FIH3607 Epitaxy of Semiconductor Materials 10.5 credits
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Application
For course offering
Autumn 2023 Start 30 Oct 2023 programme students
Application code
51662
Content and learning outcomes
Course contents
The course provides an introduction to crystal growth technology with several examples of technical implementations as well as specific materials systems. The fundamentals of the crystal growth process are reviewed as based on gas kinetics, deposition theory and thermodynamics, and a number of thin-film epitaxial processes are described in detail.
Intended learning outcomes
This course will give an advanced level treatment of crystal growth basics, methods of instrumentation for thin-film epitaxial growth, as well as an orientation of specific materials systems of interest for a range of micro- and optoelectronics applications.
After a successful completion of the course, students should be able to:
. Describe fundamental processes of crystal growth taking account of both thermodynamic and kinetic aspects
. Describe the liquid-phase epitaxy (LPE) process
. Describe the hydride vapor-phase epitaxy (HVPE) process
. Describe the metal-organic vapor-phase epitaxy (MOVPE) process
. Describe the moelcular-beam epitaxy (MBE) process
. Describe the process and applications of selective area growth (SAG)
. Understand the basic fundaments for the numerical modeling of the epitaxial process
. Describe the properties and applications for a range of compound semiconductor materials, including those based on the GsAs, InP, SIC, SiGe, GaN systems, as well as nanostructured materials.
Literature and preparations
Specific prerequisites
Basic physics and chemistry courses
Recommended prerequisites
Basic physics and chemistry courses
Equipment
Literature
Examination and completion
If the course is discontinued, students may request to be examined during the following two academic years.
Grading scale
Examination
- EXA1 - Examination, 10.5 credits, grading scale: P, F
Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.
The examiner may apply another examination format when re-examining individual students.
Participation in lectures and seminars, own topical seminar, home assignments
Opportunity to complete the requirements via supplementary examination
Opportunity to raise an approved grade via renewed examination
Examiner
Ethical approach
- All members of a group are responsible for the group's work.
- In any assessment, every student shall honestly disclose any help received and sources used.
- In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.