Class information for:
Level 1: SCANNING//SECONDARY EMISSION NOISE//INTEGRATED CIRCUIT ADV PROC TECHNOL

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
375 3       MICROSCOPY//ULTRAMICROSCOPY//JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA 34629
2570 2             SCANNING//SCANDATE CATHODE//MICROSCOPY 3949
15450 1                   SCANNING//SECONDARY EMISSION NOISE//INTEGRATED CIRCUIT ADV PROC TECHNOL 739

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SCANNING journal 569704 20% 9% 151
2 SECONDARY EMISSION NOISE authKW 213233 1% 100% 5
3 INTEGRATED CIRCUIT ADV PROC TECHNOL address 170586 1% 100% 4
4 RELIEF ELEMENTS authKW 170586 1% 100% 4
5 BACKSCATTERED ELECTRONS authKW 167073 3% 17% 23
6 SCANNING ELECTRON MICROSCOPE authKW 162878 10% 5% 76
7 MICROSCOPY WoSSC 159144 50% 1% 368
8 3D SEM SURFACE RECONSTRUCTION authKW 127940 0% 100% 3
9 ALTERNATING APERTURE PHASE SHIFTING MASKS authKW 127940 0% 100% 3
10 BEASTLI authKW 127940 0% 100% 3

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Microscopy 159144 50% 1% 368
2 Instruments & Instrumentation 8690 34% 0% 253
3 Engineering, General 914 9% 0% 66
4 Physics, Applied 247 14% 0% 107
5 Nanoscience & Nanotechnology 130 6% 0% 41
6 Physics, Multidisciplinary 101 7% 0% 52
7 Engineering, Electrical & Electronic 73 9% 0% 63
8 Optics 45 5% 0% 35
9 Biology 23 2% 0% 17
10 Spectroscopy 22 2% 0% 16

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 INTEGRATED CIRCUIT ADV PROC TECHNOL 170586 1% 100% 4
2 SECT 5 11 85293 0% 100% 2
3 AREA METROL MAT 42647 0% 100% 1
4 ARMINESUMR 7633 42647 0% 100% 1
5 AS2MFEMTO ST 42647 0% 100% 1
6 AUTOMAT CONTROL MICRO MECHATRON SYST AS2M 42647 0% 100% 1
7 AV PROKHOROV GEN PHYS 42647 0% 100% 1
8 CATEDRA OPERATORIA 2 A 42647 0% 100% 1
9 ETUDES MAT MICROSCOPIE AVANCEE 42647 0% 100% 1
10 ISOGO KO 42647 0% 100% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SCANNING 569704 20% 9% 151
2 MICRON AND MICROSCOPICA ACTA 32588 2% 6% 13
3 JOURNAL OF ELECTRON MICROSCOPY 22068 4% 2% 31
4 SCANNING MICROSCOPY 16404 3% 2% 22
5 MEASUREMENT TECHNIQUES 12877 3% 1% 25
6 JOURNAL OF MICROSCOPY 11709 4% 1% 28
7 MEASUREMENT TECHNIQUES USSR 10345 2% 2% 13
8 JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE 9875 2% 2% 13
9 MICRON 9537 3% 1% 24
10 JOURNAL OF MICROSCOPY-OXFORD 8923 3% 1% 22

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 SECONDARY EMISSION NOISE 213233 1% 100% 5 Search SECONDARY+EMISSION+NOISE Search SECONDARY+EMISSION+NOISE
2 RELIEF ELEMENTS 170586 1% 100% 4 Search RELIEF+ELEMENTS Search RELIEF+ELEMENTS
3 BACKSCATTERED ELECTRONS 167073 3% 17% 23 Search BACKSCATTERED+ELECTRONS Search BACKSCATTERED+ELECTRONS
4 SCANNING ELECTRON MICROSCOPE 162878 10% 5% 76 Search SCANNING+ELECTRON+MICROSCOPE Search SCANNING+ELECTRON+MICROSCOPE
5 3D SEM SURFACE RECONSTRUCTION 127940 0% 100% 3 Search 3D+SEM+SURFACE+RECONSTRUCTION Search 3D+SEM+SURFACE+RECONSTRUCTION
6 ALTERNATING APERTURE PHASE SHIFTING MASKS 127940 0% 100% 3 Search ALTERNATING+APERTURE+PHASE+SHIFTING+MASKS Search ALTERNATING+APERTURE+PHASE+SHIFTING+MASKS
7 BEASTLI 127940 0% 100% 3 Search BEASTLI Search BEASTLI
8 CONTRAST TO GRADIENT 127940 0% 100% 3 Search CONTRAST+TO+GRADIENT Search CONTRAST+TO+GRADIENT
9 STEREO PAIR TECHNIQUE 127940 0% 100% 3 Search STEREO+PAIR+TECHNIQUE Search STEREO+PAIR+TECHNIQUE
10 ADVANCED LITHOGRAPHY 106611 1% 50% 5 Search ADVANCED+LITHOGRAPHY Search ADVANCED+LITHOGRAPHY

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 10511 LAMACOP//SECONDARY ELECTRON EMISSION//DOPANT CONTRAST
2 21486 ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE//ESEM//ENVIRONMENTAL SEM
3 22547 E BEAM INSPECTION//ELECTRON BEAM TESTING//NONVISUAL DEFECTS
4 37071 CEREBELLAR NERVE CELLS//INTRACORTICAL TRACING//INVEST BIOL DRS ORLANDO CASTEJON HAYDEE VI
5 33142 SUB MICRO SYST TECH//NUCLEAR MICROFILTER//AI LEIPUNSKY
6 38818 INVERSE TRANSPORT//BIOMATERIALS MEDICAL DEVICES AND ARTIFICIAL ORGANS//CHEMTECH
7 24930 CORE LENS//CURVED OPTIC AXIS//DIAGRAM OF AXIS INTERCEPT
8 36169 SELF SUSTAINED FILM//ACLAR R FILM//BA2CU3YO7 DELTA
9 12463 NANOMETROLOGY//MICRO CMM//NANOPOSITIONING AND NANOMEASURING MACHINE
10 23617 LASER INTERFERENCE MICROSCOPY//COHERENT PHASE MICROSCOPY//DYNAMIC PHASE MICROSCOPY

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