The course consists of self studies of the text book Fundamentals of microfabrication. Chapters 1-5, 9 as well as chapter 8 on packaging shall be studied in depth. Other chapters should be read to get an overview.
FEK3205 Fundamentals of MEMS Fabrication 8.0 credits
Course offerings are missing for current or upcoming semesters.
Headings with content from the Course syllabus FEK3205 (Autumn 2012–) are denoted with an asterisk ( )
Content and learning outcomes
Course contents
Intended learning outcomes
After the completed course the student shall be able to:
- Thoroughly describe different methods of microlithography and identify different effects occurring during the lithographic process.
- Systematically describe principles and implementations of dry etching as well as identify different effect occurring during dry etching.
- Analytically describe different deposition techniques and indentify different effects occurring during depositions on various topographies.
- Report on various wet etching techniques and describe their principles and possible usage.
- Qualitatively describe surface micromachining and stress properties associated with various deposition techniques.
- Describe fundamental principles and processes for packaging of microsystems.
- Identify scaling effects in different physical principles related to microsystems.
- Report on different microreplication processes, alternative material choices and miniaturization examples, and qualitatively compare different microfabrication methods.
- Critically evaluate, compare and appropriately select fabrication methods to realize microstructures.
Literature and preparations
Specific prerequisites
No information inserted
Recommended prerequisites
EK2350 Microsystem technology or similar course.
Equipment
None
Literature
M. J. Madou, Fundamentals of microfabrication 2ed, ISBN 0849308267.
Examination and completion
If the course is discontinued, students may request to be examined during the following two academic years.
Grading scale
P, F
Examination
Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.
The examiner may apply another examination format when re-examining individual students.
Other requirements for final grade
Pass oral examination.
Opportunity to complete the requirements via supplementary examination
No information inserted
Opportunity to raise an approved grade via renewed examination
No information inserted
Examiner
Ethical approach
- All members of a group are responsible for the group's work.
- In any assessment, every student shall honestly disclose any help received and sources used.
- In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.
Further information
Course room in Canvas
Registered students find further information about the implementation of the course in the course room in Canvas. A link to the course room can be found under the tab Studies in the Personal menu at the start of the course.
Offered by
Main field of study
This course does not belong to any Main field of study.
Education cycle
Third cycle
Add-on studies
No information inserted
Contact
Niclas Roxhed
Supplementary information
Learning outcomes
After the completed course the student shall be able to:
- Thoroughly describe different methods of microlithography and identify different effects occurring during the lithographic process.
- Systematically describe principles and implementations of dry etching as well as identify different effect occurring during dry etching.
- Analytically describe different deposition techniques and indentify different effects occurring during depositions on various topographies.
- Report on various wet etching techniques and describe their principles and possible usage.
- Qualitatively describe surface micromachining and stress properties associated with various deposition techniques.
- Describe fundamental principles and processes for packaging of microsystems.
- Identify scaling effects in different physical principles related to microsystems.
- Report on different microreplication processes, alternative material choices and miniaturization examples, and qualitatively compare different microfabrication methods.
- Critically evaluate, compare and appropriately select fabrication methods to realize microstructures.
Course main content
The course consists of self studies of the text book Fundamentals of microfabrication. Chapters 1-5, 9 as well as chapter 8 on packaging shall be studied in depth. Other chapters should be read to get an overview.
Course disposition
Self studies of the course literature, oral exam.
Requirements for final grade
Pass oral examination.
Course litterature
M. J. Madou, Fundamentals of microfabrication 2ed, ISBN 0849308267.
Required equipment
–