FEK3360 Advanced Hands-on MEMS Course 10.0 credits

Avancerad hands-on MEMS kurs

The course is designed as a project course for PhD students who would like to get a deepened "hands-on" experience in the world of nano and micro-electromechnical systems (NEMS/MEMS). The course is intended to students who have some connection with microsystems in their PhD research work. The students will conceptualize, design, fabricate and characterize their own MEMS devices, for given real-world applications. The course is an extension of the EK2360 undergraduate course, and provides more in-depth coverage of the subject, more advanced tasks given to the students, and requires additional and more independent work of the students in particular during the fabrication and evaluation phase.    

Offering and execution

Course offering missing for current semester as well as for previous and coming semesters

Course information

Content and learning outcomes

Course contents *

The students will learn  about the design of micro-electromechanical systems, and will be guided through a complete microsystem engineering cycle in which they will do design, fabrication, and characterization of their own microdevice concepts. The students will learn to use state-of-the art microsystem engineering tools, including finite-element modeling (FEM), CAD layouting, clean-room microfabrication machines, and electrical/mechanical/optical characterization tools. 

Intended learning outcomes *

Upon completion of the course, the students will be able to:

  • conceptualize microsystem/microactuator devices for research tasks and for given real-world specifications,
  • model, simulate and design microsystems in state-of-the-art design software,
  • fabricate microsystem devices in a state-of-the-art semiconductor clean-room laboratory,
  • characterize the performance of microsystem devices,
  • analyse failure mechanisms and to propose design improvements for a subsequent engineering cycle
  • independently carry out research projects involving micro-electromechanical systems    

Course Disposition

After the introductory lectures (course phase 1: lectures) the students, working in teams of 2 (max. 3) people, get a MEMS design problem, for which they have to conceptualize a solution, decide on which actuators to use, and to model and simulate their solutions, as well as to draw the CAD layouts for manufacturing (course phase 2: design). During that phase 2, there will be weekly review meetings guiding the students’ progress. After phase 2, there are two deadlines: handing in of the layouts, and handing in of an intermediate report. Then, the students are fabricating their microsystems in the KTH cleanroom (phase 3: fabrication), are then are characterizing their devices and have to identify failure mechanisms and to suggest design improvements (phase 4: characterization). The course completes with a final report and a final presentation (phase 5: examination). In order to pass the course, the students need to complete all phases, but not necessarily in the same course year.     

Literature and preparations

Specific prerequisites *

registered as PhD student at Swedish university or equivalent 

Recommended prerequisites

Basic knowledge i physics


All equipment provided by the course organizer.    


Föreläsningsmaterial, forskningspublikationer som distribueras under kursen, labbmanualer    

Examination and completion

If the course is discontinued, students may request to be examined during the following two academic years.

Grading scale *

P, F

Examination *

    Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

    The examiner may apply another examination format when re-examining individual students.

    Other requirements for final grade *

    • attendance of the introductory lectures
    • project work in team
    • active participation in weekly review meetings
    • keeping of hand-in deadlines (for design, intermediate and final report)
    • approved 20 min oral presentation of project results
    • approved intermediate and final reports

    Opportunity to complete the requirements via supplementary examination

    No information inserted

    Opportunity to raise an approved grade via renewed examination

    No information inserted


    Joachim Oberhammer

    Ethical approach *

    • All members of a group are responsible for the group's work.
    • In any assessment, every student shall honestly disclose any help received and sources used.
    • In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

    Further information

    Course web

    Further information about the course can be found on the Course web at the link below. Information on the Course web will later be moved to this site.

    Course web FEK3360

    Offered by

    EECS/Micro and Nano Systems

    Main field of study *

    No information inserted

    Education cycle *

    Third cycle

    Add-on studies

    No information inserted


    Joachim Oberhammer

    Postgraduate course

    Postgraduate courses at EECS/Micro and Nano Systems