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IH2659 Nanofabrication Technologies 7.5 credits

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Headings with content from the Course syllabus IH2659 (Spring 2019–) are denoted with an asterisk ( )

Content and learning outcomes

Course contents

The course covers process technologies that are used in micro- and nanofabrication of devices and systems on wafers. Applications include all technologies that are based on wafer scale fabrication such as integrated circuits, micro-electro-mechanical systems and optical devices. The basic unit processes deposition, patterning, etching, doping and heat treatment are covered, followed by process integration to build complex devices. Moore's law and the basic economics for integrated circuits are covered and examplified by reviewing the state-of-the art process technology nodes. The course gives the student basic understanding of the sustainability aspects in integrated circuit fabrication.

Intended learning outcomes

After the course, the student should be able to review and discuss:

  1. Unit manufacturing processes for micro- and nanofabrication on wafers
  2. Moore's law and advanced process technologies
  3. Process integration examples.

The student will fabricate devices in a clean room (Electrum laboratory) and use a number of unit processes included in the course.

Course disposition

No information inserted

Literature and preparations

Specific prerequisites

Courses on BSc the level or higher in solid state physics and semiconductor devices are recommended.

Recommended prerequisites

No information inserted


No information inserted


Fabrication engineering at the micro- and nanoscale, S. A. Campbell, Fourth Edition, Oxford University Press, 2013. 

Examination and completion

If the course is discontinued, students may request to be examined during the following two academic years.

Grading scale

A, B, C, D, E, FX, F


  • LAB1 - Lab, 1.0 credits, grading scale: P, F
  • TEN1 - Examination, 6.5 credits, grading scale: A, B, C, D, E, FX, F

Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

The examiner may apply another examination format when re-examining individual students.

Other requirements for final grade

Laboratory session and examination are compulsory for a pass final grade.

Opportunity to complete the requirements via supplementary examination

No information inserted

Opportunity to raise an approved grade via renewed examination

No information inserted


Profile picture Mikael Östling

Ethical approach

  • All members of a group are responsible for the group's work.
  • In any assessment, every student shall honestly disclose any help received and sources used.
  • In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

Further information

Course web

Further information about the course can be found on the Course web at the link below. Information on the Course web will later be moved to this site.

Course web IH2659

Offered by

EECS/Electrical Engineering

Main field of study

Electrical Engineering

Education cycle

Second cycle

Add-on studies

No information inserted


Per-Erik Hellström

Supplementary information

In this course, the EECS code of honor applies, see: