Waveguide-Integrated MEMS Concepts for Tunable Millimeter-Wave Systems
We are pleased to invite you to a PhD thesis defense on Micro and Nanosystems by Zargham Baghchehsaraei on April 4th at 10:00.
Tid: Fr 2014-04-04 kl 10.00 - 13.00
Plats: F3, Lindstedtsvägen 26 Entreplan
Ämnesområde: Electrical Measurements
Respondent: Zargham Baghchehsaraei , Micro and Nanosystems
Opponent: Doctor Tauno Vähä-Heikkilä
Handledare: Associate Professor Joachim Oberhammer
This thesis presents novel waveguide-integrated devices based on microelectromechanical systems (MEMS) for tunable millimeter-wave systems.
The first group comprises W-band (75–110 GHz) waveguide switches, reconfigurable waveguide irises, switchable cavity resonators, and tunable bandpass filters implemented by integration of novel 30-µm thick MEMS-reconfigurable surfaces into a WR-12 rectangular waveguide. The MEMS-reconfigurable surface is structured in the device layer of a silicon-on-insulator (SOI) wafer using metallized mono-crystalline silicon as structural material, and modified for different states by on-chip push-pull electrostatic comb-drive MEMS actuators.
The second category comprises a MEMS-based reconfigurable finlines integrated into a rectangular waveguide to demonstrate a waveguide phase shifter for a phased array antenna.
Furthermore, this thesis investigates the low-loss integration of millimeter-wave MEMS-reconfigurable devices into rectangular waveguide with conductive polymer interposers.