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FSK3760 Graduate Seminar in Nanofabrication 7.5 credits

Course offering missing for current semester as well as for previous and coming semesters
Headings with content from the Course syllabus FSK3760 (Spring 2019–) are denoted with an asterisk ( )

Content and learning outcomes

Course contents

What is a clean room and clean room processes. Resists, hotplates and ovens. Photolithography. E-beam lithography and Focus Ion Beam. Wet and dry etching. Evaporation and Sputtering, Surface profiler, Optical Microscopy, Atomic force microscopy, Scanning electron microscopy.

Intended learning outcomes

After the course you should be able to apply your knowledge in clean room instrumentation to different clean room processes and to be able to collaborate with other users in such a way that both parties can benefit from it. This means you should be able to:

  • Describe and explain how the instrumentation of the NanoFabLab works and how it can be used.
  • Design the different steps for a specific process and choose the appropriate parameters for each step.
  • Identify the most appropriate instrument that will let you evaluate each step of a given process.
  • Document the different processes in such a way that other users can benefit from it.

Course disposition

The course is divided in two parts: the first part consists of seminars in which we discuss the different instrument s and their parameters; the second part involves lab work and meetings to discuss its progress.

Literature and preparations

Specific prerequisites

Some experience of working in a lab, not necessarily a cleanroom. Good general science or technical education in Physics, Chemistry, Biophysics etc.

Recommended prerequisites

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Handouts via Nanophys web-site.

Examination and completion

If the course is discontinued, students may request to be examined during the following two academic years.

Grading scale



  • RAP1 - Report, 7.5 credits, grading scale: G

Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

The examiner may apply another examination format when re-examining individual students.

Other requirements for final grade

In order pass the course, each participant must:

  • Attend all the seminars and meetings
  • Carry out the two different group projects.
  • Present the two group projects and his /her own project in such a way that the rest of the participants can follow and understand your process problems and solutions.
  • Hand in a written report about the lab- projects following the guidelines.

Opportunity to complete the requirements via supplementary examination

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Opportunity to raise an approved grade via renewed examination

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Profile picture Carlota Canalias Gomez

Ethical approach

  • All members of a group are responsible for the group's work.
  • In any assessment, every student shall honestly disclose any help received and sources used.
  • In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

Further information

Course web

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Offered by

SCI/Applied Physics

Main field of study

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Education cycle

Third cycle

Add-on studies

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Carlota Canalias,

Postgraduate course

Postgraduate courses at SCI/Applied Physics