FEK3205 Grunder i MEMS- tillverkning 8,0 hp

The course consists of self studies of the text book Fundamentals of microfabrication. Chapters 1-5, 9 as well as chapter 8 on packaging shall be studied in depth. Other chapters should be read to get an overview.

After the completed course the student shall be able to:

• Thoroughly describe different methods of microlithography and identify different effects occurring during the lithographic process.
• Systematically describe principles and implementations of dry etching as well as identify different effect occurring during dry etching.
• Analytically describe different deposition techniques and indentify different effects occurring during depositions on various topographies.
• Report on various wet etching techniques and describe their principles and possible usage.
• Qualitatively describe surface micromachining and stress properties associated with various deposition techniques.
• Describe fundamental principles and processes for packaging of microsystems.
• Identify scaling effects in different physical principles related to microsystems.
• Report on different microreplication processes, alternative material choices and miniaturization examples, and qualitatively compare different microfabrication methods.
•  Critically evaluate, compare and appropriately select fabrication methods to realize microstructures.

EK2350 Microsystem technology or similar course.

None

M. J. Madou, Fundamentals of microfabrication 2ed, ISBN 0849308267.

När kurs inte längre ges har student möjlighet att examineras under ytterligare två läsår.

Examinator beslutar, baserat på rekommendation från KTH:s handläggare av stöd till studenter med funktionsnedsättning, om eventuell anpassad examination för studenter med dokumenterad, varaktig funktionsnedsättning.

Examinator får medge annan examinationsform vid omexamination av enstaka studenter.

Pass oral examination.

Göran Stemme

Niclas Roxhed

• Vid grupparbete har alla i gruppen ansvar för gruppens arbete.
• Vid examination ska varje student ärligt redovisa hjälp som erhållits och källor som använts.
• Vid muntlig examination ska varje student kunna redogöra för hela uppgiften och hela lösningen.

Learning outcomes

After the completed course the student shall be able to:

• Thoroughly describe different methods of microlithography and identify different effects occurring during the lithographic process.
• Systematically describe principles and implementations of dry etching as well as identify different effect occurring during dry etching.
• Analytically describe different deposition techniques and indentify different effects occurring during depositions on various topographies.
• Report on various wet etching techniques and describe their principles and possible usage.
• Qualitatively describe surface micromachining and stress properties associated with various deposition techniques.
• Describe fundamental principles and processes for packaging of microsystems.
• Identify scaling effects in different physical principles related to microsystems.
• Report on different microreplication processes, alternative material choices and miniaturization examples, and qualitatively compare different microfabrication methods.
•  Critically evaluate, compare and appropriately select fabrication methods to realize microstructures.

Course main content

The course consists of self studies of the text book Fundamentals of microfabrication. Chapters 1-5, 9 as well as chapter 8 on packaging shall be studied in depth. Other chapters should be read to get an overview.

Course disposition

Self studies of the course literature, oral exam.

Requirements for final grade

Pass oral examination.

Course litterature

M. J. Madou, Fundamentals of microfabrication 2ed, ISBN 0849308267.

Required equipment

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