Class information for: |
Basic class information |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
| Cluster id | Level | Cluster label | #P |
|---|---|---|---|
| 1 | 4 | PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY | 2188495 |
| 375 | 3 | MICROSCOPY//ULTRAMICROSCOPY//JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA | 34629 |
| 2570 | 2 | SCANNING//SCANDATE CATHODE//MICROSCOPY | 3949 |
| 22547 | 1 | E BEAM INSPECTION//ELECTRON BEAM TESTING//NONVISUAL DEFECTS | 399 |
Terms with highest relevance score |
| rank | Category | termType | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|---|
| 1 | E BEAM INSPECTION | authKW | 315955 | 1% | 100% | 4 |
| 2 | ELECTRON BEAM TESTING | authKW | 189566 | 2% | 40% | 6 |
| 3 | NONVISUAL DEFECTS | authKW | 157977 | 1% | 100% | 2 |
| 4 | VOLTAGE CONTRAST | authKW | 153178 | 2% | 24% | 8 |
| 5 | ELECTRON BEAM TESTER | authKW | 105317 | 1% | 67% | 2 |
| 6 | KOMMANDANTENSTR 60 | address | 105317 | 1% | 67% | 2 |
| 7 | SOREP | address | 105317 | 1% | 67% | 2 |
| 8 | ABSOLUTE POSITION CODING IMAGE | authKW | 78989 | 0% | 100% | 1 |
| 9 | ADV PROC DEVICE DEV GRP | address | 78989 | 0% | 100% | 1 |
| 10 | ANALYZER GEOMETRY | authKW | 78989 | 0% | 100% | 1 |
Web of Science journal categories |
| chi_square_rank | Category | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | Microscopy | 10881 | 18% | 0% | 71 |
| 2 | Engineering, Electrical & Electronic | 1750 | 40% | 0% | 158 |
| 3 | Physics, Applied | 1641 | 42% | 0% | 167 |
| 4 | Nanoscience & Nanotechnology | 1313 | 20% | 0% | 81 |
| 5 | Instruments & Instrumentation | 698 | 14% | 0% | 55 |
| 6 | Optics | 351 | 14% | 0% | 54 |
| 7 | Computer Science, Hardware & Architecture | 131 | 4% | 0% | 14 |
| 8 | Physics, Multidisciplinary | 60 | 7% | 0% | 29 |
| 9 | Engineering, Manufacturing | 51 | 2% | 0% | 9 |
| 10 | Engineering, General | 42 | 3% | 0% | 12 |
Address terms |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | KOMMANDANTENSTR 60 | 105317 | 1% | 67% | 2 |
| 2 | SOREP | 105317 | 1% | 67% | 2 |
| 3 | ADV PROC DEVICE DEV GRP | 78989 | 0% | 100% | 1 |
| 4 | E BEAM INSPECT | 78989 | 0% | 100% | 1 |
| 5 | ETUD SEPARAT ISOTOP CHEM PHYS | 78989 | 0% | 100% | 1 |
| 6 | SEMICOND DEVICE FAILURE ANALYSIS GRP | 78989 | 0% | 100% | 1 |
| 7 | DIAGNOST CHARACTERIZAT GRP | 39493 | 0% | 50% | 1 |
| 8 | INTEGRATED CIRCUIT ADV PROC ENGN | 39493 | 0% | 50% | 1 |
| 9 | HGEBIET WERKSTOFFE ELEKTROTECHN | 26328 | 0% | 33% | 1 |
| 10 | HGEBIET WERKSTOFFE ELEKTROTECH | 8775 | 0% | 11% | 1 |
Journals |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | SCANNING ELECTRON MICROSCOPY | 51243 | 7% | 2% | 26 |
| 2 | SIEMENS FORSCHUNGS-UND ENTWICKLUNGSBERICHTE-SIEMENS RESEARCH AND DEVELOPMENT REPORTS | 41189 | 3% | 4% | 12 |
| 3 | SCANNING | 18481 | 5% | 1% | 20 |
| 4 | SCANNING MICROSCOPY | 9039 | 3% | 1% | 12 |
| 5 | EDN MAGAZINE-ELECTRICAL DESIGN NEWS | 6865 | 1% | 4% | 2 |
| 6 | JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 6739 | 4% | 1% | 14 |
| 7 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 6066 | 9% | 0% | 36 |
| 8 | MICROELECTRONIC ENGINEERING | 5535 | 7% | 0% | 27 |
| 9 | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 3148 | 2% | 1% | 8 |
| 10 | MICROELECTRONICS RELIABILITY | 2391 | 4% | 0% | 15 |
Author Key Words |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Classes with closest relation at Level 1 |