Class information for:
Level 2: CHEMICAL MECHANICAL POLISHING//CMP//CHEMICAL MECHANICAL POLISHING CMP

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
15 4 METALLURGY & METALLURGICAL ENGINEERING//MATERIALS SCIENCE, MULTIDISCIPLINARY//MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 827627
472 3       ENGINEERING, MANUFACTURING//INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE//CUTTING FORCE 25360
2541 2             CHEMICAL MECHANICAL POLISHING//CMP//CHEMICAL MECHANICAL POLISHING CMP 4015
2447 1                   CHEMICAL MECHANICAL POLISHING//CMP//CHEMICAL MECHANICAL PLANARIZATION 2277
8802 1                   ABRASIVE FLOW MACHINING//MAGNETIC ABRASIVE FINISHING//BONNET POLISHING 1247
30589 1                   MAGNETIC COMPOUND FLUID MCF//MAGNETIC FLOAT POLISHING MFP//MAGNETIC COMPOUND FLUID 181
31790 1                   DRVNA INDUSTRIJA//PROD ORG//WOOD PROCESSING INDUSTRY 161
37185 1                   DICING BLADE//DIAMOND CHARGING PROCESS//LAPPING PLATE TOPOGRAPHY 87
38423 1                   AREAL SURFACE//FILAMENT TOOL//GUTTER BRUSHES 62

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 CHEMICAL MECHANICAL POLISHING authKW 2173208 10% 72% 386
2 CMP authKW 1039877 6% 55% 239
3 CHEMICAL MECHANICAL POLISHING CMP authKW 694129 3% 68% 131
4 CHEMICAL MECHANICAL PLANARIZATION authKW 685842 3% 82% 107
5 POLISHING authKW 639746 6% 34% 243
6 ABRASIVE FLOW MACHINING authKW 347714 1% 92% 48
7 CHEMICAL MECHANICAL PLANARIZATION CMP authKW 344033 1% 80% 55
8 MAGNETIC ABRASIVE FINISHING authKW 285370 1% 91% 40
9 MATERIAL REMOVAL authKW 241658 2% 42% 73
10 ABRASIVE authKW 191299 2% 30% 81

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Engineering, Manufacturing 64501 22% 1% 892
2 Materials Science, Coatings & Films 15258 14% 0% 575
3 Engineering, Mechanical 10100 17% 0% 675
4 Physics, Applied 5385 25% 0% 1021
5 Electrochemistry 5172 10% 0% 410
6 Materials Science, Multidisciplinary 4490 26% 0% 1035
7 Automation & Control Systems 3031 6% 0% 245
8 Engineering, Industrial 2843 5% 0% 195
9 Optics 2070 11% 0% 431
10 Nanoscience & Nanotechnology 1637 8% 0% 316

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 NANO SOI PROC 142409 1% 55% 33
2 FAB 98601 0% 74% 17
3 SHENZHEN MICRO NANO MFG 85448 0% 78% 14
4 ULTR RECIS SCI TECHNOL 78337 1% 37% 27
5 ADV MAT PROC 69839 3% 8% 114
6 ENERGY OURCES TECHNOL 62759 0% 40% 20
7 PROD ORG 48067 0% 88% 7
8 ULTRA PRECIS SCI TECHNOL 45159 1% 20% 29
9 STATE TRIBOL 44996 3% 5% 106
10 ADV SEMICOND MAT DEVICE DEV 41275 0% 48% 11

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY 50986 2% 7% 98
2 DRVNA INDUSTRIJA 48077 1% 15% 41
3 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 31832 9% 1% 355
4 INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 26923 5% 2% 207
5 INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE 22536 3% 3% 103
6 ELECTROCHEMICAL AND SOLID STATE LETTERS 19335 3% 2% 103
7 PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 18758 1% 4% 60
8 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 17565 1% 4% 60
9 MICROELECTRONIC ENGINEERING 16842 4% 1% 150
10 CIRP ANNALS-MANUFACTURING TECHNOLOGY 15338 2% 3% 69

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 CHEMICAL MECHANICAL POLISHING 2173208 10% 72% 386 Search CHEMICAL+MECHANICAL+POLISHING Search CHEMICAL+MECHANICAL+POLISHING
2 CMP 1039877 6% 55% 239 Search CMP Search CMP
3 CHEMICAL MECHANICAL POLISHING CMP 694129 3% 68% 131 Search CHEMICAL+MECHANICAL+POLISHING+CMP Search CHEMICAL+MECHANICAL+POLISHING+CMP
4 CHEMICAL MECHANICAL PLANARIZATION 685842 3% 82% 107 Search CHEMICAL+MECHANICAL+PLANARIZATION Search CHEMICAL+MECHANICAL+PLANARIZATION
5 POLISHING 639746 6% 34% 243 Search POLISHING Search POLISHING
6 ABRASIVE FLOW MACHINING 347714 1% 92% 48 Search ABRASIVE+FLOW+MACHINING Search ABRASIVE+FLOW+MACHINING
7 CHEMICAL MECHANICAL PLANARIZATION CMP 344033 1% 80% 55 Search CHEMICAL+MECHANICAL+PLANARIZATION+CMP Search CHEMICAL+MECHANICAL+PLANARIZATION+CMP
8 MAGNETIC ABRASIVE FINISHING 285370 1% 91% 40 Search MAGNETIC+ABRASIVE+FINISHING Search MAGNETIC+ABRASIVE+FINISHING
9 MATERIAL REMOVAL 241658 2% 42% 73 Search MATERIAL+REMOVAL Search MATERIAL+REMOVAL
10 ABRASIVE 191299 2% 30% 81 Search ABRASIVE Search ABRASIVE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 2


rank cluster_id2 link
1 3452 ELECTROCHEMICAL MACHINING//TOY GAME DESIGN//ELECTROCHEMICAL MICROMACHINING
2 3314 CLEANROOM//PHOTORESIST REMOVAL//MINIENVIRONMENT
3 305 ENGINEERING, MANUFACTURING//INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE//CUTTING FORCE
4 1370 NANOINDENTATION//SMALL PUNCH TEST//INDENTATION
5 2353 LASER INDUCED DAMAGE//OPTICAL COATINGS//LASER INDUCED DAMAGE THRESHOLD
6 2515 CAVITATION EROSION//SOLID PARTICLE EROSION//WEAR
7 962 MAGNETORHEOLOGICAL FLUID//ELECTRORHEOLOGICAL FLUID//MAGNETIC FLUID
8 3099 ELECTROMIGRATION//OPTICAL MOUSE//ELECTROMIGRATION EM
9 3509 ELECTRON BEAM ANNEALING//ION SPUTTERING//NANORIPPLES
10 1011 ATOMIC LAYER DEPOSITION//DIFFUSION BARRIER//CU METALLIZATION

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