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FEK3300 Applied Micro- and Nanofabrication 15.0 credits

Course offering missing for current semester as well as for previous and coming semesters
Headings with content from the Course syllabus FEK3300 (Spring 2019–) are denoted with an asterisk ( )

Content and learning outcomes

Course contents

The course consists of practical training on ten micro or nanofabrication tools. The choice of tools should reflect necessary tools to independently be able to fabricate and evaluate a micro or nanostructure.

Intended learning outcomes

After the completed course the student shall be able to:

  •  Describe how a set microfabrication tool or processes work and critically assess performance limitations.
  • Master operation of these microfabrication tools or processes.
  • Evaluate fabrication results from these tools and processes.
  • Fabricate micro or nanostructures independently.

Course disposition

No information inserted

Literature and preparations

Specific prerequisites

This course is open for students enrolled in the KTH EES third-cycle study program.

Recommended prerequisites

EK2350 Microsystem technology or similar course.


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Examination and completion

If the course is discontinued, students may request to be examined during the following two academic years.

Grading scale

P, F


  • EXA1 - Examination, 15,0 hp, betygsskala: P, F

Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

The examiner may apply another examination format when re-examining individual students.

Other requirements for final grade

To pass the course successful tool license or equivalent on ten microfabrication and characterization tools for micro or nanofabrication is required. The choice of tools should cover at least one pattern definition tool, one material removal tool, one material deposition tool and one characterization tool.

Opportunity to complete the requirements via supplementary examination

No information inserted

Opportunity to raise an approved grade via renewed examination

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Profile picture Niclas Roxhed

Ethical approach

  • All members of a group are responsible for the group's work.
  • In any assessment, every student shall honestly disclose any help received and sources used.
  • In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

Further information

Course web

Further information about the course can be found on the Course web at the link below. Information on the Course web will later be moved to this site.

Course web FEK3300

Offered by

EECS/Micro and Nano Systems

Main field of study

No information inserted

Education cycle

Third cycle

Add-on studies

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Niclas Roxhed (

Postgraduate course

Postgraduate courses at EECS/Micro and Nano Systems