IH2655 Design and Characterisation of Nano- and Microdevices 7.5 credits

Nano- och mikrokomponent-tillverkning och karakterisering

  • Education cycle

    Second cycle
  • Main field of study

    Electrical Engineering
  • Grading scale

    A, B, C, D, E, FX, F

At present this course is not scheduled to be offered.

Intended learning outcomes

The course content is an exhaustive treatment of nano- and microdevice fabrication and characterisation through theory and practical exercises. Applications in medicine, biotechnology and molecular electronics.

After the course, the student should be able to explain

  • the fabrication paradigms top down and bottom up
  • which process steps are needed for each method respectively
  • how the main process steps work
  • which physical principles are limiting for fabrication and scaling of a nano- or microdevice
  • should understand environmental effects of semiconductor production and be aware of relevant energy savings and efficiency technologies.

After the lab course, the student should have

  • fabricated a simple nanostructure
  • characterized this structure
  • measured electrical properties of a submicron semiconductor device in the research environment offered by the KTH nano and microelectronics lab in Kista, Electrum Laboratory.

Course main content

  • A survey of nanotechnology and applications in medicine, biotechnology and molecular electronics.
  • The fabrication paradigms: top down (starting from established microdevice fabrication) and bottom up (starting from molecules that are arrange to self-assemble).
  • The important steps in the process of modern microelectronic technology.
  • Characterization methods: electrical, optical, physical, chemical.
  • Overview of nanophysics and simulation methods.


Recommended prerequisites

A basic course in semiconductor devices or physics.


Stephen A. Campbell. Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering). 4th Edition.

ISBN-13: 978-0199861224
ISBN-10: 0199861226 


  • LAB1 - Laboratory Work, 3.0, grading scale: P, F
  • TEN1 - Examination, 4.5, grading scale: A, B, C, D, E, FX, F

Requirements for final grade

Lab course (LAB1; 3 hp). The lab course is graded P/F, but has to be done in order to schedule the oral exam. A written lab report must be handed in within one week of the lab, otherwise the maximum grade in the course is E.

One oral examination (TEN1; 4,5 hp). Oral exam is normally two students at a time and takes one hour. The grading is done immediately.

Offered by

EECS/Electronics and Embedded Systems


Per-Erik Hellström


Mikael Östling <mostling@kth.se>


Course syllabus valid from: Spring 2019.
Examination information valid from: Spring 2019.