Intended learning outcomes *
The overall goal of this course is to introduce engineering students to the world of microengineering, i.e. the world of technical components and systems with feature sizes in the range sub-millimetre down to 100 nm. The area is often also referred to as a “MEMS” – Micro Elcreomechnical Systems. The following aspects will be addressed in particular: basic physical principles used for sensing and actuation in microtechnology, methods for microfabrication, the design and operation of the most commonly used micro-components and systems, and the use of microtechnology in specific application areas.
After following the course, the students will have obtained the following skills in particular:
- the basic physical sensing and actuation principles, including microfluidics,
- silicon microfabrication technology, and
- the most relevant types of optical, resonant, inertial, flow, pressure, radiation and thermal microsensors, as well as microfluidic components and RF and telecom devices,
be able to
- give an overview of the most commonly used methods and techniques
- explain how these work and can be implemented
- compare their advantages and drawbacks
- use their knowledge to make a structured and educated approach to engineering challenges involving microsystem technology.
- With respect to the specific application fields of medical, automotive, biotechnical, optical and telecommunication systems
be able to
5. explain the potential of microsystem technology in terms of size, cost and/or performance.
In addition, the students will gain deeper insight by performing practical work in a clean-room environment and by making a performance evaluation of a microsystem.
Group assignments will be handed out in relation to the seminars in order to stimulate further studies of the different topics. The assignments will be corrected and the result will count towards the course grade.
The final exam will test on the content of seminars and group assignments. The result counts towards the course grade.
A project laboration including clean-room based manufacturing and evaluation of microsystem technology component and a mandatory industry site visit at a company fabricating microsystem components give concrete examples.