EK2350 Microsystem Technology 7.5 credits


MicroSystem Technology (MST, also called MEMS or MicroElectroMechanical Systems) is an interdisciplinary field which deals with the world of technical components and systems with feature sizes in the range sub-millimetre down to tens of nanometers. Application areas range from automotive and IT systems to medical and biochemical applications.

The course consist of:

  • a lecture series describing various microsystems and microsensors from fundamental physical effects to systems,
  • group assignments,
  • project laborations where micromechanical sensors are fabricated and characterized,
  • a mandatory industry site visit.

The examination is mainly based on the group assignments, but also to a lesser extent on a short written exam.

  • Education cycle

    Second cycle
  • Main field of study

    Electrical Engineering
  • Grading scale

    A, B, C, D, E, FX, F

Course offerings

Spring 19 for programme students

Spring 20 MST for programme students

Intended learning outcomes

The overall goal of this course is to introduce engineering students to the world of microengineering, i.e. the world of technical components and systems with feature sizes in the range sub-millimetre down to 100 nm. The area is often also referred to as a “MEMS” – Micro Elcreomechnical Systems. The following aspects will be addressed in particular: basic physical principles used for sensing and actuation in microtechnology, methods for microfabrication, the design and operation of the most commonly used micro-components and systems, and the use of microtechnology in specific application areas.

After following the course, the students will have obtained the following skills in particular:

  • With respect to

- the basic physical sensing and actuation principles, including microfluidics,

- silicon microfabrication technology, and

- the most relevant types of optical, resonant, inertial, flow, pressure, radiation and thermal microsensors, as well as microfluidic components and RF and telecom devices,

be able to

  1. give an overview of the most commonly used methods and techniques
  2. explain how these work and can be implemented
  3. compare their advantages and drawbacks
  4. use their knowledge to make a structured and educated approach to engineering challenges involving microsystem technology.
  • With respect to the specific application fields of medical, automotive, biotechnical, optical and telecommunication systems

be able to

5. explain the potential of microsystem technology in terms of size, cost and/or performance.

In addition, the students will gain deeper insight by performing practical work in a clean-room environment and by making a performance evaluation of a microsystem.

Course main content

A seminar series which provides the students with both an overview of different aspects of microengineering and with a deeper insight in the specific techniques for the most common application areas.

  • The first set of seminars deal with an introduction to the field, the fabrication of microsystems and the fundamental physical effects utilized within microengineering.
  • Thereafter second set of lectures give a detailed overview of microsensors for quantifying position, tension, acceleration, temperature, pressure, and flow.
  • The last set of seminars illustrate the use of microsystems in various applications (i.e. medical systems, automotive systems, etc).
  • Moreover, a guest lecturer from industry describes how micromechanic components are manufactured on an industrial scale and gives insight into how microsystems can be commercialized.
  • Yet another guest lecturer will give an introduction to the related emerging field of nanotechnology.


Group assignments will be handed out in relation to the seminars in order to stimulate further studies of the different topics. The assignments will be corrected and the result will count towards the course grade.

The final exam will test on the content of seminars and group assignments. The result counts towards the course grade.

A project laboration including clean-room based manufacturing and evaluation of microsystem technology component and a mandatory industry site visit at a company fabricating microsystem components give concrete examples.


For single course students: 120 credits and documented proficiency in English B or equivalent

Recommended prerequisites

Fundamental knowledge in physics, including measurement technologies and electronics.


Material som utdelas under kursens gång.

Lecture notes provided be the department 

Required equipment



  • INL3 - Written Assignment, 4.0, grading scale: A, B, C, D, E, FX, F
  • LAB3 - Laboration, 0.5, grading scale: P, F
  • NÄR3 - Presence, 2.0, grading scale: P, F
  • TEN3 - Written Exam, 1.0, grading scale: A, B, C, D, E, FX, F

Requirements for final grade

To pass the course, the following is required

  • Mandatory presence in at least 80% of the seminars and at the comulsory study visit (NÄR3).
  • A clean-room laboration (LAB3).
  • A passing grade on the written exam (TEN3), mainly testing learning outcomes 1 and 2 (TEN3). This will be graded and contributes to course grade.
  • Passing grade on the group assignments that mainly tests learning outcomes 3, 4 and 5 as well as a written laboration report (INL3). These will be graded and contributes to the course grade.

The course grade is a based on the grades on the written exam and the group assignments such that the group assignment grade contributes more.

Offered by

EECS/Intelligent Systems


Göran Stemme (stemme@kth.se)


Göran Stemme <stemme@kth.se>

Add-on studies

EK2360 Hands-On Microelectromechanical Systems Engineering
EK212X Degree Project in Electrical Measurements, Second Level
EK213X Degree Project in Microsystem technology, Second Level


Course syllabus valid from: Spring 2019.
Examination information valid from: Spring 2019.