Class information for:
Level 1: SEMICOND EQUIPMENT OPERAT//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ADV COMP SYST UNIT

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
15 4 METALLURGY & METALLURGICAL ENGINEERING//MATERIALS SCIENCE, MULTIDISCIPLINARY//MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 827627
419 3       PLASMA SOURCES SCIENCE & TECHNOLOGY//REVIEW OF SCIENTIFIC INSTRUMENTS//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30297
1804 2             REVIEW OF SCIENTIFIC INSTRUMENTS//ION SOURCE//NEGATIVE ION SOURCE 6593
22941 1                   SEMICOND EQUIPMENT OPERAT//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ADV COMP SYST UNIT 385

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SEMICOND EQUIPMENT OPERAT address 130973 1% 40% 4
2 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS journal 82656 46% 1% 179
3 ADV COMP SYST UNIT address 81861 0% 100% 1
4 ANTENNA CAPACITOR authKW 81861 0% 100% 1
5 BEAM DIAMETER AND EXTRACTION VOLTAGE authKW 81861 0% 100% 1
6 BEAM MAPS authKW 81861 0% 100% 1
7 BEAMDULAC CODE authKW 81861 0% 100% 1
8 CALIBRATING METHOD authKW 81861 0% 100% 1
9 CHAIR ELECT IL address 81861 0% 100% 1
10 CONSTANT CURRENT CHARACTERISTIC authKW 81861 0% 100% 1

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Instruments & Instrumentation 15266 62% 0% 239
2 Nuclear Science & Technology 13145 54% 0% 206
3 Physics, Nuclear 10598 48% 0% 185
4 Physics, Atomic, Molecular & Chemical 5555 47% 0% 181
5 Physics, Applied 886 32% 0% 124
6 Engineering, Electrical & Electronic 270 18% 0% 68
7 Physics, Condensed Matter 174 13% 0% 50
8 Materials Science, Coatings & Films 102 4% 0% 16
9 Physics, Particles & Fields 43 4% 0% 17
10 Engineering, Manufacturing 20 2% 0% 6

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SEMICOND EQUIPMENT OPERAT 130973 1% 40% 4
2 ADV COMP SYST UNIT 81861 0% 100% 1
3 CHAIR ELECT IL 81861 0% 100% 1
4 SEMICOND EQUIPMENT OPEAT 81861 0% 100% 1
5 SIBERIAN BRANCH RUSSIAN 20464 0% 25% 1
6 MOS4YOU 16371 0% 20% 1
7 ELE OPHYS IL 9094 0% 11% 1
8 LEHRSTUHL ELEKTRON BAUELEMENTE 7440 0% 9% 1
9 SUNGKYUNKWAN ADV NANO TECHNOL 7440 0% 9% 1
10 ACCELERATORS ION SOURCES 7115 1% 4% 2

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 82656 46% 1% 179
2 SOLID STATE TECHNOLOGY 53874 9% 2% 35
3 PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY 5992 3% 1% 11
4 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH 5979 4% 1% 14
5 REVIEW OF SCIENTIFIC INSTRUMENTS 3420 9% 0% 36
6 MICROCONTAMINATION 3273 0% 4% 1
7 ELECTRONICS 1864 1% 1% 3
8 ISSCC DIGEST OF TECHNICAL PAPERS 1859 0% 2% 1
9 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 812 1% 0% 4
10 RESEARCH & DEVELOPMENT 609 0% 1% 1

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 ANTENNA CAPACITOR 81861 0% 100% 1 Search ANTENNA+CAPACITOR Search ANTENNA+CAPACITOR
2 BEAM DIAMETER AND EXTRACTION VOLTAGE 81861 0% 100% 1 Search BEAM+DIAMETER+AND+EXTRACTION+VOLTAGE Search BEAM+DIAMETER+AND+EXTRACTION+VOLTAGE
3 BEAM MAPS 81861 0% 100% 1 Search BEAM+MAPS Search BEAM+MAPS
4 BEAMDULAC CODE 81861 0% 100% 1 Search BEAMDULAC+CODE Search BEAMDULAC+CODE
5 CALIBRATING METHOD 81861 0% 100% 1 Search CALIBRATING+METHOD Search CALIBRATING+METHOD
6 CONSTANT CURRENT CHARACTERISTIC 81861 0% 100% 1 Search CONSTANT+CURRENT+CHARACTERISTIC Search CONSTANT+CURRENT+CHARACTERISTIC
7 CORRECTING DISTANCE 81861 0% 100% 1 Search CORRECTING+DISTANCE Search CORRECTING+DISTANCE
8 EGS5 SIMULATION 81861 0% 100% 1 Search EGS5+SIMULATION Search EGS5+SIMULATION
9 ELECTROMAGNETIC ISOTOPE SEPARATION EMIS 81861 0% 100% 1 Search ELECTROMAGNETIC+ISOTOPE+SEPARATION+EMIS Search ELECTROMAGNETIC+ISOTOPE+SEPARATION+EMIS
10 EMITTANCE AND BRIGHTNESS FACTORS 81861 0% 100% 1 Search EMITTANCE+AND+BRIGHTNESS+FACTORS Search EMITTANCE+AND+BRIGHTNESS+FACTORS

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 28857 NEGATIVE ION IMPLANTATION//SOL GEL TITANIUM OXIDE FILM//CELL ADHESION PATTERNING
2 19185 RFQ//RFQ ACCELERATOR//SFRFQ
3 17105 ATOMIC LAYER ETCHING//GATE CHARGING//NEUTRAL BEAM ETCHING
4 12036 NEUTRON DEPTH PROFILING//RANGE PARAMETERS//LATERAL STRAGGLING
5 17550 PHOTOCARRIER RADIOMETRY//CADIFT//PHOTOTHERMAL OPTOELECT DIAGNOST S
6 21577 SOFT ERROR MAPPING//HIGH ENERGY ION IMPLANTATION//DYNAMIC RANDOM ACCESS MEMORY
7 38443 ANTROPOL ARTHUR N OLEAO FIGUEIREDO//CULTURE AND THE BUILT ENVIRONMENT//HILBER SEIMER
8 28521 HYDRIDE GASES//MINIATURE RELAYS//PASSIVATION THIN FILMS
9 26906 BUNCH CURRENT//STOCHASTIC COOLING//INJECTION ERRORS
10 12852 SIMOX//CONTACTLESS I V METHOD//BURIED OXIDE LAYER

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