Class information for:
Level 2: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING//RUN TO RUN CONTROL//VIRTUAL METROLOGY

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
12 4 COMPUTER SCIENCE, THEORY & METHODS//COMPUTER SCIENCE, INFORMATION SYSTEMS//COMPUTER SCIENCE, ARTIFICIAL INTELLIGENCE 1181119
295 3       COMPUTER SCIENCE, HARDWARE & ARCHITECTURE//IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS//IEEE TRANSACTIONS ON VERY LARGE SCALE INTEGRATION (VLSI) SYSTEMS 41956
2801 2             IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING//RUN TO RUN CONTROL//VIRTUAL METROLOGY 3310
10278 1                   MARCH TEST//MEMORY TESTING//IEEE JOURNAL OF SOLID-STATE CIRCUITS 1107
14047 1                   RUN TO RUN CONTROL//VIRTUAL METROLOGY//IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 827
16417 1                   CRITICAL AREA//IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING//WAFER MAP 682
22929 1                   IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY//THERMAL ENGN TECHNOL//IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART B-ADVANCED PACKAGING 386
25320 1                   CATASTROPHIC FAULT PATTERNS//DEGRADABLE VLSI ARRAY//RECONFIGURATION 308

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING journal 733403 11% 22% 351
2 RUN TO RUN CONTROL authKW 406944 2% 75% 57
3 VIRTUAL METROLOGY authKW 291536 1% 88% 35
4 MARCH TEST authKW 230362 1% 73% 33
5 MEMORY TESTING authKW 208018 2% 43% 51
6 IEEE JOURNAL OF SOLID-STATE CIRCUITS journal 193367 13% 5% 414
7 CRITICAL AREA authKW 177931 1% 69% 27
8 BUILT IN SELF REPAIR BISR authKW 137457 1% 76% 19
9 VIRTUAL METROLOGY VM authKW 133278 0% 100% 14
10 BUILT IN REDUNDANCY ANALYSIS BIRA authKW 123758 0% 100% 13

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Engineering, Electrical & Electronic 45521 68% 0% 2243
2 Engineering, Manufacturing 32378 17% 1% 576
3 Computer Science, Hardware & Architecture 30885 17% 1% 575
4 Physics, Applied 4225 25% 0% 824
5 Physics, Condensed Matter 2165 15% 0% 501
6 Computer Science, Software Engineering 1801 6% 0% 193
7 Computer Science, Theory & Methods 1423 6% 0% 209
8 Engineering, Industrial 1365 4% 0% 125
9 Operations Research & Management Science 1333 5% 0% 165
10 Computer Science, Information Systems 783 5% 0% 153

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PROBE TEST ENGN TEAM 38079 0% 100% 4
2 SECT COMP ENGN 30462 0% 80% 4
3 DEFECT REDUCT TECHNOL 28560 0% 100% 3
4 ENGN ADV ELECT MAT PROC 28560 0% 100% 3
5 MICROMECHATRON 26356 0% 46% 6
6 ADV RELIABLE SYST 25384 0% 67% 4
7 MFG INFORMAT SYST 19740 1% 12% 18
8 ADV TEST CHIP 19040 0% 100% 2
9 ALGORITHM LANGUAGES 19040 0% 100% 2
10 AUTOMATED PRECIS MFG 19040 0% 100% 2

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 733403 11% 22% 351
2 IEEE JOURNAL OF SOLID-STATE CIRCUITS 193367 13% 5% 414
3 IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY 50644 3% 6% 83
4 JOURNAL OF ELECTRONIC TESTING-THEORY AND APPLICATIONS 36310 2% 6% 65
5 IEEE DESIGN & TEST OF COMPUTERS 33464 2% 6% 59
6 SOLID STATE TECHNOLOGY 27149 2% 4% 73
7 IBM JOURNAL OF RESEARCH AND DEVELOPMENT 22689 2% 3% 69
8 IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART B-ADVANCED PACKAGING 20850 1% 8% 29
9 IEEE TRANSACTIONS ON COMPUTERS 18202 3% 2% 101
10 IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS 16088 3% 2% 92

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 RUN TO RUN CONTROL 406944 2% 75% 57 Search RUN+TO+RUN+CONTROL Search RUN+TO+RUN+CONTROL
2 VIRTUAL METROLOGY 291536 1% 88% 35 Search VIRTUAL+METROLOGY Search VIRTUAL+METROLOGY
3 MARCH TEST 230362 1% 73% 33 Search MARCH+TEST Search MARCH+TEST
4 MEMORY TESTING 208018 2% 43% 51 Search MEMORY+TESTING Search MEMORY+TESTING
5 CRITICAL AREA 177931 1% 69% 27 Search CRITICAL+AREA Search CRITICAL+AREA
6 BUILT IN SELF REPAIR BISR 137457 1% 76% 19 Search BUILT+IN+SELF+REPAIR+BISR Search BUILT+IN+SELF+REPAIR+BISR
7 VIRTUAL METROLOGY VM 133278 0% 100% 14 Search VIRTUAL+METROLOGY+VM Search VIRTUAL+METROLOGY+VM
8 BUILT IN REDUNDANCY ANALYSIS BIRA 123758 0% 100% 13 Search BUILT+IN+REDUNDANCY+ANALYSIS+BIRA Search BUILT+IN+REDUNDANCY+ANALYSIS+BIRA
9 SEMICONDUCTOR MANUFACTURING 118966 2% 17% 73 Search SEMICONDUCTOR+MANUFACTURING Search SEMICONDUCTOR+MANUFACTURING
10 AUTOMATIC VIRTUAL METROLOGY AVM 114238 0% 100% 12 Search AUTOMATIC+VIRTUAL+METROLOGY+AVM Search AUTOMATIC+VIRTUAL+METROLOGY+AVM

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 2



rank cluster_id2 link
1 1155 SOFT ERROR//SINGLE EVENT UPSET//IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS
2 1108 IEEE TRANSACTIONS ON VERY LARGE SCALE INTEGRATION (VLSI) SYSTEMS//COMPUTER SCIENCE, HARDWARE & ARCHITECTURE//PROCESS VARIATION
3 2059 STATISTICAL PROCESS CONTROL//AVERAGE RUN LENGTH//CONTROL CHARTS
4 1480 PLASMA ETCHING//ELECT DEVICES MAT TECHNOL//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
5 3533 PACKET CLASSIFICATION//IP LOOKUP//CONTENT ADDRESSABLE MEMORY CAM
6 2593 DATA RECONCILIATION//SOFT SENSOR//PROCESS MONITORING
7 3638 COMPUTER DESIGN//IEEE MICRO//ELECTRONICS
8 1904 INTERCONNECTION NETWORKS//HYPERCUBE//STAR GRAPH
9 2918 POLYIMIDE//PHOTOSENSITIVE POLYIMIDE//POLYAMIC ACID
10 197 IEEE TRANSACTIONS ON ELECTRON DEVICES//MOSFET//FLASH MEMORY

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