FEK3360 Advanced Hands-on MEMS Course 10.0 credits
The course is designed as a project course for PhD students who would like to get a deepened "hands-on" experience in the world of nano and micro-electromechnical systems (NEMS/MEMS). The course is intended to students who have some connection with microsystems in their PhD research work. The students will conceptualize, design, fabricate and characterize their own MEMS devices, for given real-world applications. The course is an extension of the EK2360 undergraduate course, and provides more in-depth coverage of the subject, more advanced tasks given to the students, and requires additional and more independent work of the students in particular during the fabrication and evaluation phase.
Information for research students about course offerings
The course is given every year in conjuction with EK2360 in period 2
Content and learning outcomes
Course contents
The students will learn about the design of micro-electromechanical systems, and will be guided through a complete microsystem engineering cycle in which they will do design, fabrication, and characterization of their own microdevice concepts. The students will learn to use state-of-the art microsystem engineering tools, including finite-element modeling (FEM), CAD layouting, clean-room microfabrication machines, and electrical/mechanical/optical characterization tools.
Intended learning outcomes
Upon completion of the course, the students will be able to:
- conceptualize microsystem/microactuator devices for research tasks and for given real-world specifications,
- model, simulate and design microsystems in state-of-the-art design software,
- fabricate microsystem devices in a state-of-the-art semiconductor clean-room laboratory,
- characterize the performance of microsystem devices,
- analyse failure mechanisms and to propose design improvements for a subsequent engineering cycle
- independently carry out research projects involving micro-electromechanical systems
Course disposition
Literature and preparations
Specific prerequisites
registered as PhD student at Swedish university or equivalent
Recommended prerequisites
Basic knowledge i physics
Equipment
Literature
Examination and completion
If the course is discontinued, students may request to be examined during the following two academic years.
Grading scale
Examination
- EXA1 - Examination, 10.0 credits, grading scale: P, F
Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.
The examiner may apply another examination format when re-examining individual students.
Other requirements for final grade
- attendance of the introductory lectures
- project work in team
- active participation in weekly review meetings
- keeping of hand-in deadlines (for design, intermediate and final report)
- approved 20 min oral presentation of project results
- approved intermediate and final reports
Opportunity to complete the requirements via supplementary examination
Opportunity to raise an approved grade via renewed examination
Examiner
Ethical approach
- All members of a group are responsible for the group's work.
- In any assessment, every student shall honestly disclose any help received and sources used.
- In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.
Further information
Course web
Further information about the course can be found on the Course web at the link below. Information on the Course web will later be moved to this site.
Course web FEK3360