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Division of Micro and Nanosystems

The Division of Micro and Nanosystems (MST) focuses on Microsystems (MEMS) and Nanoengineering (NEMS) and their application in the fields of medicine, life sciences, information and communication technology (ICT), security, transport, and aerospace.

The division is part of the Department of Intelligent Systems at the School of Electrical Engineering and Computer Science .

Research areas


Latest publications

B. Beuerle et al., "A CPW Probe to Rectangular Waveguide Transition for On-Wafer Micromachined Waveguide Characterization," IEEE Transactions on Terahertz Science and Technology, vol. 14, no. 1, pp. 98-108, 2024.
M. Mehrabi Gohari, O. Glubokov and J. Oberhammer, "Novel Negative Coupling Structure for Rectangular Waveguide Cavity Filters," in Proceedings IEEE International Microwave Filter Workshop IMFW 2024, 2024.
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Belongs to: Micro and Nanosystems
Last changed: Dec 14, 2022