IH2659 Nanofabrication Technologies 7.5 credits

Tillverkningstekniker för nanokomponenter

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Course information

Content and learning outcomes

Course contents *

The course covers process technologies that are used in micro- and nanofabrication of devices and systems on wafers. Applications include all technologies that are based on wafer scale fabrication such as integrated circuits, micro-electro-mechanical systems and optical devices. The basic unit processes deposition, patterning, etching, doping and heat treatment are covered, followed by process integration to build complex devices. Moore's law and the basic economics for integrated circuits are covered and examplified by reviewing the state-of-the art process technology nodes. The course gives the student basic understanding of the sustainability aspects in integrated circuit fabrication.

Intended learning outcomes *

After the course, the student should be able to review and discuss:

  1. Unit manufacturing processes for micro- and nanofabrication on wafers
  2. Moore's law and advanced process technologies
  3. Process integration examples.

The student will fabricate devices in a clean room (Electrum laboratory) and use a number of unit processes included in the course.

Course Disposition

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Literature and preparations

Specific prerequisites *

Courses on BSc the level or higher in solid state physics and semiconductor devices are recommended.

Recommended prerequisites

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Fabrication engineering at the micro- and nanoscale, S. A. Campbell, Fourth Edition, Oxford University Press, 2013. 

Examination and completion

Grading scale *

A, B, C, D, E, FX, F

Examination *

  • LAB1 - Lab, 1.0 credits, Grading scale: P, F
  • TEN1 - Examination, 6.5 credits, Grading scale: A, B, C, D, E, FX, F

Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

The examiner may apply another examination format when re-examining individual students.

Other requirements for final grade *

Laboratory session and examination are compulsory for a pass final grade.

Opportunity to complete the requirements via supplementary examination

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Opportunity to raise an approved grade via renewed examination

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Mikael Östling

Further information

Course web

Further information about the course can be found on the Course web at the link below. Information on the Course web will later be moved to this site.

Course web IH2659

Offered by

EECS/Electrical Engineering

Main field of study *

Electrical Engineering

Education cycle *

Second cycle

Add-on studies

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Per-Erik Hellström

Ethical approach *

  • All members of a group are responsible for the group's work.
  • In any assessment, every student shall honestly disclose any help received and sources used.
  • In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

Supplementary information

In this course, the EECS code of honor applies, see: http://www.kth.se/en/eecs/utbildning/hederskodex.