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Publications by Ulrich Vogt

Refereegranskade

Artiklar

[1]
H. Ohlin et al., "Comparing metal assisted chemical etching of N and P-type silicon nanostructures," Micro and Nano Engineering, vol. 19, 2023.
[2]
H. Ohlin, T. Frisk and U. Vogt, "Single Layer Lift-Off of CSAR62 for Dense Nanostructured Patterns," Micromachines, vol. 14, no. 4, 2023.
[4]
M. Åstrand et al., "Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers," Micro and Nano Engineering, vol. 16, pp. 100141, 2022.
[5]
U. Johansson et al., "NanoMAX : the hard X-ray nanoprobe beamline at the MAX IV Laboratory," Journal of Synchrotron Radiation, vol. 28, pp. 1935-1947, 2021.
[6]
R. Akan and U. Vogt, "Optimization of Metal-Assisted Chemical Etching for Deep Silicon Nanostructures," Nanomaterials, vol. 11, no. 11, 2021.
[7]
A. Branny et al., "X-Ray Induced Secondary Particle Counting With Thin NbTiN Nanowire Superconducting Detector," IEEE transactions on applied superconductivity (Print), vol. 31, no. 4, 2021.
[8]
M. Kördel et al., "Laboratory water-window x-ray microscopy," Optica, vol. 7, no. 6, pp. 658-674, 2020.
[10]
A. Bjorling et al., "Ptychographic characterization of a coherent nanofocused X-ray beam," Optics Express, vol. 28, no. 4, pp. 5069-5076, 2020.
[11]
M. Kördel et al., "Stability investigation of a cryo soft x-ray microscope by fiber interferometry," Review of Scientific Instruments, vol. 91, no. 2, 2020.
[13]
R. Akan et al., "Reaction control of metal-assisted chemical etching for silicon-based zone plate nanostructures," RSC Advances, vol. 8, no. 23, pp. 12628-12634, 2018.
[14]
T. Stankevic et al., "Interferometric characterization of rotation stages for X-ray nanotomography," Review of Scientific Instruments, vol. 88, no. 5, 2017.
[15]
U. Vogt et al., "Moiré method for nanometer instability investigation of scanning hard x-ray microscopes," Optics Express, vol. 25, no. 11, pp. 12188-12194, 2017.
[16]
F. Seiboth et al., "Perfect X-ray focusing via fitting corrective glasses to aberrated optics," Nature Communications, vol. 8, 2017.
[17]
K. Parfeniukas et al., "Improved tungsten nanofabrication for hard X-ray zone plates," Microelectronic Engineering, vol. 152, pp. 6-9, 2016.
[18]
M. Selin et al., "3D simulation of the image formation in soft x-ray microscopes," Optics Express, vol. 22, no. 25, pp. 30756-30768, 2014.
[19]
F. Seiboth et al., "Focusing XFEL SASE pulses by rotationally parabolic refractive x-ray lenses," Journal of Physics, Conference Series, vol. 499, no. 1, pp. 012004, 2014.
[20]
F. Uhlén et al., "Nanofabrication of tungsten zone plates with integrated platinum central stop for hard X-ray applications," Microelectronic Engineering, vol. 116, pp. 40-43, 2014.
[21]
F. Uhlén et al., "Ronchi test for characterization of X-ray nanofocusing optics and beamlines," Journal of Synchrotron Radiation, vol. 21, pp. 1105-1109, 2014.
[22]
F. Uhlén et al., "Damage investigation on tungsten and diamond diffractive optics at a hard x-ray free-electron laser," Optics Express, vol. 21, no. 7, pp. 8051-8061, 2013.
[24]
O. Freund et al., "Impact of the Flow on an Acoustic Excitation System for Aeroelastic Studies," Journal of turbomachinery, vol. 135, no. 3, pp. 031033, 2013.
[25]
H. Legall et al., "Compact X-ray microscope for the water window based on a high brightness laser plasma source," Optics Express, vol. 20, no. 16, pp. 18362-18369, 2012.
[26]
D. H. Martz et al., "High average brightness water window source for short-exposure cryomicroscopy," Optics Letters, vol. 37, no. 21, pp. 4425-4427, 2012.
[27]
H. Hertz et al., "Laboratory cryo soft X-ray microscopy," Journal of Structural Biology, vol. 177, no. 2, pp. 267-272, 2012.
[28]
D. Nilsson et al., "Ronchi test for characterization of nanofocusing optics at a hard x-ray free-electron laser," Optics Letters, vol. 37, no. 24, pp. 5046-5048, 2012.
[29]
D. Nilsson et al., "Thermal stability of tungsten zone plates for focusing hard x-ray free-electron laser radiation," New Journal of Physics, vol. 14, pp. 043010, 2012.
[30]
D. Nilsson et al., "Computer simulation of heat transfer in zone plate optics exposed to X-ray FEL radiation," Proceedings of SPIE, the International Society for Optical Engineering, vol. 8077, 2011.
[31]
M. Bertilson et al., "Laboratory soft-x-ray microscope for cryotomography of biological specimens," Optics Letters, vol. 36, no. 14, pp. 2728-2730, 2011.
[32]
F. Uhlén et al., "New diamond nanofabrication process for hard x-ray zone plates," Journal of Vacuum Science & Technology B, vol. 29, no. 6, pp. 06FG03-1-06FG03-4, 2011.
[33]
M. Bertilson et al., "Numerical model for tomographic image formation in transmission x-ray microscopy," Optics Express, vol. 19, no. 12, pp. 11578-11583, 2011.
[34]
E. Chubarova et al., "Platinum zone plates for hard X-ray applications," Microelectronic Engineering, vol. 88, no. 10, pp. 3123-3126, 2011.
[35]
P. Skoglund et al., "High-brightness water-window electron-impact liquid-jet microfocus source," Applied Physics Letters, vol. 96, no. 8, 2010.
[36]
D. Nilsson et al., "Simulation of heat transfer in zone plate optics irradiated by X-ray free electron laser radiation," Nuclear Instruments and Methods in Physics Research Section A : Accelerators, Spectrometers, Detectors and Associated Equipment, vol. 621, no. 1-3, pp. 620-626, 2010.
[37]
O. von Hofsten et al., "Compact phase-contrast soft X-ray microscopy," Journal of Physics, Conference Series, vol. 186, 2009.
[38]
M. Bertilson et al., "First application experiments with the Stockholm compact soft x-ray microscope," Journal of Physics, Conference Series, vol. 186, 2009.
[39]
M. Bertilson et al., "High-resolution computed tomography with a compact soft x-ray microscope," Optics Express, vol. 17, no. 13, pp. 11057-11065, 2009.
[40]
H. M. Hertz et al., "Laboratory x-ray micro imaging : Sources, optics, systems and applications," Journal of Physics, Conference Series, vol. 186, 2009.
[41]
O. von Hofsten et al., "Sub-25-nm laboratory x-ray microscopy using a compound Fresnel zone plate," Optics Letters, vol. 34, no. 17, pp. 2631-2633, 2009.
[42]
M. Otendal et al., "A 9 keV electron-impact liquid-gallium-jet x-ray source," Review of Scientific Instruments, vol. 79, no. 1, pp. 016102, 2008.
[43]
T. Tuohimaa et al., "A microfocus x-ray source based on a nonmetal liquid-jet anode," Applied Physics Letters, vol. 92, no. 23, pp. 233509-1-233509-3, 2008.
[44]
O. von Hofsten et al., "Compact Zernike phase contrast x-ray microscopy using a single-element optic," Optics Letters, vol. 33, no. 9, pp. 932-934, 2008.
[45]
M. Bertilson et al., "Compact high-resolution differential interference contrast soft x-ray microscopy," Applied Physics Letters, vol. 92, no. 064104, 2008.
[46]
O. von Hofsten, M. Bertilson and U. Vogt, "Theoretical development of a high-resolution differential-interference-contrast optic for x-ray microscopy," Optics Express, vol. 16, no. 2, pp. 1132-1141, 2008.
[47]
M. Lindblom et al., "High-resolution differential-interference-contrast x-ray zone plates : Design and Fabrication," Spectrochimica Acta Part B - Atomic Spectroscopy, vol. 62, no. 6-7, pp. 539-543, 2007.
[48]
M. Bertilsson et al., "Laboratory arrangement for soft x-ray zone-plate efficiency measurements," Review of Scientific Instruments, vol. 78, no. 2, pp. 026103, 2007.
[49]
O. von Hofsten, P. Takman and U. Voght, "Simulation of partially coherent image formation in a compact soft x-ray microscope," Ultramicroscopy, vol. 107, no. 8, pp. 604-609, 2007.
[50]
U. Vogt et al., "Condenser for Koehler-like illumination in transmission x-ray microscopes at undulator sources," Optics Letters, vol. 31, no. 10, pp. 1465-1467, 2006.
[51]
P. Jansson, U. Vogt and H. Hertz, "Liquid-nitrogen-jet laser-plasma source for compact soft x-ray microscopy," Review of Scientific Instruments, vol. 76, no. 4, pp. 043503, 2005.
[52]
U. Vogt et al., "Single-optical-element soft-x-ray interferometry with a laser-plasma x-ray source," Optics Letters, vol. 30, no. 15, pp. 2167, 2005.
[53]
U. Vogt et al., "High resolution x-ray absorption spectroscopy using a laser plasma radiation source," Review of Scientific Instruments, vol. 75, no. 11, pp. 4606-4609, 2004.
[54]
H. Legall et al., "Spatial and spectral characterization of a laser produced plasma source for extreme ultraviolet metrology," Review of Scientific Instruments, vol. 75, no. 11, pp. 4981-4988, 2004.
[55]
S. Ter-Avetisyan et al., "Efficient extreme ultraviolet emission from xenon-cluster jet targets at high repetition rate laser illumination," Journal of Applied Physics, vol. 94, no. 9, pp. 5489-5496, 2003.
[56]
R. Fruke et al., "Imaging of a laser plasma source at 13 nm wavelength approaching submicrometer resolution," Journal de Physique IV : Colloque, vol. 104, pp. 153-156, 2003.
[57]
S. Busch et al., "Ion acceleration with ultrafast lasers," Applied Physics Letters, vol. 82, no. 19, pp. 3354-3356, 2003.
[58]
A. Thoss et al., "Kilohertz sources of hard x rays and fast ions with femtosecond laser plasmas," Journal of the Optical Society of America. B, Optical physics, vol. 20, no. 1, pp. 224-228, 2003.
[59]
B. Kaulich et al., "TwinMic - Combined scanning and full-field imaging microscopy with novel contrast mechanisms," Synchrotron Radiation News, vol. 16, pp. 49-52, 2003.
[60]
G. Korn et al., "Ultrashort 1-kHz laser plasma hard x-ray source," Optics Letters, vol. 27, no. 10, pp. 866-868, 2002.
[61]
M. Beck et al., "A pulse-train laser driven XUV source for picosecond pump-probe experiments in the water window," Optics Communications, vol. 190, no. 06-jan, pp. 317-326, 2001.
[62]
S. Ter-Avetisyan et al., "Absolute extreme ultraviolet yield from femtosecond-laser-excited Xe clusters," Physical Review E. Statistical, Nonlinear, and Soft Matter Physics : Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics, vol. 6403, no. 3, 2001.
[63]
U. Vogt et al., "Design and application of a zone plate monochromator for laboratory soft x-ray sources," Review of Scientific Instruments, vol. 72, no. 1, pp. 53-57, 2001.
[64]
M. Beck et al., "Evaluation of the energetic position of the lowest excited singlet state of beta-carotene by NEXAFS and photoemission spectroscopy," Biochimica et Biophysica Acta - Bioenergetics, vol. 1506, no. 3, pp. 260-267, 2001.
[65]
[66]
M. Schnurer et al., "Influence of laser pulse width on absolute EUV-yield from Xe-clusters," European Physical Journal D : Atomic, Molecular and Optical Physics, vol. 14, no. 3, pp. 331-335, 2001.

Konferensbidrag

[67]
M. Kahnt et al., "Current capabilities of the imaging endstation at the NanoMAX beamline," in AIP Conference Proceedings, 2023.
[68]
M. Lindblom et al., "Flexible Liquid-Filled Scintillating Fibers for X-Ray Detection," in 2023 IEEE SENSORS, SENSORS 2023 - Conference Proceedings, 2023.
[69]
M. Åstrand et al., "Multi-beam ptychography with coded in-line Fresnel zone plates," in X-Ray Nanoimaging: Instruments and Methods VI, 2023.
[70]
M. Kördel et al., "Biological Laboratory X-Ray Microscopy," in X-Ray Nanoimaging : Instruments and Methods IV, 2019.
[71]
F. Seiboth et al., "Aberration Correction for Hard X-ray Focusing at the Nanoscale," in Advances in X-Ray/EUV Optics and Components XII, 2017.
[72]
U. Vogt et al., "First x-ray nanoimaging experiments at NanoMAX," in X-Ray Nanoimaging : Instruments and Methods III 2017, 2017.
[73]
K. Parfeniukas et al., "High-aspect ratio zone plate fabrication for hard x-ray nanoimaging," in Advances in X-Ray/EUV Optics and Components XII, 2017.
[74]
U. H. Wagner et al., "Characterising the Large Coherence Length at Diamond's Beamline I13L," in Proceedings of The 12th International Conference on Synchrotron Radiation Instrumentation (SRI2015), 2016.
[75]
U. Vogt et al., "Diffractive optics for laboratory sources to free electron lasers," in 11th International Conference On X-Ray Microscopy (XRM2012), 2013, p. 012001.
[76]
R. Hoppe et al., "Full characterization of a focused wavefield with sub 100 nm resolution," in Advances In X-Ray Free-Electron Lasers II : Instrumentation, 2013, p. 87780G.
[78]
U. Johansson, U. Vogt and A. Mikkelsen, "NanoMAX : a hard x-ray nanoprobe beamline at MAX IV," in SPIE Optical Engineering+ Applications, 2013.
[79]
A. Schropp et al., "Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization," in Proceedings of SPIE : The International Society for Optical Engineering, 2013.
[80]
M. Selin et al., "DiffractX : A Simulation Toolbox for Diffractive X-ray Optics," in 10TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY, 2011, pp. 341-344.
[81]
P. Skoglund et al., "Electron-Impact Water-Jet Microfocus Source for Water-Window Microscopy," in 10th International Conference on X-Ray Microscopy, 2011, pp. 152-155.
[82]
A. Holmberg et al., "Towards 10-nm Soft X-Ray Zone Plate Fabrication," in 10th International Conference on X-ray Microscopy, 2011.
[83]
D. Nilsson et al., "Zone Plates for Hard X-Ray FEL Radiation," in 10TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY, 2011, pp. 120-123.
[84]
H. Hertz et al., "Laboratory Water-Window X-Ray Microscopy," in 2009 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS : VOLS 1 AND 2, 2009, pp. 48-48.
[85]
H. M. Hertz et al., "Laboratory X-ray micro- and nano-imaging," in Frontiers in Optics (FiO) 2009, 2009.
[86]
O. von Hofsten, M. Bertilson and U. Vogt, "Simulation of partially coherent image formation in x-ray microscopy - art. no. 67050I," in Advances in X-Ray/EUV Optics and Components II, 2007, pp. I7050-I7050.
[87]
M. C. Bertilson et al., "Zone plate efficiency measurements with a laser-plasma source," in Advances in X-Ray/EUV Optics and Components II, 2007, pp. F7050-F7050.
[88]
D. Schaefer et al., "Compact X-ray microscopes for EUV- and soft X-radiation with spectral imaging capabilities," in Advances in X-Ray/EUV Optics, Components, and Applications, 2006, pp. 31704-31704.
[90]
U. Vogt et al., "Towards Soft X-Ray Phase-Sensitive Imaging with Diffractive Optical Elements," in Proc. 8th International Conference X-ray Microscopy, 2006, pp. 91-93.
[91]
P. Takman, U. Vogt and H. Hertz, "Towards compact x-ray microscopy with liquid-nitrogen-jet laser-plasma source," in Proceedings of 8th International Conference on X-ray Microscopy, 2006, pp. 12-14.
[92]
B. Kaulich et al., "TwinMic : A European Twin X-ray Microscopy Station Commissioned at ELETTRA," in Proc. 8th Int. Conf. X-ray Microscopy, 2006, pp. 22-25.

Icke refereegranskade

Artiklar

[93]
A. R. Fernandez et al., "NanoMAX Beamline, a nanoprobe beamline for scattering and imaging at MAX IV," Acta Crystallographica Section A : Foundations and Advances, vol. 74, pp. E317-E318, 2018.
Senaste synkning med DiVA:
2024-04-14 02:32:42