FEK3300 Applied Micro- and Nanofabrication 15.0 credits

Tillämpad mikro- och nanofabrikation

Offering and execution

Course offering missing for current semester as well as for previous and coming semesters

Course information

Content and learning outcomes

Course contents *

The course consists of practical training on ten micro or nanofabrication tools. The choice of tools should reflect necessary tools to independently be able to fabricate and evaluate a micro or nanostructure.

Intended learning outcomes *

After the completed course the student shall be able to:

  •  Describe how a set microfabrication tool or processes work and critically assess performance limitations.
  • Master operation of these microfabrication tools or processes.
  • Evaluate fabrication results from these tools and processes.
  • Fabricate micro or nanostructures independently.

Course Disposition

The student get hands-on training from a tool instructor to obtain a tool license and develop own process recipies/procedures for the tool.

Literature and preparations

Specific prerequisites *

This course is open for students enrolled in the KTH EES third-cycle study program.

Recommended prerequisites

EK2350 Microsystem technology or similar course.

Equipment

No information inserted

Literature

M. J. Madou, Fundamentals of microfabrication 2ed, ISBN 0849308267.

Examination and completion

If the course is discontinued, students may request to be examined during the following two academic years.

Grading scale *

P, F

Examination *

    Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

    The examiner may apply another examination format when re-examining individual students.

    Other requirements for final grade *

    To pass the course successful tool license or equivalent on ten microfabrication and characterization tools for micro or nanofabrication is required. The choice of tools should cover at least one pattern definition tool, one material removal tool, one material deposition tool and one characterization tool.

    Opportunity to complete the requirements via supplementary examination

    No information inserted

    Opportunity to raise an approved grade via renewed examination

    No information inserted

    Examiner

    Niclas Roxhed

    Ethical approach *

    • All members of a group are responsible for the group's work.
    • In any assessment, every student shall honestly disclose any help received and sources used.
    • In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

    Further information

    Course web

    No information inserted

    Offered by

    EECS/Micro and Nano Systems

    Main field of study *

    No information inserted

    Education cycle *

    Third cycle

    Add-on studies

    No information inserted

    Contact

    Niclas Roxhed

    Postgraduate course

    Postgraduate courses at EECS/Micro and Nano Systems