FEK3205 Fundamentals of MEMS Fabrication 8.0 credits
Grunder i MEMS- tillverkning
The course covers fundamentals of microfabrication techniques and basic principles of MEMS design. The course covers topics related to lithography, dry and wet etching, vapor deposition, stress in thin films, microreplication, packaging and scaling effects. The course is primarily intended for PhD students whose research topic is related to MEMS.