Class information for:
Level 1: PLANE PLASMA DISCHARGE//ELECT ENGN SEMICOND//IN SITU GRAZING INCIDENCE X RAY DIFFRACTOMETRY GIXRD

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
15 4 METALLURGY & METALLURGICAL ENGINEERING//MATERIALS SCIENCE, MULTIDISCIPLINARY//MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 827627
419 3       PLASMA SOURCES SCIENCE & TECHNOLOGY//REVIEW OF SCIENTIFIC INSTRUMENTS//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30297
2467 2             HIPIMS//PNCA//HPPMS 4221
26187 1                   PLANE PLASMA DISCHARGE//ELECT ENGN SEMICOND//IN SITU GRAZING INCIDENCE X RAY DIFFRACTOMETRY GIXRD 282

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PLANE PLASMA DISCHARGE authKW 335284 1% 100% 3
2 ELECT ENGN SEMICOND address 223523 1% 100% 2
3 IN SITU GRAZING INCIDENCE X RAY DIFFRACTOMETRY GIXRD authKW 223523 1% 100% 2
4 IN SITU GRAZING INCIDENCE X RAY REFLECTOMETRY GIXR authKW 223523 1% 100% 2
5 REAL TIME TEMPERATURE MEASUREMENTS authKW 223523 1% 100% 2
6 ENERGY INFLUX authKW 167639 1% 50% 3
7 CALORIMETRIC PROBE authKW 125728 1% 38% 3
8 ACTIVE LANGMUIR PROBE authKW 111761 0% 100% 1
9 AMORPHOUS SILICON BASED MATERIALS authKW 111761 0% 100% 1
10 BLDG TECHNOL CHAIR BLDG PHYS address 111761 0% 100% 1

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 2773 63% 0% 177
2 Materials Science, Coatings & Films 2180 20% 0% 57
3 Physics, Fluids & Plasmas 424 10% 0% 28
4 Instruments & Instrumentation 281 11% 0% 30
5 Physics, Condensed Matter 148 14% 0% 39
6 Materials Science, Multidisciplinary 124 18% 0% 50
7 Nanoscience & Nanotechnology 90 7% 0% 20
8 Optics 59 7% 0% 21
9 Engineering, General 55 4% 0% 11
10 Engineering, Electrical & Electronic 35 9% 0% 26

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ELECT ENGN SEMICOND 223523 1% 100% 2
2 BLDG TECHNOL CHAIR BLDG PHYS 111761 0% 100% 1
3 ENGN ELECT ELECT COMMUN 111761 0% 100% 1
4 HL MI 111761 0% 100% 1
5 LEHRSTUHL OBERFLACHENWISSEN AFT 111761 0% 100% 1
6 PLASMA TECHNOL SUR ES PLATO 111761 0% 100% 1
7 SAMSUNG SKKU GR HENE SSCG 111761 0% 100% 1
8 SOLARENERGIEFOR ENERGIESPEICHERMAT 111761 0% 100% 1
9 TECHNOL HOLON 111761 0% 100% 1
10 PHYS INTER ES COUCHES MINES 55880 0% 50% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 3774 8% 0% 22
2 PLASMA DEVICES AND OPERATIONS 3561 1% 1% 3
3 CONTRIBUTIONS TO PLASMA PHYSICS 2865 3% 0% 8
4 VACUUM 2233 5% 0% 14
5 INSTRUMENTS AND EXPERIMENTAL TECHNIQUES 2192 3% 0% 9
6 JOURNAL OF SURFACE INVESTIGATION 2118 2% 0% 5
7 PISMA V ZHURNAL TEKHNICHESKOI FIZIKI 1078 2% 0% 7
8 PLASMA PROCESSES AND POLYMERS 1059 1% 0% 4
9 PLASMA PHYSICS REPORTS 980 2% 0% 5
10 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 941 4% 0% 12

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 PLANE PLASMA DISCHARGE 335284 1% 100% 3 Search PLANE+PLASMA+DISCHARGE Search PLANE+PLASMA+DISCHARGE
2 IN SITU GRAZING INCIDENCE X RAY DIFFRACTOMETRY GIXRD 223523 1% 100% 2 Search IN+SITU+GRAZING+INCIDENCE+X+RAY+DIFFRACTOMETRY+GIXRD Search IN+SITU+GRAZING+INCIDENCE+X+RAY+DIFFRACTOMETRY+GIXRD
3 IN SITU GRAZING INCIDENCE X RAY REFLECTOMETRY GIXR 223523 1% 100% 2 Search IN+SITU+GRAZING+INCIDENCE+X+RAY+REFLECTOMETRY+GIXR Search IN+SITU+GRAZING+INCIDENCE+X+RAY+REFLECTOMETRY+GIXR
4 REAL TIME TEMPERATURE MEASUREMENTS 223523 1% 100% 2 Search REAL+TIME+TEMPERATURE+MEASUREMENTS Search REAL+TIME+TEMPERATURE+MEASUREMENTS
5 ENERGY INFLUX 167639 1% 50% 3 Search ENERGY+INFLUX Search ENERGY+INFLUX
6 CALORIMETRIC PROBE 125728 1% 38% 3 Search CALORIMETRIC+PROBE Search CALORIMETRIC+PROBE
7 ACTIVE LANGMUIR PROBE 111761 0% 100% 1 Search ACTIVE+LANGMUIR+PROBE Search ACTIVE+LANGMUIR+PROBE
8 AMORPHOUS SILICON BASED MATERIALS 111761 0% 100% 1 Search AMORPHOUS+SILICON+BASED+MATERIALS Search AMORPHOUS+SILICON+BASED+MATERIALS
9 BOHM FLUX 111761 0% 100% 1 Search BOHM+FLUX Search BOHM+FLUX
10 BOMBARDMENT INDUCED LIGHT EMISSION 111761 0% 100% 1 Search BOMBARDMENT+INDUCED+LIGHT+EMISSION Search BOMBARDMENT+INDUCED+LIGHT+EMISSION

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 23596 RAPID THERMAL PROCESSING//RAPID THERMAL PROCESSING RTP//SILICON NANOELECT
2 2132 HIPIMS//HPPMS//HIGH POWER IMPULSE MAGNETRON SPUTTERING
3 26765 HOLLOW CATHODE//FUSED HOLLOW CATHODE//PLASMA GRP
4 9185 REFLECTANCE ANISOTROPY SPECTROSCOPY//REFLECTION ANISOTROPY SPECTROSCOPY//SURFACE PHOTOABSORPTION
5 38080 HIGH FREQUENCY ELECTRON CURRENT//MICROWAVE RESONATOR METHOD//TEMPORAL ELECTRON RELAXATION
6 32874 SEMICONDUCTOR FERROELECTRIC//PHOTOFERROELECTRICS//CADMIUM OXALATE
7 1654 SIO2 ETCHING//PLASMA ETCHING//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
8 27147 PHOTORESIST REMOVAL//WET OZONE//RESIST REMOVAL
9 32193 ERBIUM FILM//HE ANALYSIS//ALUMINIUM DRAWN WIRE
10 741 PLASMA SOURCES SCIENCE & TECHNOLOGY//CAPACITIVELY COUPLED PLASMA//PLASMA ATOM PHYS

Go to start page