Class information for:
Level 1: CERAM PHYS//RIN//SINGLE WAFER FURNACE SWF

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
893 2             SIGE//STRAINED SI//GERMANIUM 11547
20348 1                   CERAM PHYS//RIN//SINGLE WAFER FURNACE SWF 487

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 CERAM PHYS address 1215412 14% 28% 67
2 RIN address 374031 3% 34% 17
3 SINGLE WAFER FURNACE SWF authKW 258861 1% 100% 4
4 CONCENTRATED STRESS authKW 207087 1% 80% 4
5 SUSCEPTOR BASED RTP authKW 194146 1% 100% 3
6 ISOTHERMAL CAVITY authKW 129430 0% 100% 2
7 UBM RELIABILITY authKW 129430 0% 100% 2
8 TOP CUT STRESS LINER authKW 86286 0% 67% 2
9 RAPID THERMAL PROCESSING RTP authKW 79636 2% 15% 8
10 DAMASCENE GATE authKW 72801 1% 38% 3

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 4096 58% 0% 284
2 Physics, Condensed Matter 398 17% 0% 81
3 Materials Science, Multidisciplinary 396 23% 0% 110
4 Nanoscience & Nanotechnology 219 8% 0% 40
5 Spectroscopy 218 6% 0% 31
6 Instruments & Instrumentation 215 7% 0% 36
7 Engineering, Electrical & Electronic 191 14% 0% 68
8 Materials Science, Ceramics 139 4% 0% 18
9 Materials Science, Coatings & Films 126 4% 0% 20
10 Materials Science, Characterization, Testing 89 2% 0% 9

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 CERAM PHYS 1215412 14% 28% 67
2 RIN 374031 3% 34% 17
3 3ME PME 64715 0% 100% 1
4 BUBAL EUB 64715 0% 100% 1
5 ELECT OPTOELECT GRP 64715 0% 100% 1
6 HIROSHIMA NEC LTD 64715 0% 100% 1
7 INTERDISCIPLINARY RUMENTAT 64715 0% 100% 1
8 LEHRSTUHL KONTINUUMSMECH MAT 64715 0% 100% 1
9 MIRAI NANOELECT 64715 0% 100% 1
10 NAZL MAT DISPOSITIVI MICROELETTRON MDM 64715 0% 100% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY 5294 2% 1% 11
2 JOURNAL OF APPLIED PHYSICS 4209 17% 0% 84
3 JAPANESE JOURNAL OF APPLIED PHYSICS 2048 5% 0% 23
4 JOURNAL OF RAMAN SPECTROSCOPY 1833 3% 0% 13
5 SPECTROSCOPY 1649 1% 1% 5
6 ECS SOLID STATE LETTERS 1616 1% 1% 3
7 JOURNAL OF SPECTROSCOPY 1411 1% 1% 3
8 APPLIED PHYSICS LETTERS 1120 9% 0% 45
9 SEMICONDUCTOR SCIENCE AND TECHNOLOGY 777 2% 0% 10
10 SOLID STATE TECHNOLOGY 549 1% 0% 4

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 SINGLE WAFER FURNACE SWF 258861 1% 100% 4 Search SINGLE+WAFER+FURNACE+SWF Search SINGLE+WAFER+FURNACE+SWF
2 CONCENTRATED STRESS 207087 1% 80% 4 Search CONCENTRATED+STRESS Search CONCENTRATED+STRESS
3 SUSCEPTOR BASED RTP 194146 1% 100% 3 Search SUSCEPTOR+BASED+RTP Search SUSCEPTOR+BASED+RTP
4 ISOTHERMAL CAVITY 129430 0% 100% 2 Search ISOTHERMAL+CAVITY Search ISOTHERMAL+CAVITY
5 UBM RELIABILITY 129430 0% 100% 2 Search UBM+RELIABILITY Search UBM+RELIABILITY
6 TOP CUT STRESS LINER 86286 0% 67% 2 Search TOP+CUT+STRESS+LINER Search TOP+CUT+STRESS+LINER
7 RAPID THERMAL PROCESSING RTP 79636 2% 15% 8 Search RAPID+THERMAL+PROCESSING+RTP Search RAPID+THERMAL+PROCESSING+RTP
8 DAMASCENE GATE 72801 1% 38% 3 Search DAMASCENE+GATE Search DAMASCENE+GATE
9 4H SIC METAL OXIDE SEMICONDUCTOR FIELD EFFECT TRANSISTOR MOSFET 64715 0% 100% 1 Search 4H+SIC+METAL+OXIDE+SEMICONDUCTOR+FIELD+EFFECT+TRANSISTOR+MOSFET Search 4H+SIC+METAL+OXIDE+SEMICONDUCTOR+FIELD+EFFECT+TRANSISTOR+MOSFET
10 AMAGNETIC 64715 0% 100% 1 Search AMAGNETIC Search AMAGNETIC

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 18908 CHEMICAL AFFINITY TENSOR//GUIDED MODES OF ELECTRON WAVE//FILM EDGE
2 2006 STRAINED SI//STRAINED SILICON//SIGE
3 12506 ZONE MELTING RECRYSTALLIZATION//ARCHITECTURE TECH//ELECTRON DEVICE LETTERS
4 21049 INTERFACIAL SHEARS//NON LOCAL STRESS CURVATURE RELATIONS//NON UNIFORM MISFIT STRAIN
5 30041 DIRECT PHASE COMPUTATION//MACHINE DESIGN AUTOMOT ENGN//SAMARIUM TRIACETATE
6 9043 CONVERGENT BEAM ELECTRON DIFFRACTION//CBED//CONVERGENT BEAM ELECTRON DIFFRACTION CBED
7 5443 BULGE TEST//STRIP BENDING TEST//SINGLE CRYSTAL SILICON
8 33560 STRAIN INDUCED OPTICAL WAVEGUIDE//DIEE INFM//FOURIER TRANSFORM FT METHOD
9 19224 LO PHONON PLASMON COUPLED MODE//HEAVILY DOPED P GAAS//LO PHONON HOLE PLASMON MODE
10 8199 NANOMETRIC CUTTING//WIRE SAWING//DUCTILE MODE MACHINING

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