MST review on IC and MEMS integration featured in Nature Microsystems & Nanoengineering
The review paper, focused on integration of Microelectromechanical systems (MEMS) with Integrated circuits (IC) was published in the launching issue of Microsystems & Nanoengineering, by Nature Publishing Group.
Combining micrometer-sized movable components and electronic devices adds functionality to integrated circuits. Microelectromechanical systems (MEMS) are flexible transducers that can measure acceleration or the presence of chemicals, to give just two examples. Andreas C. Fischer and colleagues from the KTH Royal Institute of Technology in Sweden review both traditional and emerging approaches forplacing MEMS on the same platform as the electronics needed to process the electrical signals they produce, thus producing smaller and cheaper components. Such approaches include creating the MEMS and electronics on separate substrates and then combining them, or developing fabrication processes that are able to define both types of device on the same substrate.
The review article can be found on the journal webpage and on DiVA .
This review article is featured in the launching issue of Nature Microsystems & Nanoengineering, which is an online-only, open access international journal devoted to publishing original research results and reviews on all aspects of Micro and Nano Electro Mechanical Systems from fundamental to applied research. The journal is published by Nature Publishing Group in partnership with the Institute of Electronics, Chinese Academy of Sciences.