Class information for:
Level 1: FORMING GAS ANNEALING//MEMORY DEVICES//025 MU M DESIGN RULE

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
85 3       FERROELECTRICS//DIELECTRIC PROPERTIES//INTEGRATED FERROELECTRICS 81809
175 2             FERROELECTRICS//BIFEO3//INTEGRATED FERROELECTRICS 21409
21385 1                   FORMING GAS ANNEALING//MEMORY DEVICES//025 MU M DESIGN RULE 445

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 FORMING GAS ANNEALING authKW 362686 3% 39% 13
2 MEMORY DEVICES address 226633 1% 80% 4
3 025 MU M DESIGN RULE authKW 141647 0% 100% 2
4 32MB FRAM authKW 141647 0% 100% 2
5 CAPACITOR OVER PLUG authKW 141647 0% 100% 2
6 FERAM TECHNOL address 141647 0% 100% 2
7 O 3 TEOS authKW 141647 0% 100% 2
8 TSINGHUA TONGFANG FUNCT CERAM JOINT address 141647 0% 100% 2
9 HYDROGEN INDUCED DEGRADATION authKW 141643 1% 50% 4
10 FORMING GAS authKW 127474 1% 30% 6

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 3310 55% 0% 245
2 Physics, Condensed Matter 1009 26% 0% 116
3 Materials Science, Ceramics 772 9% 0% 38
4 Engineering, Electrical & Electronic 577 23% 0% 102
5 Materials Science, Multidisciplinary 323 22% 0% 96
6 Materials Science, Coatings & Films 126 4% 0% 19
7 Metallurgy & Metallurgical Engineering 37 4% 0% 18
8 Physics, Multidisciplinary 32 6% 0% 25
9 Electrochemistry 31 3% 0% 13
10 Nanoscience & Nanotechnology 7 2% 0% 11

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MEMORY DEVICES 226633 1% 80% 4
2 FERAM TECHNOL 141647 0% 100% 2
3 TSINGHUA TONGFANG FUNCT CERAM JOINT 141647 0% 100% 2
4 MAT DEVICE SECTOR 84631 2% 17% 7
5 AKADEMICHNA ST 70823 0% 100% 1
6 ARTMENT PHYS ELECT 70823 0% 100% 1
7 CT MM7 70823 0% 100% 1
8 FERAM DEVICE 70823 0% 100% 1
9 FERROELECR PHASE TRANSIT 70823 0% 100% 1
10 FUNCT CERAM SENSOR TECHNOL 70823 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 INTEGRATED FERROELECTRICS 72908 14% 2% 64
2 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 2013 7% 0% 30
3 APPLIED PHYSICS LETTERS 1663 12% 0% 52
4 NEC RESEARCH & DEVELOPMENT 1456 1% 1% 3
5 FERROELECTRICS 1411 4% 0% 16
6 PLATING AND SURFACE FINISHING 803 1% 0% 4
7 FERROELECTRICS LETTERS SECTION 715 1% 0% 3
8 JOURNAL OF THE AMERICAN CERAMIC SOCIETY 604 3% 0% 13
9 APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 583 2% 0% 11
10 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 569 2% 0% 10

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 FORMING GAS ANNEALING 362686 3% 39% 13 Search FORMING+GAS+ANNEALING Search FORMING+GAS+ANNEALING
2 025 MU M DESIGN RULE 141647 0% 100% 2 Search 025+MU+M+DESIGN+RULE Search 025+MU+M+DESIGN+RULE
3 32MB FRAM 141647 0% 100% 2 Search 32MB+FRAM Search 32MB+FRAM
4 CAPACITOR OVER PLUG 141647 0% 100% 2 Search CAPACITOR+OVER+PLUG Search CAPACITOR+OVER+PLUG
5 O 3 TEOS 141647 0% 100% 2 Search O+3+TEOS Search O+3+TEOS
6 HYDROGEN INDUCED DEGRADATION 141643 1% 50% 4 Search HYDROGEN+INDUCED+DEGRADATION Search HYDROGEN+INDUCED+DEGRADATION
7 FORMING GAS 127474 1% 30% 6 Search FORMING+GAS Search FORMING+GAS
8 SIO2 CAPPING 94430 0% 67% 2 Search SIO2+CAPPING Search SIO2+CAPPING
9 FRAM 90652 3% 10% 13 Search FRAM Search FRAM
10 HYDROGEN DAMAGE 80473 1% 23% 5 Search HYDROGEN+DAMAGE Search HYDROGEN+DAMAGE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 31719 PT TI LAYER//PT BOTTOM ELECTRODE//ADHESION LAYER
2 149 PZT//PZT THIN FILMS//INTEGRATED FERROELECTRICS
3 33332 RADIATION INDUCED CHARGES//AF IOFFE PTI//RETAINED POLARIZATION
4 16132 ELECT DEVICES MAT TECHNOL//ETCH MECHANISM//MICROELECT DEVICES MAT TECHNOL
5 252 BISMUTH TITANATE//BI4TI3O12//SRBI2TA2O9
6 10270 MFIS//MFIS STRUCTURE//MEMORY WINDOW
7 377 BST//BARIUM STRONTIUM TITANATE//TUNABILITY
8 18466 RESISTIVE OXYGEN SENSOR//CHRISTIAN DOPPLER FERRO MAT//SRTI1 XFEXO3 DELTA
9 17999 RUTHENIUM FILMS//RUO2//RU
10 26655 NEGATIVE CAPACITANCE//CHAIR NANOELECT MAT//NAM GGMBH

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