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FEK3360 Advanced Hands-on MEMS Course 10.0 credits

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For course offering

Autumn 2023 Start 30 Oct 2023 programme students

Application code


Headings with content from the Course syllabus FEK3360 (Spring 2019–) are denoted with an asterisk ( )

Content and learning outcomes

Course contents

The students will learn  about the design of micro-electromechanical systems, and will be guided through a complete microsystem engineering cycle in which they will do design, fabrication, and characterization of their own microdevice concepts. The students will learn to use state-of-the art microsystem engineering tools, including finite-element modeling (FEM), CAD layouting, clean-room microfabrication machines, and electrical/mechanical/optical characterization tools. 

Intended learning outcomes

Upon completion of the course, the students will be able to:

  • conceptualize microsystem/microactuator devices for research tasks and for given real-world specifications,
  • model, simulate and design microsystems in state-of-the-art design software,
  • fabricate microsystem devices in a state-of-the-art semiconductor clean-room laboratory,
  • characterize the performance of microsystem devices,
  • analyse failure mechanisms and to propose design improvements for a subsequent engineering cycle
  • independently carry out research projects involving micro-electromechanical systems    

Literature and preparations

Specific prerequisites

registered as PhD student at Swedish university or equivalent 

Recommended prerequisites

Basic knowledge i physics


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Examination and completion

If the course is discontinued, students may request to be examined during the following two academic years.

Grading scale

P, F


  • EXA1 - Examination, 10.0 credits, grading scale: P, F

Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

The examiner may apply another examination format when re-examining individual students.

Other requirements for final grade

  • attendance of the introductory lectures
  • project work in team
  • active participation in weekly review meetings
  • keeping of hand-in deadlines (for design, intermediate and final report)
  • approved 20 min oral presentation of project results
  • approved intermediate and final reports

Opportunity to complete the requirements via supplementary examination

No information inserted

Opportunity to raise an approved grade via renewed examination

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Ethical approach

  • All members of a group are responsible for the group's work.
  • In any assessment, every student shall honestly disclose any help received and sources used.
  • In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

Further information

Course room in Canvas

Registered students find further information about the implementation of the course in the course room in Canvas. A link to the course room can be found under the tab Studies in the Personal menu at the start of the course.

Offered by

Main field of study

This course does not belong to any Main field of study.

Education cycle

Third cycle

Add-on studies

No information inserted


Joachim Oberhammer (

Postgraduate course

Postgraduate courses at EECS/Micro and Nano Systems