IH2655 Design and Characterisation of Nano- and Microdevices 7.5 credits
Nano- och mikrokomponent-tillverkning och karakterisering
Education cycleSecond cycle
Main field of studyElectrical Engineering
Grading scaleA, B, C, D, E, FX, F
At present this course is not scheduled to be offered.
Intended learning outcomes
The course content is an exhaustive treatment of nano- and microdevice fabrication and characterisation through theory and practical exercises. Applications in medicine, biotechnology and molecular electronics.
After the course, the student should be able to explain
- the fabrication paradigms top down and bottom up
- which process steps are needed for each method respectively
- how the main process steps work
- which physical principles are limiting for fabrication and scaling of a nano- or microdevice
- should understand environmental effects of semiconductor production and be aware of relevant energy savings and efficiency technologies.
After the lab course, the student should have
- fabricated a simple nanostructure
- characterized this structure
- measured electrical properties of a submicron semiconductor device in the research environment offered by the KTH nano and microelectronics lab in Kista, Electrum Laboratory.
Course main content
- A survey of nanotechnology and applications in medicine, biotechnology and molecular electronics.
- The fabrication paradigms: top down (starting from established microdevice fabrication) and bottom up (starting from molecules that are arrange to self-assemble).
- The important steps in the process of modern microelectronic technology.
- Characterization methods: electrical, optical, physical, chemical.
- Overview of nanophysics and simulation methods.
A basic course in semiconductor devices or physics.
Stephen A. Campbell. Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering). 4th Edition.
- LAB1 - Laboratory Work, 3.0, grading scale: P, F
- TEN1 - Examination, 4.5, grading scale: A, B, C, D, E, FX, F
Requirements for final grade
Lab course (LAB1; 3 hp). The lab course is graded P/F, but has to be done in order to schedule the oral exam. A written lab report must be handed in within one week of the lab, otherwise the maximum grade in the course is E.
One oral examination (TEN1; 4,5 hp). Oral exam is normally two students at a time and takes one hour. The grading is done immediately.
EECS/Electronics and Embedded Systems
Mikael Östling <firstname.lastname@example.org>
Course syllabus valid from: Spring 2019.
Examination information valid from: Spring 2019.