Class information for:
Level 1: ECR HYDROGEN PLASMA//IN SITU VACUUM PROCESS//OXIDE DESORPTION

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
51 3       SURFACE SCIENCE//PHYSICS, CONDENSED MATTER//SCANNING TUNNELING MICROSCOPY 97901
1092 2             GALLIUM ARSENIDE//GAAS//SURFACE SCIENCE 10114
19102 1                   ECR HYDROGEN PLASMA//IN SITU VACUUM PROCESS//OXIDE DESORPTION 544

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ECR HYDROGEN PLASMA authKW 115868 0% 100% 2
2 IN SITU VACUUM PROCESS authKW 115868 0% 100% 2
3 OXIDE DESORPTION authKW 115864 1% 50% 4
4 GA2O authKW 77244 0% 67% 2
5 HIGFET authKW 77244 0% 67% 2
6 SEMICOND INTEGRATED CIRCUIT address 65172 1% 38% 3
7 ACID POLISHED authKW 57934 0% 100% 1
8 AMPS 1D MODELLING authKW 57934 0% 100% 1
9 ARSENIC CAPPING authKW 57934 0% 100% 1
10 ATOMIC HYDROGEN ETCHING CLEANING authKW 57934 0% 100% 1

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 4944 60% 0% 329
2 Materials Science, Coatings & Films 3114 17% 0% 95
3 Physics, Condensed Matter 1143 25% 0% 137
4 Crystallography 452 8% 0% 45
5 Nanoscience & Nanotechnology 332 9% 0% 51
6 Materials Science, Multidisciplinary 270 19% 0% 101
7 Chemistry, Physical 215 16% 0% 87
8 Engineering, Electrical & Electronic 192 13% 0% 73
9 Physics, Multidisciplinary 45 6% 0% 32
10 Electrochemistry 39 3% 0% 16

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SEMICOND INTEGRATED CIRCUIT 65172 1% 38% 3
2 JANGANG GU 57934 0% 100% 1
3 NANOELE ON ABORAT 57934 0% 100% 1
4 NOVOSIBIRSK SEMICOND PHYS 57934 0% 100% 1
5 OPTOELECT MICROWAVE DEVICES DEV 28966 0% 50% 1
6 STRUCT FUNCT PROPERTY GRP 28966 0% 50% 1
7 SUR E THIN FILM STAND SECT 28966 0% 50% 1
8 GRP FIS SUPERFICIES 28964 0% 25% 2
9 TOSHIBA EUROPE LTD 25745 0% 22% 2
10 NANOTECHNOL ENGN GRP 19310 0% 33% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY 9587 3% 1% 14
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 6337 8% 0% 43
3 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 5828 7% 0% 38
4 SURFACE SCIENCE 3217 7% 0% 39
5 JOURNAL OF CRYSTAL GROWTH 3201 8% 0% 42
6 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 2286 4% 0% 22
7 JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA 953 2% 0% 10
8 JOURNAL OF APPLIED PHYSICS 853 8% 0% 41
9 APPLIED PHYSICS LETTERS 777 7% 0% 40
10 SOVIET MICROELECTRONICS 771 0% 1% 2

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 ECR HYDROGEN PLASMA 115868 0% 100% 2 Search ECR+HYDROGEN+PLASMA Search ECR+HYDROGEN+PLASMA
2 IN SITU VACUUM PROCESS 115868 0% 100% 2 Search IN+SITU+VACUUM+PROCESS Search IN+SITU+VACUUM+PROCESS
3 OXIDE DESORPTION 115864 1% 50% 4 Search OXIDE+DESORPTION Search OXIDE+DESORPTION
4 GA2O 77244 0% 67% 2 Search GA2O Search GA2O
5 HIGFET 77244 0% 67% 2 Search HIGFET Search HIGFET
6 ACID POLISHED 57934 0% 100% 1 Search ACID+POLISHED Search ACID+POLISHED
7 AMPS 1D MODELLING 57934 0% 100% 1 Search AMPS+1D+MODELLING Search AMPS+1D+MODELLING
8 ARSENIC CAPPING 57934 0% 100% 1 Search ARSENIC+CAPPING Search ARSENIC+CAPPING
9 ATOMIC HYDROGEN ETCHING CLEANING 57934 0% 100% 1 Search ATOMIC+HYDROGEN+ETCHING+CLEANING Search ATOMIC+HYDROGEN+ETCHING+CLEANING
10 ATOMIC MASS NUMBER 57934 0% 100% 1 Search ATOMIC+MASS+NUMBER Search ATOMIC+MASS+NUMBER

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 22500 ELECTROMAGNETIC GREENS FUNCTION//HYDROGEN ON SEMICONDUCTOR SURFACES//AES MOLECULAR BEAM EPITAXY MBE
2 8343 SULFUR PASSIVATION//INTERFACE CONTROL LAYER//NH42S X TREATMENT
3 13569 CONDUCTANCE TRANSIENTS//INDIUM PHOSPHIDE100//INSULATOR DAMAGE
4 9390 ELECTRON COUNTING MODEL//INDIUM ARSENIDE//GA ADATOM
5 4208 WEBSTER//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY//METAL SEMICONDUCTOR INTERFACES
6 6201 FUJIMI KU//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//DRY ETCHING
7 37832 DEFECT INCORPORATION//GAAS PIN DIODE//MAT E ORAT CHARACTERISAT
8 6996 INGAAS//III V MOSFET//III V
9 17520 OVAL DEFECTS//SEEIE//ABZU
10 11068 SELECTIVE AREA GROWTH//SELECTIVE EPITAXY//TERTIARYBUTYLCHLORIDE

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