A survey of nanotechnology and applications in medicine, biotechnology and molecular electronics. The fabrication paradigms: top down (starting from established microdevice fabrication) and bottom up (starting from molecules that are arrange to self-assemble). The important steps in the process of modern microelectronic technology. Characterization methods: electrical, optical, physical, chemical. Overview of nanophysics and simulation methods.
Intended learning outcomes *
The course content is an exhaustive treatment of nano- and microdevice fabrication and characterisation through theory and practical exercises. Applications in medicine, biotechnology and molecular electronics. After the course, the student should be able to explain: • the fabrication paradigms top down and bottom up • which process steps are needed for each method respectively • how the main process steps work • which physical principles are limiting for fabrication and scaling of a nano- or microdevice • should understand environmental effects of semiconductor production and be aware of relevant energy savings and efficiency technologies After the lab course, the student should have: • fabricated a simple nanostructure • characterized this structure • measured electrical properties of a submicron semiconductor device in the research environment offered by the KTH nano and microelectronics lab in Kista, Electrum Laboratory.
Lectures, Lab excercises and oral examination
Literature and preparations
Specific prerequisites *
Enrolled as a doctoral student
A basic course in semiconductor devices or physics.
No information inserted
Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering) Paperback – November 15, 2012