Class information for:
Level 1: NANOMETROLOGY//MICRO CMM//NANOPOSITIONING AND NANOMEASURING MACHINE

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
13 4 PHYSICS, PARTICLES & FIELDS//PHYSICS, NUCLEAR//OPTICS 1062565
263 3       OPTICS//APPLIED OPTICS//OPTICS AND LASERS IN ENGINEERING 45499
1616 2             ENGINEERING, MANUFACTURING//THERMAL ERROR//ERROR COMPENSATION 7308
12463 1                   NANOMETROLOGY//MICRO CMM//NANOPOSITIONING AND NANOMEASURING MACHINE 935

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 NANOMETROLOGY authKW 558340 5% 32% 51
2 MICRO CMM authKW 546039 2% 90% 18
3 NANOPOSITIONING AND NANOMEASURING MACHINE authKW 339870 1% 92% 11
4 TIP CHARACTERIZATION authKW 313725 1% 85% 11
5 CRITICAL DIMENSION ATOMIC FORCE MICROSCOPE authKW 273019 1% 90% 9
6 PROC MEASUREMENT SENSOR TECHNOL address 258871 2% 40% 19
7 COORDINATE METROLOGY authKW 258384 2% 33% 23
8 OPTICAL DIFFRACTOMETER authKW 202238 1% 100% 6
9 TIP CHARACTERIZER authKW 202238 1% 100% 6
10 DIMENSIONAL METROLOGY authKW 188269 3% 21% 26

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Instruments & Instrumentation 21095 47% 0% 440
2 Engineering, General 11223 27% 0% 249
3 Engineering, Manufacturing 4584 12% 0% 116
4 Microscopy 2516 6% 0% 53
5 Nanoscience & Nanotechnology 1757 16% 0% 146
6 Physics, Applied 1294 26% 0% 241
7 Engineering, Industrial 882 6% 0% 52
8 Engineering, Electrical & Electronic 493 16% 0% 147
9 Materials Science, Multidisciplinary 236 14% 0% 135
10 Optics 215 8% 0% 72

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PROC MEASUREMENT SENSOR TECHNOL 258871 2% 40% 19
2 MEASUREMENT TESTING EAST CHINA 110100 1% 47% 7
3 CHAIR QUAL MANAGEMENT MFG METROL QFM 101119 0% 100% 3
4 PRECIS NANOSYST 101119 0% 100% 3
5 CHAIR QUAL MANAGEMENT MFG METROL 94133 1% 31% 9
6 SHANGHAI MEASUREMENT TESTING TECHNOL 78639 1% 33% 7
7 CHAIR MFG METROL 75838 0% 75% 3
8 MEASUREMENT CALIBRAT 75838 0% 75% 3
9 ULTRA PRECIS OPTOELECT RUMENT 71370 1% 35% 6
10 ULTRA PRECIS OPTOELECT RUMENTS 67413 0% 100% 2

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 TM-TECHNISCHES MESSEN 159093 6% 8% 59
2 MEASUREMENT SCIENCE AND TECHNOLOGY 126088 20% 2% 187
3 CIRP ANNALS-MANUFACTURING TECHNOLOGY 36203 5% 2% 51
4 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 20892 3% 2% 25
5 TECHNISCHES MESSEN 20074 2% 3% 21
6 PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 15170 3% 2% 26
7 MICROTECNIC 11234 0% 33% 1
8 ULTRAMICROSCOPY 4272 3% 0% 27
9 MICROSYSTEM TECHNOLOGIES 3743 0% 11% 1
10 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 3651 5% 0% 43

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 NANOMETROLOGY 558340 5% 32% 51 Search NANOMETROLOGY Search NANOMETROLOGY
2 MICRO CMM 546039 2% 90% 18 Search MICRO+CMM Search MICRO+CMM
3 NANOPOSITIONING AND NANOMEASURING MACHINE 339870 1% 92% 11 Search NANOPOSITIONING+AND+NANOMEASURING+MACHINE Search NANOPOSITIONING+AND+NANOMEASURING+MACHINE
4 TIP CHARACTERIZATION 313725 1% 85% 11 Search TIP+CHARACTERIZATION Search TIP+CHARACTERIZATION
5 CRITICAL DIMENSION ATOMIC FORCE MICROSCOPE 273019 1% 90% 9 Search CRITICAL+DIMENSION+ATOMIC+FORCE+MICROSCOPE Search CRITICAL+DIMENSION+ATOMIC+FORCE+MICROSCOPE
6 COORDINATE METROLOGY 258384 2% 33% 23 Search COORDINATE+METROLOGY Search COORDINATE+METROLOGY
7 OPTICAL DIFFRACTOMETER 202238 1% 100% 6 Search OPTICAL+DIFFRACTOMETER Search OPTICAL+DIFFRACTOMETER
8 TIP CHARACTERIZER 202238 1% 100% 6 Search TIP+CHARACTERIZER Search TIP+CHARACTERIZER
9 DIMENSIONAL METROLOGY 188269 3% 21% 26 Search DIMENSIONAL+METROLOGY Search DIMENSIONAL+METROLOGY
10 CT METROLOGY 168532 1% 100% 5 Search CT+METROLOGY Search CT+METROLOGY

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 10324 HETERODYNE INTERFEROMETRY//HETERODYNE INTERFEROMETER//NANOMETER MEASUREMENT
2 16304 FIREARMS IDENTIFICATION//SURFACE METROLOGY//STANDARD BULLET
3 22655 CARBON NANOTUBE TIPS//SPM TIP//CARBON NANOTUBE PROBES
4 11083 MINIMUM ZONE//COORDINATE MEASURING MACHINE//CMM
5 1280 NONCONTACT ATOMIC FORCE MICROSCOPY//NC AFM//DISSENY PROGRAMACIO SISTEMES ELECT
6 14884 CHEMICAL FORCE MICROSCOPY//SPRING CONSTANT//FORCE TITRATION
7 38326 DEFECT INDICATORS//FRINGE CURVATURE//FRINGE PATTERN CONTROL
8 6603 ATOMIC FORCE MICROSCOPY//NANODISSECTION//CRYO AFM
9 28545 LARGE SCALE METROLOGY//LARGE VOLUME METROLOGY//IGPS
10 3057 LOCAL TUNNELING BARRIER HEIGHT//I S CHARACTERISTICS//LOCAL TUNNELING BARRIER HEIGHT LBH

Go to start page