% 90% 9
10 BORON DIFFUSION authKW 76970 1% 35% 22

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 21910 53% 0% 1679
2 Physics, Condensed Matter 7139 26% 0% 820
3 Nuclear Science & Technology 3842 11% 0% 339
4 Physics, Nuclear 3043 10% 0% 304
5 Instruments & Instrumentation 2690 10% 0% 312
6 Materials Science, Coatings & Films 2462 7% 0% 213
7 Physics, Atomic, Molecular & Chemical 1525 10% 0% 308
8 Engineering, Electrical & Electronic 1386 15% 0% 460
9 Materials Science, Multidisciplinary 1042 16% 0% 501
10 Electrochemistry 674 5% 0% 144

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SWAMP 199260 1% 76% 26
2 IMETEM 96546 1% 23% 42
3 ION IMPLANTAT GRP 93535 0% 67% 14
4 MATIS 71137 1% 16% 45
5 PARAMETR CONDUCT IMPLANT 50113 0% 100% 5
6 E ELECT 32796 0% 55% 6
7 IT COMPUTAT ELECT 30068 0% 100% 3
8 SEH RD 30068 0% 100% 3
9 IMM SEZ CATANIA 29146 0% 36% 8
10 FRONT END PROD 22549 0% 75% 3

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 27209 9% 1% 296
2 APPLIED PHYSICS LETTERS 18733 15% 0% 461
3 JOURNAL OF APPLIED PHYSICS 17478 14% 0% 437
4 MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY 13486 3% 1% 100
5 DEFECT AND DIFFUSION FORUM 8715 1% 4% 20
6 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 6095 4% 0% 139
7 DEFECT AND DIFFUSION FORUM/JOURNAL 4913 0% 4% 13
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 4480 3% 1% 88
9 MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 3823 1% 1% 37
10 SOLID STATE PHENOMENA 3030 1% 1% 26

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 TRANSIENT ENHANCED DIFFUSION 606911 2% 83% 73 Search TRANSIENT+ENHANCED+DIFFUSION Search TRANSIENT+ENHANCED+DIFFUSION
2 SHALLOW JUNCTION 196370 2% 35% 56 Search SHALLOW+JUNCTION Search SHALLOW+JUNCTION
3 ULTRA SHALLOW JUNCTION 168431 1% 41% 41 Search ULTRA+SHALLOW+JUNCTION Search ULTRA+SHALLOW+JUNCTION
4 PAIR DIFFUSION MODEL 100226 0% 100% 10 Search PAIR+DIFFUSION+MODEL Search PAIR+DIFFUSION+MODEL
5 MOLECULAR ION IMPLANTATION 93284 0% 85% 11 Search MOLECULAR+ION+IMPLANTATION Search MOLECULAR+ION+IMPLANTATION
6 311 DEFECTS 81181 0% 90% 9 Search 311+DEFECTS Search 311+DEFECTS
7 BORON DIFFUSION 76970 1% 35% 22 Search BORON+DIFFUSION Search BORON+DIFFUSION
8 PRE AMORPHIZATION 66811 0% 67% 10 Search PRE+AMORPHIZATION Search PRE+AMORPHIZATION
9 DOPANT DIFFUSION 60277 1% 32% 19 Search DOPANT+DIFFUSION Search DOPANT+DIFFUSION
10 END OF RANGE DEFECTS 58309 0% 73% 8 Search END+OF+RANGE+DEFECTS Search END+OF+RANGE+DEFECTS

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 32025 HIGH SIDE//MINIMUM ACCELERATION LENGTH//RETARDED LANGEVIN EQUATION RLE
2 11801 IBIEC//SOLID PHASE EPITAXIAL GROWTH//LATERAL SOLID PHASE EPITAXY
3 15843 GERMANIUM//CNR IMM MATIS//ELECT MAT DEVICES NANOSTRUCT
4 12036 NEUTRON DEPTH PROFILING//RANGE PARAMETERS//LATERAL STRAGGLING
5 35344 FLASH LAMP ANNEALING//DEV ELECT EQUIPMENT//PULSED LIGHT SINTERING
6 36556 OPTICAL ANALOG SIGNAL TRANSMISSION//COOLED LEDS//GALVANICALLY ISOLATED AMPLIFIER
7 11918 ION CUT//SMART CUT//GETTERING
8 9860 LIFETIME CONTROL//SOVIET PHYSICS SEMICONDUCTORS-USSR//DLTS
9 37062 MATH MODELLING UKRAINIAN//THERMAL STRESSED STATE//PIDSTRYHACH PL PROBLEMS MECH MATH
10 18908 CHEMICAL AFFINITY TENSOR//GUIDED MODES OF ELECTRON WAVE//FILM EDGE

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