FIH3607 Epitaxy of Semiconductor Materials 10.5 credits


Offering and execution

Course offering missing for current semester as well as for previous and coming semesters

Course information

Content and learning outcomes

Course contents *

The course provides an introduction to crystal growth technology with several examples of technical implementations as well as specific materials systems. The fundamentals of the crystal growth process are reviewed as based on gas kinetics, deposition theory and thermodynamics, and a number of thin-film epitaxial processes are described in detail.

Intended learning outcomes *

This course will give an advanced level treatment of crystal growth basics, methods of instrumentation for thin-film epitaxial growth, as well as an orientation of specific materials systems of interest for a range of micro- and optoelectronics applications.

After a successful completion of the course, students should be able to:

. Describe fundamental processes of crystal growth taking account of both thermodynamic and kinetic aspects

. Describe the liquid-phase epitaxy (LPE) process

. Describe the hydride vapor-phase epitaxy (HVPE) process

. Describe the metal-organic vapor-phase epitaxy (MOVPE) process

. Describe the moelcular-beam epitaxy (MBE) process

. Describe the process and applications of selective area growth (SAG)

. Understand the basic fundaments for the numerical modeling of the epitaxial process

. Describe the properties and applications for a range of compound semiconductor materials, including those based on the GsAs, InP, SIC, SiGe, GaN systems, as well as nanostructured materials.

Course Disposition

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Literature and preparations

Specific prerequisites *

Basic physics and chemistry courses

Recommended prerequisites

Basic physics and chemistry courses


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Examination and completion

Grading scale *

P, F

Examination *

  • EXA1 - Examination, 10.5 credits, Grading scale: P, F

Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

The examiner may apply another examination format when re-examining individual students.

Participation in lectures and seminars, own topical seminar, home assignments

Opportunity to complete the requirements via supplementary examination

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Opportunity to raise an approved grade via renewed examination

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Mattias Hammar

Further information

Course web

Further information about the course can be found on the Course web at the link below. Information on the Course web will later be moved to this site.

Course web FIH3607

Offered by

EECS/Electronics and Embedded Systems

Main field of study *

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Education cycle *

Third cycle

Add-on studies

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Mattias Hammar (

Ethical approach *

  • All members of a group are responsible for the group's work.
  • In any assessment, every student shall honestly disclose any help received and sources used.
  • In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

Postgraduate course

Postgraduate courses at EECS/Electronics and Embedded Systems