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EK2350 Microsystem Technology 7.5 credits

MicroSystem Technology (MST, also called MEMS or MicroElectroMechanical Systems) is an interdisciplinary field which deals with the world of technical components and systems with feature sizes in the range sub-millimetre down to tens of nanometers. Application areas range from automotive and IT systems to medical and biochemical applications.

The course consist of:

  • a lecture series describing various microsystems and microsensors from fundamental physical effects to systems,
  • group assignments,
  • project laborations where micromechanical sensors are fabricated and characterized,
  • a mandatory industry site visit.

The examination is mainly based on the group assignments, but also to a lesser extent on a short written exam.

About course offering

For course offering

Spring 2025 MST programme students

Target group

Open for all master's programmes as long as it can be included in your programme.

Part of programme

Master's Programme, Electromagnetics, Fusion and Space Engineering, åk 1, MIC, Conditionally Elective

Master's Programme, Embedded Systems, åk 1, INEL, Recommended

Master's Programme, Embedded Systems, åk 1, INPF, Recommended

Master's Programme, Nanotechnology, åk 1, NTEB, Conditionally Elective


P4 (7.5 hp)


17 Mar 2025
2 Jun 2025

Pace of study


Form of study

Normal Daytime

Language of instruction


Course location

KTH Campus

Number of places

7 - 70

Planned modular schedule


For course offering

Spring 2025 MST programme students

Application code



For course offering

Spring 2025 MST programme students


Göran Stemme (


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Course coordinator

No information inserted


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Headings with content from the Course syllabus EK2350 (Spring 2019–) are denoted with an asterisk ( )

Content and learning outcomes

Course contents

A seminar series which provides the students with both an overview of different aspects of microengineering and with a deeper insight in the specific techniques for the most common application areas.

  • The first set of seminars deal with an introduction to the field, the fabrication of microsystems and the fundamental physical effects utilized within microengineering.
  • Thereafter second set of lectures give a detailed overview of microsensors for quantifying position, tension, acceleration, temperature, pressure, and flow.
  • The last set of seminars illustrate the use of microsystems in various applications (i.e. medical systems, automotive systems, etc).
  • Moreover, a guest lecturer from industry describes how micromechanic components are manufactured on an industrial scale and gives insight into how microsystems can be commercialized.
  • Yet another guest lecturer will give an introduction to the related emerging field of nanotechnology.

Intended learning outcomes

The overall goal of this course is to introduce engineering students to the world of microengineering, i.e. the world of technical components and systems with feature sizes in the range sub-millimetre down to 100 nm. The area is often also referred to as a “MEMS” – Micro Elcreomechnical Systems. The following aspects will be addressed in particular: basic physical principles used for sensing and actuation in microtechnology, methods for microfabrication, the design and operation of the most commonly used micro-components and systems, and the use of microtechnology in specific application areas.

After following the course, the students will have obtained the following skills in particular:

  • With respect to

- the basic physical sensing and actuation principles, including microfluidics,

- silicon microfabrication technology, and

- the most relevant types of optical, resonant, inertial, flow, pressure, radiation and thermal microsensors, as well as microfluidic components and RF and telecom devices,

be able to

  1. give an overview of the most commonly used methods and techniques
  2. explain how these work and can be implemented
  3. compare their advantages and drawbacks
  4. use their knowledge to make a structured and educated approach to engineering challenges involving microsystem technology.
  • With respect to the specific application fields of medical, automotive, biotechnical, optical and telecommunication systems

be able to

5. explain the potential of microsystem technology in terms of size, cost and/or performance.

In addition, the students will gain deeper insight by performing practical work in a clean-room environment and by making a performance evaluation of a microsystem.

Literature and preparations

Specific prerequisites

For single course students: 120 credits and documented proficiency in English B or equivalent

Recommended prerequisites

Fundamental knowledge in physics, including measurement technologies and electronics.




Material som utdelas under kursens gång.

Lecture notes provided be the department 

Examination and completion

If the course is discontinued, students may request to be examined during the following two academic years.

Grading scale

A, B, C, D, E, FX, F


  • INL3 - Written Assignment, 4.0 credits, grading scale: A, B, C, D, E, FX, F
  • LAB3 - Laboration, 0.5 credits, grading scale: P, F
  • NÄR3 - Presence, 2.0 credits, grading scale: P, F
  • TEN3 - Written Exam, 1.0 credits, grading scale: A, B, C, D, E, FX, F

Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

The examiner may apply another examination format when re-examining individual students.

Other requirements for final grade

To pass the course, the following is required

  • Mandatory presence in at least 80% of the seminars and at the comulsory study visit (NÄR3).
  • A clean-room laboration (LAB3).
  • A passing grade on the written exam (TEN3), mainly testing learning outcomes 1 and 2 (TEN3). This will be graded and contributes to course grade.
  • Passing grade on the group assignments that mainly tests learning outcomes 3, 4 and 5 as well as a written laboration report (INL3). These will be graded and contributes to the course grade.

The course grade is a based on the grades on the written exam and the group assignments such that the group assignment grade contributes more.

Opportunity to complete the requirements via supplementary examination

The grade Fx can be raised to a maximum of E via supplementary examination.

Opportunity to raise an approved grade via renewed examination

Renewed examination for raising grades is allowed if space is available in exam halls.


Ethical approach

  • All members of a group are responsible for the group's work.
  • In any assessment, every student shall honestly disclose any help received and sources used.
  • In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

Further information

Course room in Canvas

Registered students find further information about the implementation of the course in the course room in Canvas. A link to the course room can be found under the tab Studies in the Personal menu at the start of the course.

Offered by

Main field of study

Electrical Engineering

Education cycle

Second cycle

Add-on studies

EK2360 Hands-On Microelectromechanical Systems Engineering
EK212X Degree Project in Electrical Measurements, Second Level
EK213X Degree Project in Microsystem technology, Second Level


Göran Stemme (

Supplementary information

In this course, the EECS code of honor applies, see: