Microsystem Technology

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Welcome to the course website!

MicroSystem Technology (MST, also called MEMS or MicroElectroMechanical Systems) is an interdisciplinary field which deals with the world of technical components and systems with sizes in the range sub-millimetre down to 100 nm. Application areas range from automotive and IT systems to medical and biochemical applications.

The course consists of:

  • A lecture/seminar series describing various micro systems and micro sensors. The lecture series consists of 5 presential lectures and 10 video lectures. Seminar sessions will be used to dicuss the video lectures and the following group assignment together with the teacher. 
  • 5 Group assignments (GAs). The GAs will be written in groups of 3 students each. The groups will be formed randomly by the teachers, and reshuffled every second assignment.
  • A mandatory project laboratory (2 separate days) where micromechanical sensors are fabricated and characterized. The project laboratory will be graded based on a lab report.
  • A written examination based on the Group Assignments and the video quizes. The exam will be used to address the individual learning outcome.

The videos of the lectures are accessed through the Scalable Learning platform. To view them, you need to register here:
and follow the instructions to verify your account and log in.
Since you are required to watch the corresponding lecture before participating in each seminar, you must register under you full name and using your @kth.se email.
After log in, press the "Join Course" link and enter the course enrollment key:
Please come prepared to the seminars. The video lectures and group assignments will be uploaded one week prior to the corresponding seminar. The deadline for watching the video lectures will be 2 days before the corresponding seminar. The list with the students that did not watch the video within the time frame will be visible to the teacher. The seminars are then based on a dialogue of the teacher with the students and group work on the group assignment. The seminars will only be useful if you have watched the lectures and started to think about the group assignment.

The deadline is two days before the corresponding seminar date at 23:59 in the evening. This gives the teacher one day to prepare the seminar session, based on your feedback and questions given in the Scalable Learning interface while you watch the videos.

Attendance to 80% of the lectures/seminars is mandatory. Attending students must sign the attendance list that will be available at each lecture/seminar. Students are not allowed to sign for absent students. Detection of signatures made for students that are absent will be reported to the Disciplinary Board of KTH.

Attendance to 80% of the lectures/seminars is mandatory. An attendance list will be handed over at each lecture/seminar. Students are not allowed to sign for absent colleagues. Detection of signatures from absent students on the list will be reported to the Disciplinary Board of KTH.

The course includes two full days of laboratory exercises.

Every Master student must fill in a doodle pool. Write your full name and select your preference for the lab dates. Please note that the dates of Lab1 and Lab2 are coupled and you will choose both dates at the same time. The number of participants per group is limited to 4. Manually editing of entries - even your own - is not allowed. If you have modified your booking send an email to enri@kth.se, otherwise your booking will be cancelled and you will be assigned a time slot after the rest of the students have selected theirs.

The written exam is designed to test knowledge about the principles and fundamental concepts that you have worked with in the group assignments, the lectures, and in the lab. Similar questions will be given as examples in the seminars. The exam will consist of 20 multiple-choice questions. The exam will be graded with F, E or B. You need to get E or B to pass the course. With E on the exam the course grade will be the grade from the group assignments plus the lab report. With B on the exam, the course grade will be one step higher than that of the group assignments plus the lab report.

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