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FIL3014 Microscale 3D Patterning Techniques 7.5 credits

A number of high-resolution 3D patterning techniques are being developed in the society to allow the fabrication of 3D structures of functional materials at micro- and nano-scale to significantly improve technical performance and availability of the materials and devices. The patterning techniques offer opportunities to substantially advance various research fields, including electronics, energy, environment, mechanical systems, and bio-engineering, and hence contribute to the sustainable development goals. This PhD course covers basic knowledge, working principles and applicability of a comprehensive set of the 3D patterning techniques, such as 3D printing and direct laser patterning. The students will be guided to suggest possible application of the techniques in their own research fields with the consideration of sustainability.

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Headings with content from the Course syllabus FIL3014 (Autumn 2020–) are denoted with an asterisk ( )

Content and learning outcomes

Course contents

The course covers the theory, working principle and applicability of the following patterning techniques:

  1. Lithography-based patterning (Soft lithography, Through-Silicon Via (TSV), Grayscale lithography),
  2. 3D replication (Direct laser interference patterning, Pulsed-Nanoimprint lithography),
  3. 3D additive/subtractive fabrication (Electrohydrodynamic inkjet printing, Laser Nanoprinting, Laser Nanoscribe, femtosecond laser micromachining, 3D printing),
  4. 3D Origami and Self-assembly (Laser origami, Focused Electron Beams, Self-assembly of nanoparticles),
  5. Thermal scanning probe lithography (Oxidation scanning probe lithography, NanoFrazor Lithography).

The following relevant topics are also included:

  • Advanced materials for 3D patterning (2D materials, nanoparticles, polymers, etc.),
  • Sustainability of the 3D patterning techniques.

Intended learning outcomes

After the course, the students should be able to:

  1. Describe the working principles, equipment, applicability, and sustainability aspects of all the microscale 3D patterning techniques introduced in the course.
  2. Propose a research project that employs at least one of the 3D patterning techniques and has potential to contribute to at least one of the UN Sustainable Development Goals (SDGs).
  3. Formulate the concrete plan for a research project relevant to the 3D patterning techniques with the consideration of sustainability.
  4. Identify and assess the technical feasibility, and environmental, social or economic advantages and disadvantages of the employment of the 3D patterning techniques in a relevant research project.

Course disposition

The course comprises 7 lectures and 1 workshop.

In the course, the teachers will give 7 lectures. Each lecture is related to one of the 3D patterning techniques or the relevant topics (advanced materials and sustainability of the techniques). After every lecture, the students are required to answer some relevant questions in written form as homework assignments.

A final workshop will be held at the end of the course. Before the workshop, the students will be guided to propose a research project that employs at least one of the micro-scale 3D patterning techniques which clearly advances the fields with respect to both technical performance and sustainability. During the workshop, the students will present to the peers and teachers their project idea and implementation plan. Then a debate will be carried out between the students and the peers about the feasibility, technical advance and sustainability of the project. After the workshop, each student should reflect on their own project idea/plan and the comments/feedback from the peers and teachers, and submit a written research plan for the project.

Literature and preparations

Specific prerequisites

Enrolled as a doctoral student.

Recommended prerequisites

The target students are PhD students with certain practical research experience in materials, processing or device fabrication. Basic knowledge or education on Sustainable Development is favored. Before attending the course, the student are recommended to finish the online training course “basic environmental courses” at KTH Canvas.




The course is mainly based on the research papers.

Examination and completion

If the course is discontinued, students may request to be examined during the following two academic years.

Grading scale

P, F


  • EXA1 - Written examination, 7.5 credits, grading scale: P, F

Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

The examiner may apply another examination format when re-examining individual students.

Other requirements for final grade

The course will be assessed with a Pass/Fail grade, based on the completion of the homework assignments and a scientifically sound research plan and corresponding written report. In addition to this, a passing student must attend the final workshop and at least 5 (out of 7) lectures.

Opportunity to complete the requirements via supplementary examination

No information inserted

Opportunity to raise an approved grade via renewed examination

No information inserted


Profile picture Jiantong Li

Ethical approach

  • All members of a group are responsible for the group's work.
  • In any assessment, every student shall honestly disclose any help received and sources used.
  • In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

Further information

Course web

Further information about the course can be found on the Course web at the link below. Information on the Course web will later be moved to this site.

Course web FIL3014

Offered by

EECS/Electronics and Embedded Systems

Main field of study

This course does not belong to any Main field of study.

Education cycle

Third cycle

Add-on studies

No information inserted


Jiantong Li (

Postgraduate course

Postgraduate courses at EECS/Electronics and Embedded Systems