FEK3205 Fundamentals of MEMS Fabrication 8.0 credits

Grunder i MEMS- tillverkning

The course covers fundamentals of microfabrication techniques and basic principles of MEMS design. The course covers topics related to lithography, dry and wet etching, vapor deposition, stress in thin films, microreplication, packaging and scaling effects. The course is primarily intended for PhD students whose research topic is related to MEMS.

Offering and execution

Course offering missing for current semester as well as for previous and coming semesters

Course information

Content and learning outcomes

Course contents *

The course consists of self studies of the text book Fundamentals of microfabrication. Chapters 1-5, 9 as well as chapter 8 on packaging shall be studied in depth. Other chapters should be read to get an overview.

Intended learning outcomes *

After the completed course the student shall be able to:

  • Thoroughly describe different methods of microlithography and identify different effects occurring during the lithographic process.
  • Systematically describe principles and implementations of dry etching as well as identify different effect occurring during dry etching.
  • Analytically describe different deposition techniques and indentify different effects occurring during depositions on various topographies.
  • Report on various wet etching techniques and describe their principles and possible usage.
  • Qualitatively describe surface micromachining and stress properties associated with various deposition techniques.
  • Describe fundamental principles and processes for packaging of microsystems.
  • Identify scaling effects in different physical principles related to microsystems.
  • Report on different microreplication processes, alternative material choices and miniaturization examples, and qualitatively compare different microfabrication methods.
  •  Critically evaluate, compare and appropriately select fabrication methods to realize microstructures.

Course Disposition

Self studies of the course literature, oral exam.

Literature and preparations

Specific prerequisites *

No information inserted

Recommended prerequisites

EK2350 Microsystem technology or similar course.

Equipment

None

Literature

M. J. Madou, Fundamentals of microfabrication 2ed, ISBN 0849308267.

Examination and completion

If the course is discontinued, students may request to be examined during the following two academic years.

Grading scale *

P, F

Examination *

    Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

    The examiner may apply another examination format when re-examining individual students.

    Other requirements for final grade *

    Pass oral examination.

    Opportunity to complete the requirements via supplementary examination

    No information inserted

    Opportunity to raise an approved grade via renewed examination

    No information inserted

    Examiner

    Göran Stemme

    Niclas Roxhed

    Ethical approach *

    • All members of a group are responsible for the group's work.
    • In any assessment, every student shall honestly disclose any help received and sources used.
    • In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

    Further information

    Course web

    No information inserted

    Offered by

    EECS/Micro and Nano Systems

    Main field of study *

    No information inserted

    Education cycle *

    Third cycle

    Add-on studies

    No information inserted

    Contact

    Niclas Roxhed

    Supplementary information

    Learning outcomes

    After the completed course the student shall be able to:

    • Thoroughly describe different methods of microlithography and identify different effects occurring during the lithographic process.
    • Systematically describe principles and implementations of dry etching as well as identify different effect occurring during dry etching.
    • Analytically describe different deposition techniques and indentify different effects occurring during depositions on various topographies.
    • Report on various wet etching techniques and describe their principles and possible usage.
    • Qualitatively describe surface micromachining and stress properties associated with various deposition techniques.
    • Describe fundamental principles and processes for packaging of microsystems.
    • Identify scaling effects in different physical principles related to microsystems.
    • Report on different microreplication processes, alternative material choices and miniaturization examples, and qualitatively compare different microfabrication methods.
    •  Critically evaluate, compare and appropriately select fabrication methods to realize microstructures.

    Course main content

    The course consists of self studies of the text book Fundamentals of microfabrication. Chapters 1-5, 9 as well as chapter 8 on packaging shall be studied in depth. Other chapters should be read to get an overview.

    Course disposition

    Self studies of the course literature, oral exam.

    Requirements for final grade

    Pass oral examination.

    Course litterature

    M. J. Madou, Fundamentals of microfabrication 2ed, ISBN 0849308267.

    Required equipment

    Postgraduate course

    Postgraduate courses at EECS/Micro and Nano Systems